CA1066425A - Continuous ionization injector for low pressure gas discharge device - Google Patents
Continuous ionization injector for low pressure gas discharge deviceInfo
- Publication number
- CA1066425A CA1066425A CA243,796A CA243796A CA1066425A CA 1066425 A CA1066425 A CA 1066425A CA 243796 A CA243796 A CA 243796A CA 1066425 A CA1066425 A CA 1066425A
- Authority
- CA
- Canada
- Prior art keywords
- discharge
- cathode
- anode
- space
- discharge chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 150000002500 ions Chemical class 0.000 claims description 8
- 238000004544 sputter deposition Methods 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 4
- 239000012212 insulator Substances 0.000 claims description 3
- 238000000151 deposition Methods 0.000 claims 1
- 230000008021 deposition Effects 0.000 claims 1
- 230000000977 initiatory effect Effects 0.000 abstract description 5
- 239000007789 gas Substances 0.000 description 30
- 230000015556 catabolic process Effects 0.000 description 5
- 239000002245 particle Substances 0.000 description 5
- 239000001307 helium Substances 0.000 description 4
- 229910052734 helium Inorganic materials 0.000 description 4
- 230000005684 electric field Effects 0.000 description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- 238000005086 pumping Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- YZCKVEUIGOORGS-OUBTZVSYSA-N Deuterium Chemical compound [2H] YZCKVEUIGOORGS-OUBTZVSYSA-N 0.000 description 1
- 108010083687 Ion Pumps Proteins 0.000 description 1
- 208000036366 Sensation of pressure Diseases 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000000872 buffer Substances 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- JJWKPURADFRFRB-UHFFFAOYSA-N carbonyl sulfide Chemical compound O=C=S JJWKPURADFRFRB-UHFFFAOYSA-N 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 229910052805 deuterium Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010893 electron trap Methods 0.000 description 1
- 238000005421 electrostatic potential Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 150000002371 helium Chemical class 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000002285 radioactive effect Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 230000002459 sustained effect Effects 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910001868 water Inorganic materials 0.000 description 1
- NWONKYPBYAMBJT-UHFFFAOYSA-L zinc sulfate Chemical compound [Zn+2].[O-]S([O-])(=O)=O NWONKYPBYAMBJT-UHFFFAOYSA-L 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J17/00—Gas-filled discharge tubes with solid cathode
- H01J17/02—Details
- H01J17/30—Igniting arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J17/00—Gas-filled discharge tubes with solid cathode
- H01J17/02—Details
- H01J17/14—Magnetic means for controlling the discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
- H01J3/02—Electron guns
- H01J3/025—Electron guns using a discharge in a gas or a vapour as electron source
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2893/00—Discharge tubes and lamps
- H01J2893/0061—Tubes with discharge used as electron source
Landscapes
- Gas-Filled Discharge Tubes (AREA)
- Switches That Are Operated By Magnetic Or Electric Fields (AREA)
- Spark Plugs (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Electron Tubes For Measurement (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US05/567,975 US3949260A (en) | 1975-04-14 | 1975-04-14 | Continuous ionization injector for low pressure gas discharge device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1066425A true CA1066425A (en) | 1979-11-13 |
Family
ID=24269397
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA243,796A Expired CA1066425A (en) | 1975-04-14 | 1976-01-19 | Continuous ionization injector for low pressure gas discharge device |
Country Status (11)
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4291255A (en) * | 1979-08-17 | 1981-09-22 | Igor Alexeff | Plasma switch |
| US4507589A (en) * | 1982-08-31 | 1985-03-26 | The United States Of America As Represented By The United States Department Of Energy | Low pressure spark gap triggered by an ion diode |
| US4707637A (en) * | 1986-03-24 | 1987-11-17 | Hughes Aircraft Company | Plasma-anode electron gun |
| EP0259045A3 (en) * | 1986-08-30 | 1989-10-25 | English Electric Valve Company Limited | Gas discharge devices |
| DE3642670A1 (de) * | 1986-12-13 | 1988-06-23 | Leybold Ag | Penning-ionisationsvakuummeter |
| GB2200243B (en) * | 1987-01-27 | 1990-09-05 | English Electric Valve Co Ltd | Protection device |
| US20040062659A1 (en) * | 2002-07-12 | 2004-04-01 | Sinha Mahadeva P. | Ion pump with combined housing and cathode |
| US9330876B2 (en) | 2013-11-06 | 2016-05-03 | General Electric Company | Systems and methods for regulating pressure of a filled-in gas |
| US9557009B2 (en) | 2013-11-06 | 2017-01-31 | General Electric Company | Gas reservoir and a method to supply gas to plasma tubes |
| DE102015104433B3 (de) * | 2015-03-24 | 2016-09-29 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zum Betreiben einer Kaltkathoden-Elektronenstrahlquelle |
| US10337940B2 (en) * | 2016-05-02 | 2019-07-02 | Mks Instruments, Inc. | Cold cathode ionization vacuum gauge with multiple cathodes |
| US10460917B2 (en) * | 2016-05-26 | 2019-10-29 | AOSense, Inc. | Miniature ion pump |
| US10962483B2 (en) * | 2017-10-03 | 2021-03-30 | Innotech Alberta Inc. | Reduction of molecular background emission and sample matrix management in a solution cathode glow discharge |
| GB2627459A (en) * | 2023-02-22 | 2024-08-28 | Edwards Vacuum Llc | Sputter Ion pump module and vacuum pump |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3714510A (en) * | 1971-03-09 | 1973-01-30 | Hughes Aircraft Co | Method and apparatus for ignition of crossed field switching device for use in a hvdc circuit breaker |
| US3890520A (en) * | 1974-09-23 | 1975-06-17 | Hughes Aircraft Co | Continuous electron injector for crossed-field switch tubes |
-
1975
- 1975-04-14 US US05/567,975 patent/US3949260A/en not_active Expired - Lifetime
-
1976
- 1976-01-19 CA CA243,796A patent/CA1066425A/en not_active Expired
- 1976-01-20 GB GB214976A patent/GB1476293A/en not_active Expired
- 1976-01-21 CH CH72176A patent/CH600560A5/xx not_active IP Right Cessation
- 1976-01-21 DE DE2602078A patent/DE2602078C3/de not_active Expired
- 1976-01-27 NL NL7600838A patent/NL7600838A/xx not_active Application Discontinuation
- 1976-01-28 AU AU10613/76A patent/AU477325B2/en not_active Expired
- 1976-01-30 SE SE7601006A patent/SE7601006L/xx unknown
- 1976-01-30 FR FR7602686A patent/FR2308191A1/fr active Granted
- 1976-01-30 IT IT47868/76A patent/IT1053575B/it active
- 1976-01-30 JP JP51008564A patent/JPS51121697A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| SE7601006L (sv) | 1976-10-15 |
| DE2602078B2 (de) | 1977-09-29 |
| IT1053575B (it) | 1981-10-10 |
| GB1476293A (en) | 1977-06-10 |
| NL7600838A (nl) | 1976-10-18 |
| US3949260A (en) | 1976-04-06 |
| AU1061376A (en) | 1976-10-21 |
| FR2308191A1 (fr) | 1976-11-12 |
| JPS51121697A (en) | 1976-10-25 |
| CH600560A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1978-06-15 |
| AU477325B2 (en) | 1976-10-21 |
| DE2602078C3 (de) | 1978-05-18 |
| JPS5423098B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1979-08-11 |
| FR2308191B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1979-07-20 |
| DE2602078A1 (de) | 1976-10-28 |
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