CA1049652A - Charge-coupled area array - Google Patents
Charge-coupled area arrayInfo
- Publication number
- CA1049652A CA1049652A CA205,678A CA205678A CA1049652A CA 1049652 A CA1049652 A CA 1049652A CA 205678 A CA205678 A CA 205678A CA 1049652 A CA1049652 A CA 1049652A
- Authority
- CA
- Canada
- Prior art keywords
- light
- ccd elements
- shift register
- region
- sensitive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims abstract description 45
- 230000004888 barrier function Effects 0.000 claims abstract description 33
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims abstract description 28
- 229910052581 Si3N4 Inorganic materials 0.000 claims abstract description 11
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims abstract description 11
- 238000003384 imaging method Methods 0.000 claims description 42
- 239000000758 substrate Substances 0.000 claims description 39
- 230000000875 corresponding effect Effects 0.000 claims description 28
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 7
- 238000005036 potential barrier Methods 0.000 claims description 6
- 238000003860 storage Methods 0.000 claims description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 5
- 235000012239 silicon dioxide Nutrition 0.000 claims description 4
- 239000000377 silicon dioxide Substances 0.000 claims description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- 229910052681 coesite Inorganic materials 0.000 claims 2
- 229910052906 cristobalite Inorganic materials 0.000 claims 2
- 229910052682 stishovite Inorganic materials 0.000 claims 2
- 229910052905 tridymite Inorganic materials 0.000 claims 2
- 239000010410 layer Substances 0.000 description 43
- 238000000034 method Methods 0.000 description 14
- 230000006870 function Effects 0.000 description 10
- 239000012535 impurity Substances 0.000 description 6
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 5
- 238000005468 ion implantation Methods 0.000 description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- 238000003491 array Methods 0.000 description 2
- 229910052785 arsenic Inorganic materials 0.000 description 2
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 229910052729 chemical element Inorganic materials 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 244000187656 Eucalyptus cornuta Species 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- -1 by vapor deposition Chemical compound 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 239000002674 ointment Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/10—Integrated devices
- H10F39/12—Image sensors
- H10F39/15—Charge-coupled device [CCD] image sensors
- H10F39/153—Two-dimensional or three-dimensional array CCD image sensors
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/70—SSIS architectures; Circuits associated therewith
- H04N25/71—Charge-coupled device [CCD] sensors; Charge-transfer registers specially adapted for CCD sensors
Landscapes
- Engineering & Computer Science (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US39111973A | 1973-08-27 | 1973-08-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1049652A true CA1049652A (en) | 1979-02-27 |
Family
ID=23545328
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA205,678A Expired CA1049652A (en) | 1973-08-27 | 1974-07-25 | Charge-coupled area array |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JPS5615592B2 (enrdf_load_stackoverflow) |
| CA (1) | CA1049652A (enrdf_load_stackoverflow) |
| DE (1) | DE2439680A1 (enrdf_load_stackoverflow) |
| FR (1) | FR2242779B1 (enrdf_load_stackoverflow) |
| GB (1) | GB1480761A (enrdf_load_stackoverflow) |
| HK (1) | HK47480A (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5636143Y2 (enrdf_load_stackoverflow) * | 1976-09-27 | 1981-08-25 | ||
| JPS5642118U (enrdf_load_stackoverflow) * | 1979-09-06 | 1981-04-17 | ||
| JPS6024093U (ja) * | 1983-07-26 | 1985-02-19 | 株式会社日立ホームテック | 電磁調理器の加熱コイル |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5443330B2 (enrdf_load_stackoverflow) * | 1971-08-26 | 1979-12-19 |
-
1974
- 1974-07-25 CA CA205,678A patent/CA1049652A/en not_active Expired
- 1974-07-31 GB GB33848/74A patent/GB1480761A/en not_active Expired
- 1974-08-19 DE DE2439680A patent/DE2439680A1/de active Pending
- 1974-08-23 FR FR7428985A patent/FR2242779B1/fr not_active Expired
- 1974-08-27 JP JP9829574A patent/JPS5615592B2/ja not_active Expired
-
1980
- 1980-08-28 HK HK474/80A patent/HK47480A/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| FR2242779B1 (enrdf_load_stackoverflow) | 1978-12-01 |
| DE2439680A1 (de) | 1975-03-06 |
| HK47480A (en) | 1980-09-05 |
| FR2242779A1 (enrdf_load_stackoverflow) | 1975-03-28 |
| GB1480761A (en) | 1977-07-27 |
| JPS5076995A (enrdf_load_stackoverflow) | 1975-06-24 |
| JPS5615592B2 (enrdf_load_stackoverflow) | 1981-04-10 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MKEX | Expiry |
Effective date: 19960227 |