CA1021469A - Process for producing a semiconductor arrangement having a metal contact layer between two insulating layers - Google Patents

Process for producing a semiconductor arrangement having a metal contact layer between two insulating layers

Info

Publication number
CA1021469A
CA1021469A CA211,481A CA211481A CA1021469A CA 1021469 A CA1021469 A CA 1021469A CA 211481 A CA211481 A CA 211481A CA 1021469 A CA1021469 A CA 1021469A
Authority
CA
Canada
Prior art keywords
producing
contact layer
insulating layers
metal contact
semiconductor arrangement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA211,481A
Other languages
English (en)
Other versions
CA211481S (fr
Inventor
Erich Pammer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Application granted granted Critical
Publication of CA1021469A publication Critical patent/CA1021469A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/40—Encapsulations, e.g. protective coatings characterised by their materials
    • H10W74/47—Encapsulations, e.g. protective coatings characterised by their materials comprising organic materials, e.g. plastics or resins
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/928—Front and rear surface processing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/942—Masking
    • Y10S438/948—Radiation resist
    • Y10S438/951—Lift-off
CA211,481A 1973-10-17 1974-10-16 Process for producing a semiconductor arrangement having a metal contact layer between two insulating layers Expired CA1021469A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19732352138 DE2352138A1 (de) 1973-10-17 1973-10-17 Verfahren zum herstellen einer halbleiteranordnung

Publications (1)

Publication Number Publication Date
CA1021469A true CA1021469A (en) 1977-11-22

Family

ID=5895702

Family Applications (1)

Application Number Title Priority Date Filing Date
CA211,481A Expired CA1021469A (en) 1973-10-17 1974-10-16 Process for producing a semiconductor arrangement having a metal contact layer between two insulating layers

Country Status (7)

Country Link
US (1) US3984588A (it)
JP (1) JPS5080084A (it)
CA (1) CA1021469A (it)
DE (1) DE2352138A1 (it)
FR (1) FR2248614B1 (it)
GB (1) GB1447843A (it)
IT (1) IT1022912B (it)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3837826A1 (de) * 1988-11-08 1990-05-10 Nokia Unterhaltungselektronik Verfahren zum beschichten einer substratplatte fuer eine fluessigkristallzelle
US5772104A (en) * 1996-08-26 1998-06-30 Peerless Of America Incorporated Methods of brazing and preparing articles for brazing, and coating composition for use in such methods

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3020156A (en) * 1957-05-10 1962-02-06 Mycalex Corp Of America Method of coating metal on dielectric material
US3222173A (en) * 1961-05-15 1965-12-07 Vitramon Inc Method of making an electrical unit
US3443944A (en) * 1963-10-23 1969-05-13 United Aircraft Corp Method of depositing conductive patterns on a substrate
US3518751A (en) * 1967-05-25 1970-07-07 Hughes Aircraft Co Electrical connection and/or mounting arrays for integrated circuit chips
US3775117A (en) * 1971-07-13 1973-11-27 Siemens Ag Process for selective metallization of insulating material bodies
GB1384028A (en) * 1972-08-21 1974-02-12 Hughes Aircraft Co Method of making a semiconductor device
US3936531A (en) * 1973-05-01 1976-02-03 Union Carbide Corporation Masking process with thermal destruction of edges of mask

Also Published As

Publication number Publication date
DE2352138A1 (de) 1975-04-30
GB1447843A (en) 1976-09-02
IT1022912B (it) 1978-04-20
JPS5080084A (it) 1975-06-28
FR2248614B1 (it) 1978-11-24
US3984588A (en) 1976-10-05
FR2248614A1 (it) 1975-05-16

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