BR9302933A - Arquitetura de linha de fabricacao,totalmente automatizada e computadorizada baseada em transportadoras dotada de aparelho de interface pressurizado para transferir uma peca de trabalho a ser processada;recipientes pressurizados vedaveis e transportaveis e aparelho de expedicao com sistema de distribuicao de gas para manusear e armazenar os mesmos - Google Patents

Arquitetura de linha de fabricacao,totalmente automatizada e computadorizada baseada em transportadoras dotada de aparelho de interface pressurizado para transferir uma peca de trabalho a ser processada;recipientes pressurizados vedaveis e transportaveis e aparelho de expedicao com sistema de distribuicao de gas para manusear e armazenar os mesmos

Info

Publication number
BR9302933A
BR9302933A BR9302933A BR9302933A BR9302933A BR 9302933 A BR9302933 A BR 9302933A BR 9302933 A BR9302933 A BR 9302933A BR 9302933 A BR9302933 A BR 9302933A BR 9302933 A BR9302933 A BR 9302933A
Authority
BR
Brazil
Prior art keywords
carriers
processed
transfer
piece
work
Prior art date
Application number
BR9302933A
Other languages
English (en)
Portuguese (pt)
Inventor
Georges Garric
Andre Lafond
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from EP92480109A external-priority patent/EP0582016B1/en
Priority claimed from EP92480110A external-priority patent/EP0582017B1/en
Priority claimed from EP92480112A external-priority patent/EP0582019B1/en
Priority claimed from EP92480111A external-priority patent/EP0582018B1/en
Application filed by Ibm filed Critical Ibm
Publication of BR9302933A publication Critical patent/BR9302933A/pt

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)
BR9302933A 1992-08-04 1993-07-21 Arquitetura de linha de fabricacao,totalmente automatizada e computadorizada baseada em transportadoras dotada de aparelho de interface pressurizado para transferir uma peca de trabalho a ser processada;recipientes pressurizados vedaveis e transportaveis e aparelho de expedicao com sistema de distribuicao de gas para manusear e armazenar os mesmos BR9302933A (pt)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
EP92480109A EP0582016B1 (en) 1992-08-04 1992-08-04 Pressurized sealable transportable containers for storing a semiconductor wafer in a protective gaseous environment
EP92480110A EP0582017B1 (en) 1992-08-04 1992-08-04 Dispatching apparatus with a gas supply distribution system for handling and storing pressurized sealable transportable containers
EP92480112A EP0582019B1 (en) 1992-08-04 1992-08-04 Fully automated and computerized conveyor based manufacturing line architectures adapted to pressurized sealable transportable containers
EP92480111A EP0582018B1 (en) 1992-08-04 1992-08-04 Pressurized interface apparatus for transferring a semiconductor wafer between a pressurized sealable transportable container and a processing equipment

Publications (1)

Publication Number Publication Date
BR9302933A true BR9302933A (pt) 1994-03-15

Family

ID=27442478

Family Applications (1)

Application Number Title Priority Date Filing Date
BR9302933A BR9302933A (pt) 1992-08-04 1993-07-21 Arquitetura de linha de fabricacao,totalmente automatizada e computadorizada baseada em transportadoras dotada de aparelho de interface pressurizado para transferir uma peca de trabalho a ser processada;recipientes pressurizados vedaveis e transportaveis e aparelho de expedicao com sistema de distribuicao de gas para manusear e armazenar os mesmos

Country Status (3)

Country Link
KR (1) KR970006725B1 (ko)
BR (1) BR9302933A (ko)
TW (1) TW224182B (ko)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101050632B1 (ko) * 2002-08-31 2011-07-19 어플라이드 머티어리얼스, 인코포레이티드 도어 래칭 및 기판 클램핑 매커니즘들을 갖는 기판 캐리어
KR101688620B1 (ko) 2015-12-24 2016-12-21 피코앤테라(주) 웨이퍼 수납용기
JP6693356B2 (ja) * 2016-09-09 2020-05-13 株式会社ダイフク 物品搬送装置
CN108107672B (zh) 2016-11-25 2021-03-02 上海微电子装备（集团）股份有限公司 一种掩模版版盒
TWI781800B (zh) * 2021-10-22 2022-10-21 銓發科技股份有限公司 束帶儲存裝置及其儲存盤

Also Published As

Publication number Publication date
KR940005476A (ko) 1994-03-21
KR970006725B1 (ko) 1997-04-29
TW224182B (ko) 1994-05-21

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Legal Events

Date Code Title Description
EE Request for examination
FB36 Technical and formal requirements: requirement - article 36 of industrial property law
FA8 Dismissal: dismissal - article 36, par. 1 of industrial property law