CA1074575A - Abrasive polishing suspensions and method for making same - Google Patents
Abrasive polishing suspensions and method for making sameInfo
- Publication number
- CA1074575A CA1074575A CA237,424A CA237424A CA1074575A CA 1074575 A CA1074575 A CA 1074575A CA 237424 A CA237424 A CA 237424A CA 1074575 A CA1074575 A CA 1074575A
- Authority
- CA
- Canada
- Prior art keywords
- dispersion
- weight
- carbopol
- abrasive
- base liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000725 suspension Substances 0.000 title claims abstract description 41
- 238000000034 method Methods 0.000 title claims abstract description 21
- 238000005498 polishing Methods 0.000 title abstract description 8
- 239000000843 powder Substances 0.000 claims abstract description 66
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 42
- NIXOWILDQLNWCW-UHFFFAOYSA-N Acrylic acid Chemical group OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims abstract description 21
- 229940096529 carboxypolymethylene Drugs 0.000 claims abstract description 21
- 229920000642 polymer Polymers 0.000 claims abstract description 21
- 239000006185 dispersion Substances 0.000 claims description 97
- 239000007788 liquid Substances 0.000 claims description 24
- 239000002245 particle Substances 0.000 claims description 11
- 238000005189 flocculation Methods 0.000 claims description 8
- 230000016615 flocculation Effects 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 7
- 150000002334 glycols Chemical class 0.000 claims description 3
- 239000006194 liquid suspension Substances 0.000 claims description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 239000002585 base Substances 0.000 claims 9
- 229910052593 corundum Inorganic materials 0.000 claims 1
- 239000012458 free base Substances 0.000 claims 1
- 229910001845 yogo sapphire Inorganic materials 0.000 claims 1
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 abstract description 36
- 238000007792 addition Methods 0.000 abstract description 16
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 abstract description 10
- 229920002125 Sokalan® Polymers 0.000 description 40
- JVTIXNMXDLQEJE-UHFFFAOYSA-N 2-decanoyloxypropyl decanoate 2-octanoyloxypropyl octanoate Chemical compound C(CCCCCCC)(=O)OCC(C)OC(CCCCCCC)=O.C(=O)(CCCCCCCCC)OCC(C)OC(=O)CCCCCCCCC JVTIXNMXDLQEJE-UHFFFAOYSA-N 0.000 description 38
- LVTYICIALWPMFW-UHFFFAOYSA-N diisopropanolamine Chemical compound CC(O)CNCC(C)O LVTYICIALWPMFW-UHFFFAOYSA-N 0.000 description 21
- 239000000126 substance Substances 0.000 description 20
- 239000000203 mixture Substances 0.000 description 19
- 102100032373 Coiled-coil domain-containing protein 85B Human genes 0.000 description 13
- 101000868814 Homo sapiens Coiled-coil domain-containing protein 85B Proteins 0.000 description 13
- 239000002952 polymeric resin Substances 0.000 description 10
- 229940043276 diisopropanolamine Drugs 0.000 description 8
- 229920005989 resin Polymers 0.000 description 7
- 239000011347 resin Substances 0.000 description 7
- 239000003795 chemical substances by application Substances 0.000 description 6
- 238000002156 mixing Methods 0.000 description 5
- 230000003472 neutralizing effect Effects 0.000 description 5
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 239000003082 abrasive agent Substances 0.000 description 3
- 230000003750 conditioning effect Effects 0.000 description 3
- 238000004513 sizing Methods 0.000 description 3
- -1 carboxy vinyl Chemical group 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 239000011734 sodium Substances 0.000 description 2
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 description 1
- 241000517645 Abra Species 0.000 description 1
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 1
- IAYPIBMASNFSPL-UHFFFAOYSA-N Ethylene oxide Chemical compound C1CO1 IAYPIBMASNFSPL-UHFFFAOYSA-N 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical class CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 1
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000000908 ammonium hydroxide Substances 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 239000007900 aqueous suspension Substances 0.000 description 1
- 125000002091 cationic group Chemical group 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000839 emulsion Substances 0.000 description 1
- 238000009472 formulation Methods 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 229910001410 inorganic ion Inorganic materials 0.000 description 1
- 239000006193 liquid solution Substances 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 238000006386 neutralization reaction Methods 0.000 description 1
- 150000007530 organic bases Chemical class 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 235000013772 propylene glycol Nutrition 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000006557 surface reaction Methods 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Colloid Chemistry (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Compositions Of Macromolecular Compounds (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US52222474A | 1974-11-08 | 1974-11-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1074575A true CA1074575A (en) | 1980-04-01 |
Family
ID=24079997
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA237,424A Expired CA1074575A (en) | 1974-11-08 | 1975-10-10 | Abrasive polishing suspensions and method for making same |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS5170589A (enExample) |
| CA (1) | CA1074575A (enExample) |
| CH (1) | CH608827A5 (enExample) |
| FR (1) | FR2290462A1 (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4242842A (en) * | 1979-08-08 | 1981-01-06 | La Pierre Synthetique Baikowski, S.A. | Precision polishing suspension and method for making same |
| JPS5820128U (ja) * | 1981-07-30 | 1983-02-07 | 三菱電機株式会社 | 空気調和機のドレン受皿 |
| JPS5924958A (ja) * | 1982-07-27 | 1984-02-08 | Sumitomo Special Metals Co Ltd | 薄膜磁気ヘッド用基板の製造方法 |
-
1975
- 1975-10-10 CA CA237,424A patent/CA1074575A/en not_active Expired
- 1975-11-07 JP JP50133138A patent/JPS5170589A/ja active Granted
- 1975-11-07 FR FR7534146A patent/FR2290462A1/fr active Granted
- 1975-11-07 CH CH7514436A patent/CH608827A5/xx not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| FR2290462B1 (enExample) | 1981-01-09 |
| CH608827A5 (en) | 1979-01-31 |
| DE2548966B2 (de) | 1977-04-21 |
| DE2548966A1 (de) | 1976-05-13 |
| JPS5337154B2 (enExample) | 1978-10-06 |
| FR2290462A1 (fr) | 1976-06-04 |
| JPS5170589A (en) | 1976-06-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| RU2386587C2 (ru) | Дисперсия оксида алюминия | |
| TW200413455A (en) | Colloidal silica composition | |
| CA2453293C (en) | Suspensions of particles in non-aqueous solvents | |
| JP3152876B2 (ja) | 無機質および／または充填剤および／または顔料の高濃度水性懸濁液 | |
| EP0773270B1 (en) | Polishing slurries and a process for the production thereof | |
| US6905632B2 (en) | Dispersion for chemical mechanical polishing | |
| US4242842A (en) | Precision polishing suspension and method for making same | |
| US4260396A (en) | Compositions for polishing silicon and germanium | |
| CA2469335A1 (en) | Stable dispersions of nanoparticles in aqueous media | |
| US3817727A (en) | Abrasive polishing suspensions and method for making same | |
| US9803108B1 (en) | Aqueous compositions of stabilized aminosilane group containing silica particles | |
| SE520428C2 (sv) | Vattenhaltig suspension av en cellulosaeter, förfarande för dess framställning och en torrblandning | |
| US4187192A (en) | Talc dispersions | |
| JP3933748B2 (ja) | ワイヤソー用水溶性切削液 | |
| CA1074575A (en) | Abrasive polishing suspensions and method for making same | |
| US7951848B2 (en) | Aqueous dispersions of partially hydrophobic silicas | |
| US5123958A (en) | Polishing composition and method | |
| SE503765C2 (sv) | Sätt att framställa en suspension i vatten av en cellulosaeter samt torrblandning lämplig att användas vid suspensionens framställning | |
| EP3239102B1 (en) | Waterborne aerogel and method for producing same | |
| JP3869520B2 (ja) | ワイヤソー用水溶性切削液 | |
| SE510135C2 (sv) | Vattenhaltig suspension av en cellulosaeter, sätt för dess framställning samt komposition | |
| JPH10237479A (ja) | ワイヤソー用水溶性切削液 | |
| JPS61117143A (ja) | セメント混和用スラリ−状シリカヒユ−ム | |
| KR20180036588A (ko) | 양성 및 음성 실리카 입자를 포함하는 cmp 연마용 조성물 | |
| EP0194116B1 (en) | Stable dispersions of inorganic particles |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MKEX | Expiry |