CA1016560A - Soupape de fuite a faible deperdition et chambre correspondante - Google Patents
Soupape de fuite a faible deperdition et chambre correspondanteInfo
- Publication number
- CA1016560A CA1016560A CA193,045A CA193045A CA1016560A CA 1016560 A CA1016560 A CA 1016560A CA 193045 A CA193045 A CA 193045A CA 1016560 A CA1016560 A CA 1016560A
- Authority
- CA
- Canada
- Prior art keywords
- chamber
- same
- vacuum valve
- low leakage
- leakage vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
- C23C14/566—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases using a load-lock chamber
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/86493—Multi-way valve unit
- Y10T137/86815—Multiple inlet with single outlet
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/86493—Multi-way valve unit
- Y10T137/86863—Rotary valve unit
- Y10T137/86871—Plug
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Particle Accelerators (AREA)
- Taps Or Cocks (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Sliding Valves (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US33445573 US3833018A (en) | 1973-02-21 | 1973-02-21 | Low leakage vacuum valve and chamber using same |
Publications (1)
Publication Number | Publication Date |
---|---|
CA1016560A true CA1016560A (fr) | 1977-08-30 |
Family
ID=23307287
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA193,045A Expired CA1016560A (fr) | 1973-02-21 | 1974-02-20 | Soupape de fuite a faible deperdition et chambre correspondante |
Country Status (6)
Country | Link |
---|---|
US (1) | US3833018A (fr) |
JP (1) | JPS5833658B2 (fr) |
CA (1) | CA1016560A (fr) |
DE (1) | DE2408406C3 (fr) |
FR (1) | FR2224684B1 (fr) |
GB (1) | GB1468462A (fr) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4030622A (en) * | 1975-05-23 | 1977-06-21 | Pass-Port Systems, Inc. | Wafer transport system |
US4498832A (en) * | 1982-05-21 | 1985-02-12 | The Boc Group, Inc. | Workpiece accumulating and transporting apparatus |
US4544317A (en) * | 1984-04-16 | 1985-10-01 | International Business Machines Corporation | Vacuum-to-vacuum entry system apparatus |
US4676884A (en) * | 1986-07-23 | 1987-06-30 | The Boc Group, Inc. | Wafer processing machine with evacuated wafer transporting and storage system |
JPH0218836U (fr) * | 1988-07-26 | 1990-02-07 | ||
IT1242958B (it) * | 1990-06-21 | 1994-05-18 | Dall Argine & Ghiretti S R L | Dispositivo per il passaggio di oggetti tra due ambienti reciprocamente separati con tenuta in particolare per impianti di sterilizzazione o pastorizzazione |
EP0995812A1 (fr) | 1998-10-13 | 2000-04-26 | Vacumetal B.V. | Dispositif de traitement en ligne des articles avec une atmosphère artificielle |
US6595957B1 (en) | 2000-01-31 | 2003-07-22 | Ethicon, Inc. | Surgical fluid management system with a dampening chamber |
US7204821B1 (en) * | 2000-01-31 | 2007-04-17 | Ethicon, Inc. | Surgical fluid management system with suction control |
US6135138A (en) * | 2000-02-01 | 2000-10-24 | Raytheon Company | Rotary coupler for fluid conduits |
US8833383B2 (en) | 2011-07-20 | 2014-09-16 | Ferrotec (Usa) Corporation | Multi-vane throttle valve |
CN109219872A (zh) * | 2016-06-02 | 2019-01-15 | 应用材料公司 | 用于连续牵引处理的闸阀 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE558787C (de) * | 1928-11-22 | 1932-09-12 | Elektrowerke Akt Ges | Steuereinrichtung fuer als Schnellschlussvorrichtung dienende Haehne |
NL54222C (fr) * | 1937-08-24 | |||
US2516908A (en) * | 1945-09-24 | 1950-08-01 | American Can Co | Apparatus for lining can ends |
US2845191A (en) * | 1957-02-05 | 1958-07-29 | Lever Brothers Ltd | Air lock device |
US3260383A (en) * | 1964-08-04 | 1966-07-12 | Vacuum Processes Inc | Method and apparatus for loading and unloading a high vacuum process chamber |
DE1450586B2 (de) * | 1964-08-14 | 1971-12-16 | Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V., 8000 München | Entlueftbarer absperrschieber fuer grosse druckdifferenzen |
US3340176A (en) * | 1965-07-28 | 1967-09-05 | Western Electric Co | Vacuum processing machine |
US3473550A (en) * | 1967-03-29 | 1969-10-21 | Helmerich & Payne | Pig diverter |
US3554114A (en) * | 1968-03-07 | 1971-01-12 | P & S Rice Mills Inc | Apparatus for introducing materials into or removing materials from a hermetically sealed vessel |
GB1284262A (en) * | 1968-09-09 | 1972-08-02 | Unilever Ltd | A device for passing a product between zones of different pressure |
US3652444A (en) * | 1969-10-24 | 1972-03-28 | Ibm | Continuous vacuum process apparatus |
US3692041A (en) * | 1971-01-04 | 1972-09-19 | Gen Electric | Variable flow distributor |
US3674160A (en) * | 1971-04-08 | 1972-07-04 | Heinz Co H J | Apparatus for transferring can lids through a partition subject to a pressure differential |
-
1973
- 1973-02-21 US US33445573 patent/US3833018A/en not_active Expired - Lifetime
-
1974
- 1974-02-20 CA CA193,045A patent/CA1016560A/fr not_active Expired
- 1974-02-20 FR FR7405805A patent/FR2224684B1/fr not_active Expired
- 1974-02-21 GB GB804574A patent/GB1468462A/en not_active Expired
- 1974-02-21 DE DE2408406A patent/DE2408406C3/de not_active Expired
- 1974-02-21 JP JP49020981A patent/JPS5833658B2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
DE2408406C3 (de) | 1981-08-27 |
JPS5041129A (fr) | 1975-04-15 |
DE2408406B2 (de) | 1980-12-11 |
FR2224684B1 (fr) | 1978-01-06 |
JPS5833658B2 (ja) | 1983-07-21 |
US3833018A (en) | 1974-09-03 |
DE2408406A1 (de) | 1974-08-22 |
GB1468462A (en) | 1977-03-30 |
FR2224684A1 (fr) | 1974-10-31 |
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