JPS5329580B2 - - Google Patents

Info

Publication number
JPS5329580B2
JPS5329580B2 JP5083975A JP5083975A JPS5329580B2 JP S5329580 B2 JPS5329580 B2 JP S5329580B2 JP 5083975 A JP5083975 A JP 5083975A JP 5083975 A JP5083975 A JP 5083975A JP S5329580 B2 JPS5329580 B2 JP S5329580B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5083975A
Other versions
JPS50159676A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS50159676A publication Critical patent/JPS50159676A/ja
Publication of JPS5329580B2 publication Critical patent/JPS5329580B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/302—Controlling tubes by external information, e.g. programme control
    • H01J37/3023—Programme control
    • H01J37/3026—Patterning strategy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/153—Multiple image producing on single receiver

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
JP5083975A 1974-05-30 1975-04-28 Expired JPS5329580B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US47462774A 1974-05-30 1974-05-30

Publications (2)

Publication Number Publication Date
JPS50159676A JPS50159676A (ja) 1975-12-24
JPS5329580B2 true JPS5329580B2 (ja) 1978-08-22

Family

ID=23884356

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5083975A Expired JPS5329580B2 (ja) 1974-05-30 1975-04-28

Country Status (6)

Country Link
US (1) US4066458A (ja)
JP (1) JPS5329580B2 (ja)
CA (1) CA1027675A (ja)
DE (1) DE2515911A1 (ja)
FR (1) FR2273306B1 (ja)
GB (1) GB1504411A (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4225632A (en) * 1977-11-11 1980-09-30 Motorola, Inc. Fabrication of capacitive transducers
US4301237A (en) * 1979-07-12 1981-11-17 Western Electric Co., Inc. Method for exposing substrates to X-rays
US4239790A (en) * 1979-09-12 1980-12-16 Rca Corporation Method of defining a photoresist layer
US6593064B1 (en) * 1998-06-19 2003-07-15 Creo Inc. High resolution optical stepper

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3326176A (en) * 1964-10-27 1967-06-20 Nat Res Corp Work-registration device including ionic beam probe

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4882769A (ja) * 1972-02-07 1973-11-05
GB1435596A (en) * 1972-08-21 1976-05-12 Tokyo Shibaura Electric Co Method and apparatus for making colour cathode-ray tubes

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3326176A (en) * 1964-10-27 1967-06-20 Nat Res Corp Work-registration device including ionic beam probe

Also Published As

Publication number Publication date
CA1027675A (en) 1978-03-07
US4066458A (en) 1978-01-03
FR2273306A1 (ja) 1975-12-26
JPS50159676A (ja) 1975-12-24
FR2273306B1 (ja) 1977-04-15
GB1504411A (ja) 1978-03-22
DE2515911A1 (de) 1975-12-18

Similar Documents

Publication Publication Date Title
FR2289965B1 (ja)
FR2260113B1 (ja)
FR2283972B1 (ja)
FR2258425A1 (ja)
FR2294641B3 (ja)
FR2277381B1 (ja)
FI751718A (ja)
FI751848A (ja)
FR2284618B1 (ja)
FR2262823B1 (ja)
FR2273306B1 (ja)
FR2283191B1 (ja)
FR2282138B3 (ja)
FR2260576B1 (ja)
BG26152A1 (ja)
BG21503A1 (ja)
DD124735A5 (ja)
CH582308A5 (ja)
CH1357474A4 (ja)
CH1107074A4 (ja)
BG20983A1 (ja)
BG23188A1 (ja)
BG22732A1 (ja)
BG22484A1 (ja)
BG22309A1 (ja)