CA1072512A - Integrally focused low ozone illuminator - Google Patents
Integrally focused low ozone illuminatorInfo
- Publication number
- CA1072512A CA1072512A CA259,416A CA259416A CA1072512A CA 1072512 A CA1072512 A CA 1072512A CA 259416 A CA259416 A CA 259416A CA 1072512 A CA1072512 A CA 1072512A
- Authority
- CA
- Canada
- Prior art keywords
- barrel
- ozone
- ultraviolet radiation
- illuminator
- window
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 title claims abstract description 29
- 230000005855 radiation Effects 0.000 claims abstract description 20
- 229910052594 sapphire Inorganic materials 0.000 claims abstract description 12
- 239000010980 sapphire Substances 0.000 claims abstract description 12
- 238000010521 absorption reaction Methods 0.000 claims abstract description 5
- 230000003287 optical effect Effects 0.000 claims description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract description 4
- 239000001301 oxygen Substances 0.000 abstract description 4
- 229910052760 oxygen Inorganic materials 0.000 abstract description 4
- 229910052724 xenon Inorganic materials 0.000 abstract description 3
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 abstract description 3
- 231100000331 toxic Toxicity 0.000 abstract 2
- 230000002588 toxic effect Effects 0.000 abstract 2
- 239000002184 metal Substances 0.000 description 8
- 239000003570 air Substances 0.000 description 4
- 238000001816 cooling Methods 0.000 description 3
- 239000012080 ambient air Substances 0.000 description 2
- 229920001971 elastomer Polymers 0.000 description 2
- 241000239290 Araneae Species 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 108010057108 condensin complexes Proteins 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 239000005437 stratosphere Substances 0.000 description 1
- 239000002341 toxic gas Substances 0.000 description 1
- 238000000870 ultraviolet spectroscopy Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/10—Arrangements of light sources specially adapted for spectrometry or colorimetry
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Non-Portable Lighting Devices Or Systems Thereof (AREA)
- Optical Elements Other Than Lenses (AREA)
- Arrangement Of Elements, Cooling, Sealing, Or The Like Of Lighting Devices (AREA)
- Central Air Conditioning (AREA)
- Radiation-Therapy Devices (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US05/687,861 US4054812A (en) | 1976-05-19 | 1976-05-19 | Integrally focused low ozone illuminator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1072512A true CA1072512A (en) | 1980-02-26 |
Family
ID=24762178
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA259,416A Expired CA1072512A (en) | 1976-05-19 | 1976-08-19 | Integrally focused low ozone illuminator |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US4054812A (enExample) |
| JP (1) | JPS52141081A (enExample) |
| CA (1) | CA1072512A (enExample) |
| DE (1) | DE2720471A1 (enExample) |
| FR (1) | FR2352395A1 (enExample) |
| IL (1) | IL51755A0 (enExample) |
| IT (1) | IT1076042B (enExample) |
| NL (1) | NL7705157A (enExample) |
| NO (1) | NO771666L (enExample) |
| SE (1) | SE7705689L (enExample) |
Families Citing this family (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4049987A (en) * | 1976-06-04 | 1977-09-20 | The Perkin-Elmer Corporation | Ozone absorbance controller |
| JPS5867232A (ja) * | 1981-10-16 | 1983-04-21 | オリンパス光学工業株式会社 | 光源装置 |
| US4877991A (en) * | 1987-12-21 | 1989-10-31 | Colterjohn Jr Walter L | Optical radiation source |
| JPH0458202A (ja) * | 1990-06-28 | 1992-02-25 | Toshiba Corp | 低圧水銀ランプ用ガスフィルター |
| US5262902A (en) * | 1990-06-28 | 1993-11-16 | Ebara Corporation | Filter for a low-pressure mercury vapor lamp |
| US7304737B1 (en) | 1995-09-20 | 2007-12-04 | J.A. Woollam Co., Inc | Rotating or rotatable compensator system providing aberation corrected electromagnetic raadiation to a spot on a sample at multiple angles of a incidence |
| US7158231B1 (en) | 1995-09-20 | 2007-01-02 | J.A. Woollam Co., Inc. | Spectroscopic ellipsometer and polarimeter systems |
| US7633625B1 (en) | 1995-09-20 | 2009-12-15 | J.A. Woollam Co., Inc. | Spectroscopic ellipsometer and polarimeter systems |
| US7616319B1 (en) | 1995-09-20 | 2009-11-10 | James D. Welch | Spectroscopic ellipsometer and polarimeter systems |
| US7245376B2 (en) * | 1995-09-20 | 2007-07-17 | J. A. Woollam Co., Inc. | Combined spatial filter and relay systems in rotating compensator ellipsometer/polarimeter |
| US7336361B1 (en) | 1995-09-20 | 2008-02-26 | J.A. Woollam Co., Inc. | Spectroscopic ellipsometer and polarimeter systems |
| US5751007A (en) * | 1996-09-05 | 1998-05-12 | Weaver; William C. | Method and apparatus for generating a predetermined amount of ozone using ultraviolet light |
| JP4185214B2 (ja) * | 1999-04-28 | 2008-11-26 | 浜松ホトニクス株式会社 | ポータブル型光源装置 |
| JP4183840B2 (ja) * | 1999-04-28 | 2008-11-19 | 浜松ホトニクス株式会社 | ポータブル型光源装置 |
| KR100451974B1 (ko) * | 2001-05-24 | 2004-10-08 | 김기정 | 휴대용 광원장치 |
| US7176633B1 (en) * | 2003-12-09 | 2007-02-13 | Vaconics Lighting, Inc. | Arc lamp with an internally mounted filter |
| EP2534672B1 (en) | 2010-02-09 | 2016-06-01 | Energetiq Technology Inc. | Laser-driven light source |
| US8602611B2 (en) | 2010-03-31 | 2013-12-10 | Cree, Inc. | Decorative and functional light-emitting device lighting fixtures |
| US8820971B2 (en) * | 2010-03-31 | 2014-09-02 | Cree, Inc. | Decorative and functional light-emitting device lighting fixtures |
| NL2013513A (en) | 2013-10-17 | 2015-04-20 | Asml Netherlands Bv | Photon source, metrology apparatus, lithographic system and device manufacturing method. |
| US11587781B2 (en) | 2021-05-24 | 2023-02-21 | Hamamatsu Photonics K.K. | Laser-driven light source with electrodeless ignition |
| US12165856B2 (en) | 2022-02-21 | 2024-12-10 | Hamamatsu Photonics K.K. | Inductively coupled plasma light source |
| US12144072B2 (en) | 2022-03-29 | 2024-11-12 | Hamamatsu Photonics K.K. | All-optical laser-driven light source with electrodeless ignition |
| US12156322B2 (en) | 2022-12-08 | 2024-11-26 | Hamamatsu Photonics K.K. | Inductively coupled plasma light source with switched power supply |
| US12578076B2 (en) | 2023-06-05 | 2026-03-17 | Hamamatsu Photonics K.K. | Dual-output laser-driven light source |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3418507A (en) * | 1966-01-20 | 1968-12-24 | Larry L. Young | Gaseous, arc-radiation source with electrodes, radiation window, and specular focus aligned on the same axis |
| US3644768A (en) * | 1970-07-13 | 1972-02-22 | Varian Associates | Housing for a sealed beam arc lamp |
| US3760182A (en) * | 1972-02-29 | 1973-09-18 | C Poole | Semi conductor heat-fault detector |
| US3798441A (en) * | 1972-10-16 | 1974-03-19 | Illumination Ind Inc | Illuminator for exposing color television tubes during the manufacturing process thereof and the like |
| US3949258A (en) * | 1974-12-05 | 1976-04-06 | Baxter Laboratories, Inc. | Method and means for suppressing ozone generated by arc lamps |
-
1976
- 1976-05-19 US US05/687,861 patent/US4054812A/en not_active Expired - Lifetime
- 1976-08-19 CA CA259,416A patent/CA1072512A/en not_active Expired
-
1977
- 1977-03-28 IL IL51755A patent/IL51755A0/xx unknown
- 1977-04-19 FR FR7711761A patent/FR2352395A1/fr active Granted
- 1977-04-29 IT IT23027/77A patent/IT1076042B/it active
- 1977-05-06 DE DE19772720471 patent/DE2720471A1/de not_active Ceased
- 1977-05-10 NL NL7705157A patent/NL7705157A/xx not_active Application Discontinuation
- 1977-05-10 JP JP5417477A patent/JPS52141081A/ja active Pending
- 1977-05-12 NO NO771666A patent/NO771666L/no unknown
- 1977-05-16 SE SE7705689A patent/SE7705689L/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| SE7705689L (sv) | 1977-11-20 |
| IL51755A0 (en) | 1977-05-31 |
| US4054812A (en) | 1977-10-18 |
| NO771666L (no) | 1977-11-22 |
| FR2352395B1 (enExample) | 1982-02-19 |
| NL7705157A (nl) | 1977-11-22 |
| IT1076042B (it) | 1985-04-22 |
| FR2352395A1 (fr) | 1977-12-16 |
| JPS52141081A (en) | 1977-11-25 |
| DE2720471A1 (de) | 1977-12-08 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MKEX | Expiry |