CA1027675A - Combinaison cache-exposition - Google Patents

Combinaison cache-exposition

Info

Publication number
CA1027675A
CA1027675A CA223,588A CA223588A CA1027675A CA 1027675 A CA1027675 A CA 1027675A CA 223588 A CA223588 A CA 223588A CA 1027675 A CA1027675 A CA 1027675A
Authority
CA
Canada
Prior art keywords
mask
exposure scheme
exposure
scheme
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA223,588A
Other languages
English (en)
Inventor
Paul E. Stuckert
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of CA1027675A publication Critical patent/CA1027675A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/302—Controlling tubes by external information, e.g. programme control
    • H01J37/3023—Programme control
    • H01J37/3026—Patterning strategy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/153—Multiple image producing on single receiver

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
CA223,588A 1974-05-30 1975-03-27 Combinaison cache-exposition Expired CA1027675A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US47462774A 1974-05-30 1974-05-30

Publications (1)

Publication Number Publication Date
CA1027675A true CA1027675A (fr) 1978-03-07

Family

ID=23884356

Family Applications (1)

Application Number Title Priority Date Filing Date
CA223,588A Expired CA1027675A (fr) 1974-05-30 1975-03-27 Combinaison cache-exposition

Country Status (6)

Country Link
US (1) US4066458A (fr)
JP (1) JPS5329580B2 (fr)
CA (1) CA1027675A (fr)
DE (1) DE2515911A1 (fr)
FR (1) FR2273306B1 (fr)
GB (1) GB1504411A (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4225632A (en) * 1977-11-11 1980-09-30 Motorola, Inc. Fabrication of capacitive transducers
US4301237A (en) * 1979-07-12 1981-11-17 Western Electric Co., Inc. Method for exposing substrates to X-rays
US4239790A (en) * 1979-09-12 1980-12-16 Rca Corporation Method of defining a photoresist layer
US6593064B1 (en) * 1998-06-19 2003-07-15 Creo Inc. High resolution optical stepper

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3326176A (en) * 1964-10-27 1967-06-20 Nat Res Corp Work-registration device including ionic beam probe
JPS4882769A (fr) * 1972-02-07 1973-11-05
GB1435596A (en) * 1972-08-21 1976-05-12 Tokyo Shibaura Electric Co Method and apparatus for making colour cathode-ray tubes

Also Published As

Publication number Publication date
FR2273306A1 (fr) 1975-12-26
FR2273306B1 (fr) 1977-04-15
JPS50159676A (fr) 1975-12-24
US4066458A (en) 1978-01-03
GB1504411A (fr) 1978-03-22
JPS5329580B2 (fr) 1978-08-22
DE2515911A1 (de) 1975-12-18

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