CA1048958A - Fluidic transport intersection - Google Patents
Fluidic transport intersectionInfo
- Publication number
- CA1048958A CA1048958A CA76262578A CA262578A CA1048958A CA 1048958 A CA1048958 A CA 1048958A CA 76262578 A CA76262578 A CA 76262578A CA 262578 A CA262578 A CA 262578A CA 1048958 A CA1048958 A CA 1048958A
- Authority
- CA
- Canada
- Prior art keywords
- fluidic
- vacuum
- section
- wafer
- fluid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000012545 processing Methods 0.000 claims abstract description 10
- 239000012530 fluid Substances 0.000 claims description 14
- 230000003287 optical effect Effects 0.000 claims description 6
- 239000011261 inert gas Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 abstract description 12
- 239000004065 semiconductor Substances 0.000 abstract description 8
- 230000009977 dual effect Effects 0.000 abstract description 7
- 238000000034 method Methods 0.000 abstract 1
- 230000032258 transport Effects 0.000 description 9
- 230000003213 activating effect Effects 0.000 description 3
- 239000000872 buffer Substances 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 241000478345 Afer Species 0.000 description 1
- 101100504379 Mus musculus Gfral gene Proteins 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- -1 for example Substances 0.000 description 1
- 101150085091 lat-2 gene Proteins 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000003340 mental effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000012536 storage buffer Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000011282 treatment Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
- B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
- B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Delivering By Means Of Belts And Rollers (AREA)
- Branching, Merging, And Special Transfer Between Conveyors (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US61865575A | 1975-10-01 | 1975-10-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1048958A true CA1048958A (en) | 1979-02-20 |
Family
ID=24478589
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA76262578A Expired CA1048958A (en) | 1975-10-01 | 1976-10-01 | Fluidic transport intersection |
Country Status (7)
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4186918A (en) * | 1977-12-12 | 1980-02-05 | International Business Machines Corporation | Method and apparatus for locating and aligning flimsy sheets |
| JP2014010862A (ja) * | 2012-06-29 | 2014-01-20 | Fujitsu Ltd | ライブラリ装置 |
-
1976
- 1976-07-28 FR FR7623753A patent/FR2345372A1/fr active Granted
- 1976-08-31 GB GB3604676A patent/GB1555672A/en not_active Expired
- 1976-09-03 IT IT2682176A patent/IT1074075B/it active
- 1976-09-13 JP JP10893176A patent/JPS5244992A/ja active Granted
- 1976-09-25 DE DE19762643277 patent/DE2643277A1/de not_active Withdrawn
- 1976-10-01 CA CA76262578A patent/CA1048958A/en not_active Expired
- 1976-10-01 BR BR7606591A patent/BR7606591A/pt unknown
Also Published As
| Publication number | Publication date |
|---|---|
| DE2643277A1 (de) | 1977-04-14 |
| JPS5430834B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1979-10-03 |
| BR7606591A (pt) | 1977-07-05 |
| FR2345372A1 (fr) | 1977-10-21 |
| GB1555672A (en) | 1979-11-14 |
| JPS5244992A (en) | 1977-04-08 |
| IT1074075B (it) | 1985-04-17 |
| FR2345372B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1980-10-24 |
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