BR112017020245A2 - ?processo para produção de um laminado, laminado, película de barreira, uso da película de barreira, e, dispositivo eletrônico?. - Google Patents
?processo para produção de um laminado, laminado, película de barreira, uso da película de barreira, e, dispositivo eletrônico?.Info
- Publication number
- BR112017020245A2 BR112017020245A2 BR112017020245-0A BR112017020245A BR112017020245A2 BR 112017020245 A2 BR112017020245 A2 BR 112017020245A2 BR 112017020245 A BR112017020245 A BR 112017020245A BR 112017020245 A2 BR112017020245 A2 BR 112017020245A2
- Authority
- BR
- Brazil
- Prior art keywords
- laminate
- barrier film
- producing
- electronic device
- cycles
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45527—Atomic layer deposition [ALD] characterized by the ALD cycle, e.g. different flows or temperatures during half-reactions, unusual pulsing sequence, use of precursor mixtures or auxiliary reactants or activations
- C23C16/45529—Atomic layer deposition [ALD] characterized by the ALD cycle, e.g. different flows or temperatures during half-reactions, unusual pulsing sequence, use of precursor mixtures or auxiliary reactants or activations specially adapted for making a layer stack of alternating different compositions or gradient compositions
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45555—Atomic layer deposition [ALD] applied in non-semiconductor technology
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/30—Organic light-emitting transistors
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Laminated Bodies (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Physical Vapour Deposition (AREA)
- Electroluminescent Light Sources (AREA)
- Chemical Vapour Deposition (AREA)
- Formation Of Insulating Films (AREA)
- Thin Film Transistor (AREA)
Abstract
a presente invenção está no campo dos processos para a produção de laminados orgânicos-inorgânicos flexíveis. em particular, a presente invenção se refere a um processo para produção de um laminado compreendendo pelo menos duas vezes uma sequência compreendendo (a) deposição de uma camada inorgânica realizando-se de 3 a 150 ciclos de um processo de deposição por camada atômica, e (b) deposição de uma camada orgânica compreendendo nitrogênio realizando-se de 1 a 3 ciclos de um processo de deposição por camada molecular.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP15160789.2 | 2015-03-25 | ||
EP15160789 | 2015-03-25 | ||
PCT/EP2016/055534 WO2016150759A1 (en) | 2015-03-25 | 2016-03-15 | Process for producing flexible organic-inorganic laminates |
Publications (1)
Publication Number | Publication Date |
---|---|
BR112017020245A2 true BR112017020245A2 (pt) | 2018-06-05 |
Family
ID=52779530
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
BR112017020245-0A BR112017020245A2 (pt) | 2015-03-25 | 2016-03-15 | ?processo para produção de um laminado, laminado, película de barreira, uso da película de barreira, e, dispositivo eletrônico?. |
Country Status (12)
Country | Link |
---|---|
US (1) | US11286561B2 (pt) |
EP (1) | EP3274487A1 (pt) |
JP (1) | JP6986447B2 (pt) |
KR (1) | KR102596710B1 (pt) |
CN (1) | CN107429390A (pt) |
BR (1) | BR112017020245A2 (pt) |
CA (1) | CA2978031A1 (pt) |
MX (1) | MX2017012134A (pt) |
RU (1) | RU2721247C2 (pt) |
SG (1) | SG11201707265QA (pt) |
TW (1) | TWI782892B (pt) |
WO (1) | WO2016150759A1 (pt) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
MX2017009473A (es) | 2015-01-20 | 2017-11-02 | Basf Coatings Gmbh | Proceso para la produccion de laminados flexibles organicos-inorganicos. |
EP3818192B1 (en) * | 2018-07-05 | 2024-05-15 | BASF Coatings GmbH | Transparent conductive film |
WO2023018308A1 (ko) * | 2021-08-12 | 2023-02-16 | 한양대학교 산학협력단 | 분자선 구조를 갖는 다층 분자막 포토레지스트 및 이의 제조방법 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE69129055T2 (de) * | 1990-10-03 | 1998-08-06 | Dow Chemical Co | Hydroxy-funktionalisierte Polyetheramine zur Verwendung als Sperrschicht bei sauerstoffempfindlichen Materialien |
US6690044B1 (en) * | 1993-03-19 | 2004-02-10 | Micron Technology, Inc. | Approach to avoid buckling BPSG by using an intermediate barrier layer |
DE4438359C2 (de) * | 1994-10-27 | 2001-10-04 | Schott Glas | Behälter aus Kunststoff mit einer Sperrbeschichtung |
US6926572B2 (en) * | 2002-01-25 | 2005-08-09 | Electronics And Telecommunications Research Institute | Flat panel display device and method of forming passivation film in the flat panel display device |
JP2007090803A (ja) * | 2005-09-30 | 2007-04-12 | Fujifilm Corp | ガスバリアフィルム、並びに、これを用いた画像表示素子および有機エレクトロルミネッセンス素子 |
EP2097179B1 (en) | 2006-11-13 | 2020-01-29 | The Regents of the University of Colorado, a body corporate | Molecular layer deposition process for making organic or organic-inorganic polymers |
EP2171534B1 (en) * | 2007-06-22 | 2015-12-02 | The Regents of the University of Colorado | Protective coatings for organic electronic devices made using atomic layer deposition and molecular layer deposition techniques |
US20090169904A1 (en) * | 2007-12-27 | 2009-07-02 | Makoto Yamada | Barrier laminate, gas-barrier film, device and optical component |
JP2009224190A (ja) * | 2008-03-17 | 2009-10-01 | Fujifilm Corp | バリア性積層体とその製造方法、デバイスおよび光学部材 |
US20110171439A1 (en) * | 2008-07-08 | 2011-07-14 | Shahab Jahromi | Laminate and composite layer comprising a substrate and a coating, and a process and apparatus for preparation thereof |
EP2360293A1 (en) | 2010-02-11 | 2011-08-24 | Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO | Method and apparatus for depositing atomic layers on a substrate |
JP5772966B2 (ja) * | 2011-09-26 | 2015-09-02 | 日本軽金属株式会社 | アルミ樹脂接合体及びその製造方法 |
MX2014004592A (es) * | 2011-10-24 | 2014-11-26 | Tera Barrier Films Pte Ltd | Barrera de encapsulacion apilada. |
KR20140045716A (ko) | 2012-10-09 | 2014-04-17 | 건국대학교 산학협력단 | 유무기 합금 필름의 제조방법 및 그로부터 제조된 유무기 합금 필름 |
JP6286557B2 (ja) * | 2013-08-30 | 2018-02-28 | ビーエーエスエフ コーティングス ゲゼルシャフト ミット ベシュレンクテル ハフツングBASF Coatings GmbH | 有機−無機ハイブリッド薄膜およびその調製方法 |
JP6604974B2 (ja) | 2014-06-12 | 2019-11-13 | ビーエーエスエフ コーティングス ゲゼルシャフト ミット ベシュレンクテル ハフツング | 可撓性有機−無機積層体を製造する方法 |
CA2949398C (en) | 2014-06-13 | 2022-07-19 | Basf Coatings Gmbh | Process for producing organic-inorganic laminates |
MX2017009473A (es) | 2015-01-20 | 2017-11-02 | Basf Coatings Gmbh | Proceso para la produccion de laminados flexibles organicos-inorganicos. |
-
2016
- 2016-03-15 MX MX2017012134A patent/MX2017012134A/es unknown
- 2016-03-15 SG SG11201707265QA patent/SG11201707265QA/en unknown
- 2016-03-15 US US15/559,497 patent/US11286561B2/en active Active
- 2016-03-15 CN CN201680017247.1A patent/CN107429390A/zh active Pending
- 2016-03-15 BR BR112017020245-0A patent/BR112017020245A2/pt not_active Application Discontinuation
- 2016-03-15 EP EP16713752.0A patent/EP3274487A1/en active Pending
- 2016-03-15 RU RU2017135503A patent/RU2721247C2/ru active
- 2016-03-15 WO PCT/EP2016/055534 patent/WO2016150759A1/en active Application Filing
- 2016-03-15 JP JP2017550183A patent/JP6986447B2/ja active Active
- 2016-03-15 KR KR1020177026460A patent/KR102596710B1/ko active IP Right Grant
- 2016-03-15 CA CA2978031A patent/CA2978031A1/en not_active Abandoned
- 2016-03-23 TW TW105108951A patent/TWI782892B/zh active
Also Published As
Publication number | Publication date |
---|---|
CA2978031A1 (en) | 2016-09-29 |
MX2017012134A (es) | 2018-02-09 |
RU2017135503A3 (pt) | 2019-09-05 |
TWI782892B (zh) | 2022-11-11 |
KR102596710B1 (ko) | 2023-11-01 |
TW201700789A (zh) | 2017-01-01 |
US20180119279A1 (en) | 2018-05-03 |
RU2721247C2 (ru) | 2020-05-18 |
JP6986447B2 (ja) | 2021-12-22 |
SG11201707265QA (en) | 2017-10-30 |
CN107429390A (zh) | 2017-12-01 |
WO2016150759A1 (en) | 2016-09-29 |
RU2017135503A (ru) | 2019-04-26 |
KR20170130415A (ko) | 2017-11-28 |
US11286561B2 (en) | 2022-03-29 |
JP2018513271A (ja) | 2018-05-24 |
EP3274487A1 (en) | 2018-01-31 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
B06U | Preliminary requirement: requests with searches performed by other patent offices: procedure suspended [chapter 6.21 patent gazette] | ||
B07A | Application suspended after technical examination (opinion) [chapter 7.1 patent gazette] | ||
B09B | Patent application refused [chapter 9.2 patent gazette] |