CA1024403A - Paraxylylene-silane dielectric films - Google Patents

Paraxylylene-silane dielectric films

Info

Publication number
CA1024403A
CA1024403A CA202,287A CA202287A CA1024403A CA 1024403 A CA1024403 A CA 1024403A CA 202287 A CA202287 A CA 202287A CA 1024403 A CA1024403 A CA 1024403A
Authority
CA
Canada
Prior art keywords
paraxylylene
dielectric films
silane
silane dielectric
films
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA202,287A
Other languages
English (en)
French (fr)
Other versions
CA202287S (en
Inventor
Edward C. Spaulding
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of CA1024403A publication Critical patent/CA1024403A/en
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/60—Deposition of organic layers from vapour phase
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/025—Deposition multi-step
CA202,287A 1973-06-29 1974-06-12 Paraxylylene-silane dielectric films Expired CA1024403A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US375294A US3900600A (en) 1973-06-29 1973-06-29 Paraxylylene-silane dielectric films

Publications (1)

Publication Number Publication Date
CA1024403A true CA1024403A (en) 1978-01-17

Family

ID=23480289

Family Applications (1)

Application Number Title Priority Date Filing Date
CA202,287A Expired CA1024403A (en) 1973-06-29 1974-06-12 Paraxylylene-silane dielectric films

Country Status (8)

Country Link
US (1) US3900600A (de)
JP (1) JPS5128840B2 (de)
AU (1) AU6959474A (de)
CA (1) CA1024403A (de)
DE (1) DE2431143C2 (de)
FR (1) FR2234934B1 (de)
GB (1) GB1441726A (de)
IT (1) IT1010162B (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4299866A (en) * 1979-07-31 1981-11-10 International Business Machines Corporation Coating process mask
US4271425A (en) * 1979-11-02 1981-06-02 Western Electric Company, Inc. Encapsulated electronic devices and encapsulating compositions having crown ethers
US4278784A (en) * 1980-02-06 1981-07-14 Western Electric Company, Inc. Encapsulated electronic devices and encapsulating compositions
DE3447520A1 (de) * 1984-12-27 1986-08-14 Metallwerk Plansee GmbH, Reutte, Tirol Verbundleiterplatte, verfahren zur herstellung einer verbundleiterplatte und verwendung von aluminiumoxyd als isolierende schicht einer verbundleiterplatte
IT1199795B (it) * 1986-12-17 1988-12-30 Ausimont Spa Processo per il consolidamento di materiali a struttura discontinua
GB2248072B (en) * 1990-09-22 1994-03-09 Gec Ferranti Defence Syst A method of fabricating coaxial cable components and coaxial cable components fabricated thereby
US5618379A (en) * 1991-04-01 1997-04-08 International Business Machines Corporation Selective deposition process
US5096849A (en) * 1991-04-29 1992-03-17 International Business Machines Corporation Process for positioning a mask within a concave semiconductor structure
ES2094074B1 (es) * 1992-08-04 1997-08-01 Carreras Salvador Ribot Maquina para colocar cantoneras en elementos paletizados
EP0651974B1 (de) * 1993-11-10 2000-05-03 Xomed, Inc. Bipolares, elektrochirurgisches Instrument und Herstellungsverfahren
CA2256418A1 (en) * 1996-05-31 1997-12-04 Specialty Coating Systems, Inc. Chambers for promoting surface adhesion under vacuum and methods of using same
US5869135A (en) * 1997-10-03 1999-02-09 Massachusetts Institute Of Technology Selective chemical vapor deposition of polymers
US6086952A (en) * 1998-06-15 2000-07-11 Applied Materials, Inc. Chemical vapor deposition of a copolymer of p-xylylene and a multivinyl silicon/oxygen comonomer
US6709715B1 (en) * 1999-06-17 2004-03-23 Applied Materials Inc. Plasma enhanced chemical vapor deposition of copolymer of parylene N and comonomers with various double bonds
CA2400157A1 (en) * 2000-02-22 2001-08-30 Ram W. Sabnis Organic polymeric antireflective coatings deposited by chemical vapor deposition

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3342754A (en) * 1966-02-18 1967-09-19 Union Carbide Corp Para-xylylene polymers
GB1235413A (en) * 1968-01-26 1971-06-16 Dexter Corp Epoxy resin encapsulant compositions for semiconductors
US3600216A (en) * 1968-09-06 1971-08-17 Union Carbide Corp Process for adhering poly-p-xylylene to substrates using silane primers and articles obtained thereby
US3713886A (en) * 1971-01-15 1973-01-30 Rca Corp Encapsulated magnetic memory element
US3749601A (en) * 1971-04-01 1973-07-31 Hughes Aircraft Co Encapsulated packaged electronic assembly

Also Published As

Publication number Publication date
GB1441726A (en) 1976-07-07
JPS5022300A (de) 1975-03-10
DE2431143A1 (de) 1975-01-16
AU6959474A (en) 1975-12-04
JPS5128840B2 (de) 1976-08-21
FR2234934B1 (de) 1976-06-25
US3900600A (en) 1975-08-19
IT1010162B (it) 1977-01-10
FR2234934A1 (de) 1975-01-24
DE2431143C2 (de) 1982-04-15

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