CA1078052A - Integral color filter for solid-state imaging device - Google Patents
Integral color filter for solid-state imaging deviceInfo
- Publication number
- CA1078052A CA1078052A CA286,449A CA286449A CA1078052A CA 1078052 A CA1078052 A CA 1078052A CA 286449 A CA286449 A CA 286449A CA 1078052 A CA1078052 A CA 1078052A
- Authority
- CA
- Canada
- Prior art keywords
- dye
- filter
- filter elements
- radiation
- receiving layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000003384 imaging method Methods 0.000 title claims abstract description 79
- 238000000034 method Methods 0.000 claims abstract description 47
- 229920002120 photoresistant polymer Polymers 0.000 claims abstract description 46
- 230000005855 radiation Effects 0.000 claims abstract description 38
- 230000005540 biological transmission Effects 0.000 claims abstract description 23
- 238000001228 spectrum Methods 0.000 claims abstract description 17
- 238000010438 heat treatment Methods 0.000 claims abstract description 12
- 238000010521 absorption reaction Methods 0.000 claims abstract description 7
- 239000011248 coating agent Substances 0.000 claims description 18
- 238000000576 coating method Methods 0.000 claims description 18
- 230000031700 light absorption Effects 0.000 claims description 12
- 229920000642 polymer Polymers 0.000 claims description 11
- 238000001429 visible spectrum Methods 0.000 claims description 5
- 229910052729 chemical element Inorganic materials 0.000 claims description 2
- 238000009740 moulding (composite fabrication) Methods 0.000 claims 15
- 230000001276 controlling effect Effects 0.000 claims 6
- 238000010030 laminating Methods 0.000 claims 3
- 230000009477 glass transition Effects 0.000 claims 2
- 239000000975 dye Substances 0.000 abstract description 98
- 238000009792 diffusion process Methods 0.000 abstract description 5
- 239000010410 layer Substances 0.000 description 69
- 229920000728 polyester Polymers 0.000 description 22
- 238000012546 transfer Methods 0.000 description 21
- 108010010803 Gelatin Proteins 0.000 description 17
- 239000008273 gelatin Substances 0.000 description 17
- 229920000159 gelatin Polymers 0.000 description 17
- 235000019322 gelatine Nutrition 0.000 description 17
- 235000011852 gelatine desserts Nutrition 0.000 description 17
- 125000003367 polycyclic group Chemical group 0.000 description 13
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 12
- 239000002904 solvent Substances 0.000 description 12
- 239000000499 gel Substances 0.000 description 11
- 239000000758 substrate Substances 0.000 description 11
- -1 aromatic diol Chemical class 0.000 description 10
- OFOBLEOULBTSOW-UHFFFAOYSA-N Malonic acid Chemical compound OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 9
- 238000013459 approach Methods 0.000 description 9
- 239000010408 film Substances 0.000 description 8
- 230000008569 process Effects 0.000 description 8
- 150000003254 radicals Chemical class 0.000 description 7
- 229920006395 saturated elastomer Polymers 0.000 description 7
- 235000012239 silicon dioxide Nutrition 0.000 description 7
- 238000003491 array Methods 0.000 description 6
- QVQLCTNNEUAWMS-UHFFFAOYSA-N barium oxide Chemical compound [Ba]=O QVQLCTNNEUAWMS-UHFFFAOYSA-N 0.000 description 6
- 229910001864 baryta Inorganic materials 0.000 description 6
- 150000002009 diols Chemical class 0.000 description 6
- 239000013598 vector Substances 0.000 description 6
- 125000000217 alkyl group Chemical group 0.000 description 5
- 125000003118 aryl group Chemical group 0.000 description 5
- 229910052799 carbon Inorganic materials 0.000 description 5
- 239000001046 green dye Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 239000010453 quartz Substances 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 125000002619 bicyclic group Chemical group 0.000 description 4
- BVKZGUZCCUSVTD-UHFFFAOYSA-N carbonic acid Chemical compound OC(O)=O BVKZGUZCCUSVTD-UHFFFAOYSA-N 0.000 description 4
- 238000009833 condensation Methods 0.000 description 4
- 230000005494 condensation Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 4
- 239000002356 single layer Substances 0.000 description 4
- UFWIBTONFRDIAS-UHFFFAOYSA-N Naphthalene Chemical compound C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 description 3
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 239000001045 blue dye Substances 0.000 description 3
- 150000001721 carbon Chemical group 0.000 description 3
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 3
- 239000000969 carrier Substances 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 238000011161 development Methods 0.000 description 3
- 150000001991 dicarboxylic acids Chemical class 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910052736 halogen Inorganic materials 0.000 description 3
- 150000002367 halogens Chemical class 0.000 description 3
- 238000005065 mining Methods 0.000 description 3
- ZUOUZKKEUPVFJK-UHFFFAOYSA-N phenylbenzene Natural products C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 description 3
- 239000001044 red dye Substances 0.000 description 3
- 238000011160 research Methods 0.000 description 3
- 238000005070 sampling Methods 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 238000003756 stirring Methods 0.000 description 3
- KKEYFWRCBNTPAC-UHFFFAOYSA-L terephthalate(2-) Chemical compound [O-]C(=O)C1=CC=C(C([O-])=O)C=C1 KKEYFWRCBNTPAC-UHFFFAOYSA-L 0.000 description 3
- 239000004753 textile Substances 0.000 description 3
- 238000010023 transfer printing Methods 0.000 description 3
- NQMUGNMMFTYOHK-UHFFFAOYSA-N 1-methoxynaphthalene Chemical compound C1=CC=C2C(OC)=CC=CC2=C1 NQMUGNMMFTYOHK-UHFFFAOYSA-N 0.000 description 2
- QWBBPBRQALCEIZ-UHFFFAOYSA-N 2,3-dimethylphenol Chemical compound CC1=CC=CC(O)=C1C QWBBPBRQALCEIZ-UHFFFAOYSA-N 0.000 description 2
- VXSCPERJHPWROZ-UHFFFAOYSA-N 2,4,5-trimethylphenol Chemical compound CC1=CC(C)=C(O)C=C1C VXSCPERJHPWROZ-UHFFFAOYSA-N 0.000 description 2
- NKTOLZVEWDHZMU-UHFFFAOYSA-N 2,5-xylenol Chemical compound CC1=CC=C(C)C(O)=C1 NKTOLZVEWDHZMU-UHFFFAOYSA-N 0.000 description 2
- FDQQNNZKEJIHMS-UHFFFAOYSA-N 3,4,5-trimethylphenol Chemical compound CC1=CC(O)=CC(C)=C1C FDQQNNZKEJIHMS-UHFFFAOYSA-N 0.000 description 2
- YCOXTKKNXUZSKD-UHFFFAOYSA-N 3,4-xylenol Chemical compound CC1=CC=C(O)C=C1C YCOXTKKNXUZSKD-UHFFFAOYSA-N 0.000 description 2
- TUAMRELNJMMDMT-UHFFFAOYSA-N 3,5-xylenol Chemical compound CC1=CC(C)=CC(O)=C1 TUAMRELNJMMDMT-UHFFFAOYSA-N 0.000 description 2
- DLFVBJFMPXGRIB-UHFFFAOYSA-N Acetamide Chemical compound CC(N)=O DLFVBJFMPXGRIB-UHFFFAOYSA-N 0.000 description 2
- 229930185605 Bisphenol Natural products 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- HPEUJPJOZXNMSJ-UHFFFAOYSA-N Methyl stearate Chemical compound CCCCCCCCCCCCCCCCCC(=O)OC HPEUJPJOZXNMSJ-UHFFFAOYSA-N 0.000 description 2
- IMNFDUFMRHMDMM-UHFFFAOYSA-N N-Heptane Chemical compound CCCCCCC IMNFDUFMRHMDMM-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- DZBUGLKDJFMEHC-UHFFFAOYSA-N acridine Chemical compound C1=CC=CC2=CC3=CC=CC=C3N=C21 DZBUGLKDJFMEHC-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 235000010290 biphenyl Nutrition 0.000 description 2
- 239000004305 biphenyl Substances 0.000 description 2
- 238000001444 catalytic combustion detection Methods 0.000 description 2
- YCIMNLLNPGFGHC-UHFFFAOYSA-N catechol Chemical compound OC1=CC=CC=C1O YCIMNLLNPGFGHC-UHFFFAOYSA-N 0.000 description 2
- 235000014113 dietary fatty acids Nutrition 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- SQNZJJAZBFDUTD-UHFFFAOYSA-N durene Chemical compound CC1=CC(C)=C(C)C=C1C SQNZJJAZBFDUTD-UHFFFAOYSA-N 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 239000000194 fatty acid Substances 0.000 description 2
- 229930195729 fatty acid Natural products 0.000 description 2
- 150000004665 fatty acids Chemical class 0.000 description 2
- IPCSVZSSVZVIGE-UHFFFAOYSA-N hexadecanoic acid Chemical compound CCCCCCCCCCCCCCCC(O)=O IPCSVZSSVZVIGE-UHFFFAOYSA-N 0.000 description 2
- 150000002430 hydrocarbons Chemical group 0.000 description 2
- QQVIHTHCMHWDBS-UHFFFAOYSA-N isophthalic acid Chemical compound OC(=O)C1=CC=CC(C(O)=O)=C1 QQVIHTHCMHWDBS-UHFFFAOYSA-N 0.000 description 2
- GPSDUZXPYCFOSQ-UHFFFAOYSA-N m-toluic acid Chemical compound CC1=CC=CC(C(O)=O)=C1 GPSDUZXPYCFOSQ-UHFFFAOYSA-N 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- BDJRBEYXGGNYIS-UHFFFAOYSA-N nonanedioic acid Chemical compound OC(=O)CCCCCCCC(O)=O BDJRBEYXGGNYIS-UHFFFAOYSA-N 0.000 description 2
- 150000002847 norbornane derivatives Chemical class 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- YNPNZTXNASCQKK-UHFFFAOYSA-N phenanthrene Chemical compound C1=CC=C2C3=CC=CC=C3C=CC2=C1 YNPNZTXNASCQKK-UHFFFAOYSA-N 0.000 description 2
- WLJVNTCWHIRURA-UHFFFAOYSA-N pimelic acid Chemical compound OC(=O)CCCCCC(O)=O WLJVNTCWHIRURA-UHFFFAOYSA-N 0.000 description 2
- WQGWDDDVZFFDIG-UHFFFAOYSA-N pyrogallol Chemical compound OC1=CC=CC(O)=C1O WQGWDDDVZFFDIG-UHFFFAOYSA-N 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- 238000009987 spinning Methods 0.000 description 2
- TYFQFVWCELRYAO-UHFFFAOYSA-N suberic acid Chemical compound OC(=O)CCCCCCC(O)=O TYFQFVWCELRYAO-UHFFFAOYSA-N 0.000 description 2
- 125000001424 substituent group Chemical group 0.000 description 2
- KZNICNPSHKQLFF-UHFFFAOYSA-N succinimide Chemical compound O=C1CCC(=O)N1 KZNICNPSHKQLFF-UHFFFAOYSA-N 0.000 description 2
- KKEYFWRCBNTPAC-UHFFFAOYSA-N terephthalic acid group Chemical group C(C1=CC=C(C(=O)O)C=C1)(=O)O KKEYFWRCBNTPAC-UHFFFAOYSA-N 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- JOXIMZWYDAKGHI-UHFFFAOYSA-N toluene-4-sulfonic acid Chemical compound CC1=CC=C(S(O)(=O)=O)C=C1 JOXIMZWYDAKGHI-UHFFFAOYSA-N 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 230000008016 vaporization Effects 0.000 description 2
- 230000004304 visual acuity Effects 0.000 description 2
- JNELGWHKGNBSMD-UHFFFAOYSA-N xanthone Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3OC2=C1 JNELGWHKGNBSMD-UHFFFAOYSA-N 0.000 description 2
- NLXFWUZKOOWWFD-UHFFFAOYSA-N 1-(2-hydroxyethylamino)-4-(methylamino)anthracene-9,10-dione Chemical compound O=C1C2=CC=CC=C2C(=O)C2=C1C(NCCO)=CC=C2NC NLXFWUZKOOWWFD-UHFFFAOYSA-N 0.000 description 1
- RTBFRGCFXZNCOE-UHFFFAOYSA-N 1-methylsulfonylpiperidin-4-one Chemical compound CS(=O)(=O)N1CCC(=O)CC1 RTBFRGCFXZNCOE-UHFFFAOYSA-N 0.000 description 1
- BPRYUXCVCCNUFE-UHFFFAOYSA-N 2,4,6-trimethylphenol Chemical compound CC1=CC(C)=C(O)C(C)=C1 BPRYUXCVCCNUFE-UHFFFAOYSA-N 0.000 description 1
- BCHZICNRHXRCHY-UHFFFAOYSA-N 2h-oxazine Chemical compound N1OC=CC=C1 BCHZICNRHXRCHY-UHFFFAOYSA-N 0.000 description 1
- VPWNQTHUCYMVMZ-UHFFFAOYSA-N 4,4'-sulfonyldiphenol Chemical class C1=CC(O)=CC=C1S(=O)(=O)C1=CC=C(O)C=C1 VPWNQTHUCYMVMZ-UHFFFAOYSA-N 0.000 description 1
- SQJQLYOMPSJVQS-UHFFFAOYSA-N 4-(4-carboxyphenyl)sulfonylbenzoic acid Chemical compound C1=CC(C(=O)O)=CC=C1S(=O)(=O)C1=CC=C(C(O)=O)C=C1 SQJQLYOMPSJVQS-UHFFFAOYSA-N 0.000 description 1
- XKACUVXWRVMXOE-UHFFFAOYSA-N 4-[2-(4-carboxyphenyl)propan-2-yl]benzoic acid Chemical compound C=1C=C(C(O)=O)C=CC=1C(C)(C)C1=CC=C(C(O)=O)C=C1 XKACUVXWRVMXOE-UHFFFAOYSA-N 0.000 description 1
- RBWZNZOIVJUVRB-UHFFFAOYSA-N 4-[3-(4-hydroxyphenyl)-3-bicyclo[2.2.1]heptanyl]phenol Chemical compound C1=CC(O)=CC=C1C1(C=2C=CC(O)=CC=2)C(C2)CCC2C1 RBWZNZOIVJUVRB-UHFFFAOYSA-N 0.000 description 1
- RQMVDDYXNYUIFY-UHFFFAOYSA-N 4-[3-bicyclo[2.2.1]heptanyl-(4-hydroxyphenyl)methyl]phenol Chemical compound C1=CC(O)=CC=C1C(C=1C=CC(O)=CC=1)C1C(C2)CCC2C1 RQMVDDYXNYUIFY-UHFFFAOYSA-N 0.000 description 1
- ZBCATMYQYDCTIZ-UHFFFAOYSA-N 4-methylcatechol Chemical compound CC1=CC=C(O)C(O)=C1 ZBCATMYQYDCTIZ-UHFFFAOYSA-N 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 229930091371 Fructose Natural products 0.000 description 1
- 239000005715 Fructose Substances 0.000 description 1
- RFSUNEUAIZKAJO-ARQDHWQXSA-N Fructose Chemical compound OC[C@H]1O[C@](O)(CO)[C@@H](O)[C@@H]1O RFSUNEUAIZKAJO-ARQDHWQXSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical class [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 235000021314 Palmitic acid Nutrition 0.000 description 1
- 239000002202 Polyethylene glycol Substances 0.000 description 1
- 108010076504 Protein Sorting Signals Proteins 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 235000021355 Stearic acid Nutrition 0.000 description 1
- PJANXHGTPQOBST-VAWYXSNFSA-N Stilbene Natural products C=1C=CC=CC=1/C=C/C1=CC=CC=C1 PJANXHGTPQOBST-VAWYXSNFSA-N 0.000 description 1
- CIUQDSCDWFSTQR-UHFFFAOYSA-N [C]1=CC=CC=C1 Chemical compound [C]1=CC=CC=C1 CIUQDSCDWFSTQR-UHFFFAOYSA-N 0.000 description 1
- CWRYPZZKDGJXCA-UHFFFAOYSA-N acenaphthene Chemical compound C1=CC(CC2)=C3C2=CC=CC3=C1 CWRYPZZKDGJXCA-UHFFFAOYSA-N 0.000 description 1
- 125000001118 alkylidene group Chemical group 0.000 description 1
- 239000002280 amphoteric surfactant Substances 0.000 description 1
- JFCQEDHGNNZCLN-UHFFFAOYSA-N anhydrous glutaric acid Natural products OC(=O)CCCC(O)=O JFCQEDHGNNZCLN-UHFFFAOYSA-N 0.000 description 1
- 125000000129 anionic group Chemical group 0.000 description 1
- 239000003945 anionic surfactant Substances 0.000 description 1
- PYKYMHQGRFAEBM-UHFFFAOYSA-N anthraquinone Natural products CCC(=O)c1c(O)c2C(=O)C3C(C=CC=C3O)C(=O)c2cc1CC(=O)OC PYKYMHQGRFAEBM-UHFFFAOYSA-N 0.000 description 1
- 150000004056 anthraquinones Chemical class 0.000 description 1
- 150000004982 aromatic amines Chemical class 0.000 description 1
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 125000000751 azo group Chemical group [*]N=N[*] 0.000 description 1
- WXLFIFHRGFOVCD-UHFFFAOYSA-L azophloxine Chemical compound [Na+].[Na+].OC1=C2C(NC(=O)C)=CC(S([O-])(=O)=O)=CC2=CC(S([O-])(=O)=O)=C1N=NC1=CC=CC=C1 WXLFIFHRGFOVCD-UHFFFAOYSA-L 0.000 description 1
- TZCXTZWJZNENPQ-UHFFFAOYSA-L barium sulfate Inorganic materials [Ba+2].[O-]S([O-])(=O)=O TZCXTZWJZNENPQ-UHFFFAOYSA-L 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 235000015278 beef Nutrition 0.000 description 1
- SRSXLGNVWSONIS-UHFFFAOYSA-N benzenesulfonic acid Chemical compound OS(=O)(=O)C1=CC=CC=C1 SRSXLGNVWSONIS-UHFFFAOYSA-N 0.000 description 1
- 229940092714 benzenesulfonic acid Drugs 0.000 description 1
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 1
- 239000012965 benzophenone Substances 0.000 description 1
- GPRLTFBKWDERLU-UHFFFAOYSA-N bicyclo[2.2.2]octane Chemical compound C1CC2CCC1CC2 GPRLTFBKWDERLU-UHFFFAOYSA-N 0.000 description 1
- 125000006267 biphenyl group Chemical group 0.000 description 1
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 150000001735 carboxylic acids Chemical class 0.000 description 1
- 125000002091 cationic group Chemical group 0.000 description 1
- 239000003093 cationic surfactant Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 229940000425 combination drug Drugs 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000006854 communication Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 210000003298 dental enamel Anatomy 0.000 description 1
- CAMHHLOGFDZBBG-UHFFFAOYSA-N epoxidized methyl oleate Natural products CCCCCCCCC1OC1CCCCCCCC(=O)OC CAMHHLOGFDZBBG-UHFFFAOYSA-N 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 150000004820 halides Chemical group 0.000 description 1
- 125000005843 halogen group Chemical group 0.000 description 1
- 125000000623 heterocyclic group Chemical group 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 125000004356 hydroxy functional group Chemical group O* 0.000 description 1
- RSAZYXZUJROYKR-UHFFFAOYSA-N indophenol Chemical compound C1=CC(O)=CC=C1N=C1C=CC(=O)C=C1 RSAZYXZUJROYKR-UHFFFAOYSA-N 0.000 description 1
- 125000000654 isopropylidene group Chemical group C(C)(C)=* 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 description 1
- 239000011976 maleic acid Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- DDIZAANNODHTRB-UHFFFAOYSA-N methyl p-anisate Chemical compound COC(=O)C1=CC=C(OC)C=C1 DDIZAANNODHTRB-UHFFFAOYSA-N 0.000 description 1
- 125000001442 methylidyne group Chemical group [H]C#[*] 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- WQEPLUUGTLDZJY-UHFFFAOYSA-N n-Pentadecanoic acid Natural products CCCCCCCCCCCCCCC(O)=O WQEPLUUGTLDZJY-UHFFFAOYSA-N 0.000 description 1
- RXOHFPCZGPKIRD-UHFFFAOYSA-N naphthalene-2,6-dicarboxylic acid Chemical compound C1=C(C(O)=O)C=CC2=CC(C(=O)O)=CC=C21 RXOHFPCZGPKIRD-UHFFFAOYSA-N 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 125000004433 nitrogen atom Chemical group N* 0.000 description 1
- 239000002736 nonionic surfactant Substances 0.000 description 1
- UMRZSTCPUPJPOJ-KNVOCYPGSA-N norbornane Chemical group C1C[C@H]2CC[C@@H]1C2 UMRZSTCPUPJPOJ-KNVOCYPGSA-N 0.000 description 1
- ZWLPBLYKEWSWPD-UHFFFAOYSA-N o-toluic acid Chemical compound CC1=CC=CC=C1C(O)=O ZWLPBLYKEWSWPD-UHFFFAOYSA-N 0.000 description 1
- QIQXTHQIDYTFRH-UHFFFAOYSA-N octadecanoic acid Chemical compound CCCCCCCCCCCCCCCCCC(O)=O QIQXTHQIDYTFRH-UHFFFAOYSA-N 0.000 description 1
- OQCDKBAXFALNLD-UHFFFAOYSA-N octadecanoic acid Natural products CCCCCCCC(C)CCCCCCCCC(O)=O OQCDKBAXFALNLD-UHFFFAOYSA-N 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 239000012188 paraffin wax Substances 0.000 description 1
- DGBWPZSGHAXYGK-UHFFFAOYSA-N perinone Chemical compound C12=NC3=CC=CC=C3N2C(=O)C2=CC=C3C4=C2C1=CC=C4C(=O)N1C2=CC=CC=C2N=C13 DGBWPZSGHAXYGK-UHFFFAOYSA-N 0.000 description 1
- 150000002989 phenols Chemical class 0.000 description 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 229940079877 pyrogallol Drugs 0.000 description 1
- IZMJMCDDWKSTTK-UHFFFAOYSA-N quinoline yellow Chemical compound C1=CC=CC2=NC(C3C(C4=CC=CC=C4C3=O)=O)=CC=C21 IZMJMCDDWKSTTK-UHFFFAOYSA-N 0.000 description 1
- 235000012739 red 2G Nutrition 0.000 description 1
- 239000004180 red 2G Substances 0.000 description 1
- GHMLBKRAJCXXBS-UHFFFAOYSA-N resorcinol Chemical compound OC1=CC=CC(O)=C1 GHMLBKRAJCXXBS-UHFFFAOYSA-N 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 125000003003 spiro group Chemical group 0.000 description 1
- 239000008117 stearic acid Substances 0.000 description 1
- PJANXHGTPQOBST-UHFFFAOYSA-N stilbene Chemical compound C=1C=CC=CC=1C=CC1=CC=CC=C1 PJANXHGTPQOBST-UHFFFAOYSA-N 0.000 description 1
- 235000021286 stilbenes Nutrition 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 229960002317 succinimide Drugs 0.000 description 1
- 235000000346 sugar Nutrition 0.000 description 1
- 150000008163 sugars Chemical class 0.000 description 1
- SEEPANYCNGTZFQ-UHFFFAOYSA-N sulfadiazine Chemical compound C1=CC(N)=CC=C1S(=O)(=O)NC1=NC=CC=N1 SEEPANYCNGTZFQ-UHFFFAOYSA-N 0.000 description 1
- 125000000472 sulfonyl group Chemical group *S(*)(=O)=O 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 229920001059 synthetic polymer Polymers 0.000 description 1
- 239000003760 tallow Substances 0.000 description 1
- LPSXSORODABQKT-UHFFFAOYSA-N tetrahydrodicyclopentadiene Chemical compound C1C2CCC1C1C2CCC1 LPSXSORODABQKT-UHFFFAOYSA-N 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- ODHXBMXNKOYIBV-UHFFFAOYSA-N triphenylamine Chemical compound C1=CC=CC=C1N(C=1C=CC=CC=1)C1=CC=CC=C1 ODHXBMXNKOYIBV-UHFFFAOYSA-N 0.000 description 1
- 239000010981 turquoise Substances 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/30—Coatings
- H10F77/306—Coatings for devices having potential barriers
- H10F77/331—Coatings for devices having potential barriers for filtering or shielding light, e.g. multicolour filters for photodetectors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/201—Filters in the form of arrays
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
- G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/10—Integrated devices
- H10F39/12—Image sensors
- H10F39/15—Charge-coupled device [CCD] image sensors
- H10F39/156—CCD or CID colour image sensors
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49826—Assembling or joining
- Y10T29/49904—Assembling a subassembly, then assembling with a second subassembly
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Filters (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Color Television Image Signal Generators (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US05/730,886 US4081277A (en) | 1976-10-08 | 1976-10-08 | Method for making a solid-state color imaging device having an integral color filter and the device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1078052A true CA1078052A (en) | 1980-05-20 |
Family
ID=24937190
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA286,449A Expired CA1078052A (en) | 1976-10-08 | 1977-09-09 | Integral color filter for solid-state imaging device |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US4081277A (en, 2012) |
| JP (1) | JPS5347282A (en, 2012) |
| BE (1) | BE859551A (en, 2012) |
| CA (1) | CA1078052A (en, 2012) |
| DE (1) | DE2745288C3 (en, 2012) |
| FR (1) | FR2367391A1 (en, 2012) |
| GB (1) | GB1577680A (en, 2012) |
| NL (1) | NL7710966A (en, 2012) |
Families Citing this family (98)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4204866A (en) * | 1976-10-08 | 1980-05-27 | Eastman Kodak Company | Solid-state color imaging devices and method for making them |
| US4247799A (en) * | 1978-01-30 | 1981-01-27 | Eastman Kodak Company | Color imaging devices and color filter arrays using photo-bleachable dyes |
| US4345011A (en) * | 1978-01-30 | 1982-08-17 | Eastman Kodak Company | Color imaging devices and color filter arrays using photo-bleachable dyes |
| US4196009A (en) * | 1978-03-08 | 1980-04-01 | Eastman Kodak Company | Color imaging devices having integral color filter arrays |
| US4266017A (en) * | 1978-03-08 | 1981-05-05 | Eastman Kodak Company | Color imaging devices having integral color filter arrays |
| US4196010A (en) * | 1978-06-06 | 1980-04-01 | Eastman Kodak Company | Color filter arrays and color imaging devices |
| JPS556342A (en) * | 1978-06-28 | 1980-01-17 | Fuji Photo Film Co Ltd | Production of multicolor optical filter |
| US4386143A (en) * | 1978-06-28 | 1983-05-31 | Masamichi Sato | Multicolor optical filters and process for producing the same |
| US4267961A (en) * | 1978-09-06 | 1981-05-19 | Eastman Kodak Company | Photocrosslinkable, high-temperature-resistant polymers and their use in color imaging devices |
| US4190446A (en) * | 1978-09-06 | 1980-02-26 | Eastman Kodak Company | Photocrosslinkable, high-temperature-resistant polymers and their use in color imaging devices |
| JPS6046401B2 (ja) * | 1979-02-26 | 1985-10-16 | 株式会社日立製作所 | 固体撮像素子の製造方法 |
| JPS55126487A (en) * | 1979-03-26 | 1980-09-30 | Fuji Photo Film Co Ltd | Colored-picture forming method |
| DE3023131A1 (de) * | 1979-06-20 | 1981-01-08 | Canon Kk | Verfahren zum herstellen eines farbfilters |
| US4236098A (en) * | 1979-08-20 | 1980-11-25 | Eastman Kodak Company | Solid-state color imaging devices |
| US4383018A (en) * | 1979-09-04 | 1983-05-10 | Eastman Kodak Company | Color imaging devices having integral color filter arrays |
| US4239842A (en) * | 1979-09-13 | 1980-12-16 | Eastman Kodak Company | Color filter arrays, color imaging devices and methods of making same |
| US4340454A (en) * | 1979-09-14 | 1982-07-20 | Eastman Kodak Company | Photocrosslinkable, high-temperature-resistant polymers and their use in color imaging devices |
| JPS5687782U (en, 2012) * | 1979-12-10 | 1981-07-14 | ||
| US4264706A (en) * | 1980-03-12 | 1981-04-28 | Eastman Kodak Company | Dichromated hydrophilic colloid-latex copolymer compositions |
| EP0037529A1 (de) * | 1980-04-03 | 1981-10-14 | Agfa-Gevaert AG | Verfahren zur Herstellung eines Fotoempfängers mit einem multichroitischen Farbstreifenfilter |
| JPS56165362A (en) * | 1980-05-26 | 1981-12-18 | Hitachi Ltd | Manufacture of solid state color image pickup element |
| US4416961A (en) * | 1980-09-11 | 1983-11-22 | Eastman Kodak Company | Color imaging devices and color filter arrays using photo-bleachable dyes |
| JPS5754905A (en) | 1980-09-19 | 1982-04-01 | Hitachi Ltd | Manufacture of color filter |
| US4339514A (en) * | 1980-11-03 | 1982-07-13 | Polaroid Corporation | Process for making solid-state color imaging device |
| FR2506521A1 (fr) * | 1981-05-19 | 1982-11-26 | Thomson Csf | Procede de realisation d'un filtre colore pour photosenseur, et photosenseur muni d'un tel filtre |
| JPS5813090A (ja) * | 1981-07-16 | 1983-01-25 | Fuji Photo Film Co Ltd | カラ−固体撮像素子基板の製造方法 |
| JPS5813089A (ja) * | 1981-07-16 | 1983-01-25 | Fuji Photo Film Co Ltd | カラ−固体撮像素子基板の製造方法 |
| US4355087A (en) * | 1981-09-04 | 1982-10-19 | Eastman Kodak Company | Color imaging device having a color filter array using a metal salt of a long-chain fatty acid as a barrier |
| NL8105071A (nl) * | 1981-11-10 | 1983-06-01 | Philips Nv | Kleurenbeeldopneeminrichting. |
| FR2586488A1 (fr) * | 1985-08-23 | 1987-02-27 | France Etat | Procede de fabrication de filtres colores, utiles notamment pour la visualisation d'information et support pour la visualisation comportant de tels filtres colores |
| US4776671A (en) * | 1985-11-28 | 1988-10-11 | Nissha Printing Co., Ltd. | High property, high precision color filter and method for manufacturing the same |
| CA1293879C (en) * | 1986-06-20 | 1992-01-07 | Laurel Jean Pace | Color filter arrays |
| US4889410A (en) * | 1988-09-06 | 1989-12-26 | Eastman Kodak Company | Magenta filters |
| GB8824366D0 (en) * | 1988-10-18 | 1988-11-23 | Kodak Ltd | Method of making colour filter array |
| US4991936A (en) * | 1988-10-18 | 1991-02-12 | Eastman Kodak Company | Thermally-transferred color filter array element |
| GB8824365D0 (en) * | 1988-10-18 | 1988-11-23 | Kodak Ltd | Method of making colour filter array |
| US4988665A (en) * | 1989-05-18 | 1991-01-29 | Eastman Kodak Company | Arylazoaniline blue dyes for color filter array element |
| US4975410A (en) * | 1989-05-26 | 1990-12-04 | Eastman Kodak Company | Thermally-transferred color filter array element and process for preparing |
| GB8912486D0 (en) * | 1989-05-31 | 1989-07-19 | Kodak Ltd | Method of making grid lines for thermally-transferred colour filter array element |
| GB8912488D0 (en) * | 1989-05-31 | 1989-07-19 | Kodak Ltd | Method of making opaque grid lines for thermally-transferred colour filter array element |
| US4965242A (en) * | 1989-12-11 | 1990-10-23 | Eastman Kodak Company | Method of making color filter array for liquid crystal display |
| US4946827A (en) * | 1989-12-11 | 1990-08-07 | Eastman Kodak Company | Glass-to-polycarbonate adhesive for color filter array |
| US5166755A (en) * | 1990-05-23 | 1992-11-24 | Nahum Gat | Spectrometer apparatus |
| US5053299A (en) * | 1990-05-25 | 1991-10-01 | Eastman Kodak Company | Method of making color filter arrays |
| US5079214A (en) * | 1990-10-11 | 1992-01-07 | Eastman Kodak Company | Patterned receiver for color filter array |
| JPH04260050A (ja) * | 1990-10-24 | 1992-09-16 | Xerox Corp | フィルター付き感光体 |
| US5426058A (en) * | 1991-07-12 | 1995-06-20 | Sharp Kabushiki Kaisha | Method of manufacturing solid-state imaging device |
| US5229595A (en) * | 1991-12-19 | 1993-07-20 | Xerox Corporation | Fluid-filled color filtered input scanner arrays |
| JP3006631U (ja) * | 1994-07-14 | 1995-01-31 | 藤栄研材工業株式会社 | 定規体 |
| US5576265A (en) * | 1995-04-26 | 1996-11-19 | Eastman Kodak Company | Color filter arrays by stencil printing |
| KR0151258B1 (ko) * | 1995-06-22 | 1998-10-01 | 문정환 | 씨씨디 영상센서 및 그 제조방법 |
| JPH0934229A (ja) | 1995-07-07 | 1997-02-07 | Xerox Corp | カラー印刷機及びカラー画像生成方法 |
| US5686383A (en) * | 1995-08-22 | 1997-11-11 | Eastman Kodak Company | Method of making a color filter array by colorant transfer and lamination |
| EP0760487A1 (en) * | 1995-08-30 | 1997-03-05 | Eastman Kodak Company | Method of making a color filter array element |
| US5576267A (en) * | 1996-04-16 | 1996-11-19 | Eastman Kodak Company | Method of making a color filter array element |
| US5599766A (en) | 1995-11-01 | 1997-02-04 | Eastman Kodak Company | Method of making a color filter array element |
| US5708264A (en) * | 1995-11-07 | 1998-01-13 | Eastman Kodak Company | Planar color filter array for CCDs from dyed and mordant layers |
| US5677202A (en) | 1995-11-20 | 1997-10-14 | Eastman Kodak Company | Method for making planar color filter array for image sensors with embedded color filter arrays |
| US5683836A (en) | 1996-01-16 | 1997-11-04 | Eastman Kodak Company | Method of making black matrix grid lines for a color filter array |
| US5614465A (en) * | 1996-06-25 | 1997-03-25 | Eastman Kodak Company | Method of making a color filter array by thermal transfer |
| US5934779A (en) * | 1996-07-26 | 1999-08-10 | Eastman Kodak Company | Reflector and a reflector/light source system |
| US5961196A (en) * | 1996-07-26 | 1999-10-05 | Eastman Kodak Company | Flash device for dye transferring |
| US5902769A (en) * | 1996-11-05 | 1999-05-11 | Eastman Kodak Company | Thermal image stabilization by a reactive plastisizer |
| US5756240A (en) * | 1997-01-24 | 1998-05-26 | Eastman Kodak Company | Method of making color filter arrays by transferring colorant material |
| US5900339A (en) * | 1997-01-24 | 1999-05-04 | Eastman Kodak Company | Method of making color filter arrays by transferring colorant and lift-off |
| US5776641A (en) * | 1997-01-24 | 1998-07-07 | Eastman Kodak Company | Method of making color filter arrays by colorant transfer using chemical mechanical polishing |
| AU2492399A (en) * | 1998-02-02 | 1999-08-16 | Uniax Corporation | Image sensors made from organic semiconductors |
| US6297071B1 (en) | 1998-07-22 | 2001-10-02 | Eastman Kodak Company | Method of making planar image sensor color filter arrays |
| US7608811B2 (en) * | 2004-05-21 | 2009-10-27 | Aptina Imaging Corporation | Minimal depth light filtering image sensor |
| US7522786B2 (en) * | 2005-12-22 | 2009-04-21 | Palo Alto Research Center Incorporated | Transmitting light with photon energy information |
| US7291824B2 (en) * | 2005-12-22 | 2007-11-06 | Palo Alto Research Center Incorporated | Photosensing throughout energy range and in subranges |
| US7195848B2 (en) * | 2004-08-30 | 2007-03-27 | Eastman Kodak Company | Method of making inlaid color filter arrays |
| US7433552B2 (en) * | 2005-12-22 | 2008-10-07 | Palo Alto Research Center Incorporated | Obtaining analyte information |
| US7547904B2 (en) * | 2005-12-22 | 2009-06-16 | Palo Alto Research Center Incorporated | Sensing photon energies emanating from channels or moving objects |
| US7358476B2 (en) | 2005-12-22 | 2008-04-15 | Palo Alto Research Center Incorporated | Sensing photons from objects in channels |
| US7315667B2 (en) * | 2005-12-22 | 2008-01-01 | Palo Alto Research Center Incorporated | Propagating light to be sensed |
| US7386199B2 (en) * | 2005-12-22 | 2008-06-10 | Palo Alto Research Center Incorporated | Providing light to channels or portions |
| US7420677B2 (en) | 2005-12-22 | 2008-09-02 | Palo Alto Research Center Incorporated | Sensing photon energies of optical signals |
| US8437582B2 (en) | 2005-12-22 | 2013-05-07 | Palo Alto Research Center Incorporated | Transmitting light with lateral variation |
| US8821799B2 (en) | 2007-01-26 | 2014-09-02 | Palo Alto Research Center Incorporated | Method and system implementing spatially modulated excitation or emission for particle characterization with enhanced sensitivity |
| US9164037B2 (en) * | 2007-01-26 | 2015-10-20 | Palo Alto Research Center Incorporated | Method and system for evaluation of signals received from spatially modulated excitation and emission to accurately determine particle positions and distances |
| US7787112B2 (en) | 2007-10-22 | 2010-08-31 | Visiongate, Inc. | Depth of field extension for optical tomography |
| US8320983B2 (en) | 2007-12-17 | 2012-11-27 | Palo Alto Research Center Incorporated | Controlling transfer of objects affecting optical characteristics |
| US7894068B2 (en) * | 2008-02-04 | 2011-02-22 | Palo Alto Research Center Incorporated | Producing filters with combined transmission and/or reflection functions |
| US8153949B2 (en) * | 2008-12-18 | 2012-04-10 | Palo Alto Research Center Incorporated | Obtaining sensing results indicating time variation |
| US7701580B2 (en) * | 2008-02-01 | 2010-04-20 | Palo Alto Research Center Incorporated | Transmitting/reflecting emanating light with time variation |
| US8629981B2 (en) | 2008-02-01 | 2014-01-14 | Palo Alto Research Center Incorporated | Analyzers with time variation based on color-coded spatial modulation |
| US8373860B2 (en) * | 2008-02-01 | 2013-02-12 | Palo Alto Research Center Incorporated | Transmitting/reflecting emanating light with time variation |
| US8254023B2 (en) * | 2009-02-23 | 2012-08-28 | Visiongate, Inc. | Optical tomography system with high-speed scanner |
| US8383309B2 (en) * | 2009-11-03 | 2013-02-26 | Xerox Corporation | Preparation of sublimation colorant dispersion |
| US8709696B2 (en) | 2010-08-16 | 2014-04-29 | Xerox Corporation | Curable sublimation marking material and sublimation transfer process using same |
| US8337007B2 (en) | 2010-08-16 | 2012-12-25 | Xerox Corporation | Curable sublimation ink and sublimation transfer process using same |
| US9372425B2 (en) | 2010-08-16 | 2016-06-21 | Xerox Corporation | Curable sublimation toner and sublimation transfer process using same |
| US9029800B2 (en) | 2011-08-09 | 2015-05-12 | Palo Alto Research Center Incorporated | Compact analyzer with spatial modulation and multiple intensity modulated excitation sources |
| US8723140B2 (en) | 2011-08-09 | 2014-05-13 | Palo Alto Research Center Incorporated | Particle analyzer with spatial modulation and long lifetime bioprobes |
| US9575304B2 (en) * | 2012-06-25 | 2017-02-21 | Huron Technologies International Inc. | Pathology slide scanners for fluorescence and brightfield imaging and method of operation |
| US8921277B2 (en) | 2012-09-26 | 2014-12-30 | Palo Alto Research Center Incorporated | Multiplexed flow assay based on absorption-encoded micro beads |
| US11069054B2 (en) | 2015-12-30 | 2021-07-20 | Visiongate, Inc. | System and method for automated detection and monitoring of dysplasia and administration of immunotherapy and chemotherapy |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR358747A (en, 2012) * | ||||
| US2681857A (en) * | 1949-09-03 | 1954-06-22 | Polaroid Corp | Process for making a photographic color screen |
| US2750524A (en) * | 1951-11-15 | 1956-06-12 | Mergenthaler Linotype Gmbh | Perforate mask for multicolor television apparatus and method of producting same |
| US3317466A (en) * | 1961-09-14 | 1967-05-02 | Eastman Kodak Co | Three-dimensional polycyclic bisphenol polycarbonates and polyesters |
| CH272468A4 (en, 2012) * | 1968-02-26 | 1974-07-31 | ||
| US3940246A (en) * | 1971-04-26 | 1976-02-24 | Ciba-Geigy Ag | Sublimation transfer and isocyanate fixation of amino- or hydroxy-containing dyestuffs and transfer sheets therefor |
| US3971065A (en) * | 1975-03-05 | 1976-07-20 | Eastman Kodak Company | Color imaging array |
-
1976
- 1976-10-08 US US05/730,886 patent/US4081277A/en not_active Expired - Lifetime
-
1977
- 1977-09-09 CA CA286,449A patent/CA1078052A/en not_active Expired
- 1977-10-06 NL NL7710966A patent/NL7710966A/xx not_active Application Discontinuation
- 1977-10-07 DE DE2745288A patent/DE2745288C3/de not_active Expired
- 1977-10-07 FR FR7730189A patent/FR2367391A1/fr active Granted
- 1977-10-08 JP JP12135677A patent/JPS5347282A/ja active Granted
- 1977-10-10 BE BE181599A patent/BE859551A/xx unknown
- 1977-10-10 GB GB42114/77A patent/GB1577680A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| NL7710966A (nl) | 1978-04-11 |
| DE2745288B2 (de) | 1980-05-29 |
| JPS613401B2 (en, 2012) | 1986-02-01 |
| GB1577680A (en) | 1980-10-29 |
| DE2745288C3 (de) | 1981-01-29 |
| FR2367391B1 (en, 2012) | 1980-08-01 |
| DE2745288A1 (de) | 1978-04-13 |
| US4081277A (en) | 1978-03-28 |
| JPS5347282A (en) | 1978-04-27 |
| BE859551A (fr) | 1978-04-10 |
| FR2367391A1 (fr) | 1978-05-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CA1078052A (en) | Integral color filter for solid-state imaging device | |
| EP0391303B1 (en) | Color filter array element with polycarbonate receiving layer | |
| US5324930A (en) | Lens array for photodiode device with an aperture having a lens region and a non-lens region | |
| US5851709A (en) | Method for selective transfer of a color organic layer | |
| US4204866A (en) | Solid-state color imaging devices and method for making them | |
| US4239842A (en) | Color filter arrays, color imaging devices and methods of making same | |
| EP0529362A1 (en) | Method of making thermally transferred color filter arrays with incorporated black matrix using electronic light flash | |
| US5073534A (en) | Color filter array element with polyester receiving layer | |
| US4196010A (en) | Color filter arrays and color imaging devices | |
| EP0771673B1 (en) | Method of making a color filter array element | |
| US4168448A (en) | Solid-state color imaging device having an integral color filter | |
| US4339514A (en) | Process for making solid-state color imaging device | |
| US4383018A (en) | Color imaging devices having integral color filter arrays | |
| US4236098A (en) | Solid-state color imaging devices | |
| US4196009A (en) | Color imaging devices having integral color filter arrays | |
| JPS6167003A (ja) | カラ−イメ−ジセンサ− | |
| JPH0816723B2 (ja) | カラーフィルターアレイ素子用アリールアゾアニリンブルー染料 | |
| US4266017A (en) | Color imaging devices having integral color filter arrays | |
| JPH0235282B2 (en, 2012) | ||
| CA1078500A (en) | Solid-state color imaging devices and method for making them | |
| EP0400737B1 (en) | Method of making opaque grid lines for thermally-transferred color filter array element | |
| US5262379A (en) | Color filter array element with polyimide receiving layer | |
| JPH07104445B2 (ja) | 接着層を有するカラーフィルターアレイ素子 | |
| JP2504693B2 (ja) | 感熱転写カラ―フィルタ―アレイ素子 | |
| GB2251335A (en) | Colour filter and its manufacture |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MKEX | Expiry |