CA1016560A - Low leakage vacuum valve and chamber using same - Google Patents

Low leakage vacuum valve and chamber using same

Info

Publication number
CA1016560A
CA1016560A CA193,045A CA193045A CA1016560A CA 1016560 A CA1016560 A CA 1016560A CA 193045 A CA193045 A CA 193045A CA 1016560 A CA1016560 A CA 1016560A
Authority
CA
Canada
Prior art keywords
chamber
same
vacuum valve
low leakage
leakage vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA193,045A
Other languages
English (en)
French (fr)
Other versions
CA193045S (en
Inventor
Norman B. Brooks
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Application granted granted Critical
Publication of CA1016560A publication Critical patent/CA1016560A/en
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
    • C23C14/566—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases using a load-lock chamber
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/86493—Multi-way valve unit
    • Y10T137/86815—Multiple inlet with single outlet
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/86493—Multi-way valve unit
    • Y10T137/86863—Rotary valve unit
    • Y10T137/86871—Plug

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Taps Or Cocks (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Particle Accelerators (AREA)
  • Sliding Valves (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
CA193,045A 1973-02-21 1974-02-20 Low leakage vacuum valve and chamber using same Expired CA1016560A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US33445573 US3833018A (en) 1973-02-21 1973-02-21 Low leakage vacuum valve and chamber using same

Publications (1)

Publication Number Publication Date
CA1016560A true CA1016560A (en) 1977-08-30

Family

ID=23307287

Family Applications (1)

Application Number Title Priority Date Filing Date
CA193,045A Expired CA1016560A (en) 1973-02-21 1974-02-20 Low leakage vacuum valve and chamber using same

Country Status (6)

Country Link
US (1) US3833018A (enExample)
JP (1) JPS5833658B2 (enExample)
CA (1) CA1016560A (enExample)
DE (1) DE2408406C3 (enExample)
FR (1) FR2224684B1 (enExample)
GB (1) GB1468462A (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4030622A (en) * 1975-05-23 1977-06-21 Pass-Port Systems, Inc. Wafer transport system
US4498832A (en) * 1982-05-21 1985-02-12 The Boc Group, Inc. Workpiece accumulating and transporting apparatus
US4544317A (en) * 1984-04-16 1985-10-01 International Business Machines Corporation Vacuum-to-vacuum entry system apparatus
US4676884A (en) * 1986-07-23 1987-06-30 The Boc Group, Inc. Wafer processing machine with evacuated wafer transporting and storage system
JPH0218836U (enExample) * 1988-07-26 1990-02-07
IT1242958B (it) * 1990-06-21 1994-05-18 Dall Argine & Ghiretti S R L Dispositivo per il passaggio di oggetti tra due ambienti reciprocamente separati con tenuta in particolare per impianti di sterilizzazione o pastorizzazione
EP0995812A1 (en) * 1998-10-13 2000-04-26 Vacumetal B.V. Apparatus for flow-line treatment of articles in an artificial medium
US7204821B1 (en) * 2000-01-31 2007-04-17 Ethicon, Inc. Surgical fluid management system with suction control
US6595957B1 (en) 2000-01-31 2003-07-22 Ethicon, Inc. Surgical fluid management system with a dampening chamber
US6135138A (en) * 2000-02-01 2000-10-24 Raytheon Company Rotary coupler for fluid conduits
US8833383B2 (en) 2011-07-20 2014-09-16 Ferrotec (Usa) Corporation Multi-vane throttle valve
TWI739846B (zh) * 2016-06-02 2021-09-21 美商應用材料股份有限公司 用於連續牽引處理的閘閥

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE558787C (de) * 1928-11-22 1932-09-12 Elektrowerke Akt Ges Steuereinrichtung fuer als Schnellschlussvorrichtung dienende Haehne
BE429854A (enExample) * 1937-08-24
US2516908A (en) * 1945-09-24 1950-08-01 American Can Co Apparatus for lining can ends
US2845191A (en) * 1957-02-05 1958-07-29 Lever Brothers Ltd Air lock device
US3260383A (en) * 1964-08-04 1966-07-12 Vacuum Processes Inc Method and apparatus for loading and unloading a high vacuum process chamber
DE1450586B2 (de) * 1964-08-14 1971-12-16 Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V., 8000 München Entlueftbarer absperrschieber fuer grosse druckdifferenzen
US3340176A (en) * 1965-07-28 1967-09-05 Western Electric Co Vacuum processing machine
US3473550A (en) * 1967-03-29 1969-10-21 Helmerich & Payne Pig diverter
US3554114A (en) * 1968-03-07 1971-01-12 P & S Rice Mills Inc Apparatus for introducing materials into or removing materials from a hermetically sealed vessel
GB1284262A (en) * 1968-09-09 1972-08-02 Unilever Ltd A device for passing a product between zones of different pressure
US3652444A (en) * 1969-10-24 1972-03-28 Ibm Continuous vacuum process apparatus
US3692041A (en) * 1971-01-04 1972-09-19 Gen Electric Variable flow distributor
US3674160A (en) * 1971-04-08 1972-07-04 Heinz Co H J Apparatus for transferring can lids through a partition subject to a pressure differential

Also Published As

Publication number Publication date
GB1468462A (en) 1977-03-30
FR2224684A1 (enExample) 1974-10-31
DE2408406B2 (de) 1980-12-11
DE2408406C3 (de) 1981-08-27
JPS5041129A (enExample) 1975-04-15
US3833018A (en) 1974-09-03
FR2224684B1 (enExample) 1978-01-06
JPS5833658B2 (ja) 1983-07-21
DE2408406A1 (de) 1974-08-22

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