BR112012012041A2 - barra de suporte e cassete que contém substrato. - Google Patents

barra de suporte e cassete que contém substrato.

Info

Publication number
BR112012012041A2
BR112012012041A2 BR112012012041A BR112012012041A BR112012012041A2 BR 112012012041 A2 BR112012012041 A2 BR 112012012041A2 BR 112012012041 A BR112012012041 A BR 112012012041A BR 112012012041 A BR112012012041 A BR 112012012041A BR 112012012041 A2 BR112012012041 A2 BR 112012012041A2
Authority
BR
Brazil
Prior art keywords
layer
elastic damping
support bar
inner layer
fiber reinforced
Prior art date
Application number
BR112012012041A
Other languages
English (en)
Inventor
Uchida Daisuke
Takemura Shinichi
Tayama Toru
Original Assignee
Jx Nippon Oil & Energy Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jx Nippon Oil & Energy Corp filed Critical Jx Nippon Oil & Energy Corp
Publication of BR112012012041A2 publication Critical patent/BR112012012041A2/pt

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6732—Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls
    • H01L21/67323—Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls characterized by a material, a roughness, a coating or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67748—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a single workpiece

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Vibration Prevention Devices (AREA)
  • Packaging Frangible Articles (AREA)
  • Laminated Bodies (AREA)

Abstract

patente de invenção: barra de suporte e cassete que contém substrato. nas barras de suporte (10), uma camada elástica de amortecimento (12) é disposta entre uma camada interna (11) e uma camada externa (13) que são compostas por plásticos reforçado com fibra de modo que a camada elástica de amortecimento (12) é contínua na direção circunferencial de camada interna (11) e se estende de uma extremidade de base (10a) até uma ponta (10b). isso pode melhorar as propriedades de amortecimento de vibração, por exemplo, encurtar o tempo de amortecimento de vibração. além disso, a camada interna (11) composta por plástico reforçado com fibra é em formato de tubo circular, e a camada elástica de amortecimento (12) é ensauichada entre a camada interna (11) e a camada externa (13) que são compostas por plástico reforçado com fibra. isso pode impedir a redução da rigidez devido ao fato de a camada elástica de amortecimento (12) ser aplicada.
BR112012012041A 2009-11-20 2010-11-18 barra de suporte e cassete que contém substrato. BR112012012041A2 (pt)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2009265373A JP5495731B2 (ja) 2009-11-20 2009-11-20 サポートバー及び基板収納カセット
PCT/JP2010/070558 WO2011062219A1 (ja) 2009-11-20 2010-11-18 サポートバー及び基板収納カセット

Publications (1)

Publication Number Publication Date
BR112012012041A2 true BR112012012041A2 (pt) 2019-09-24

Family

ID=44059693

Family Applications (1)

Application Number Title Priority Date Filing Date
BR112012012041A BR112012012041A2 (pt) 2009-11-20 2010-11-18 barra de suporte e cassete que contém substrato.

Country Status (6)

Country Link
JP (1) JP5495731B2 (pt)
KR (1) KR101696180B1 (pt)
CN (1) CN102668055B (pt)
BR (1) BR112012012041A2 (pt)
TW (1) TWI498260B (pt)
WO (1) WO2011062219A1 (pt)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6144084B2 (ja) * 2013-03-27 2017-06-07 Ｊｘｔｇエネルギー株式会社 支持部材
JP2014226892A (ja) * 2013-05-24 2014-12-08 Ｊｘ日鉱日石エネルギー株式会社 パイプ成形体
WO2018038174A1 (ja) * 2016-08-24 2018-03-01 Ｊｘｔｇエネルギー株式会社 支持部材
JP6668304B2 (ja) * 2017-10-04 2020-03-18 Ｊｘｔｇエネルギー株式会社 支持部材
KR101859153B1 (ko) * 2017-10-11 2018-05-16 주식회사 넥스컴스 외팔보 형태로 된 카세트용 서포트바의 진동감쇠장치

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3204627B2 (ja) * 1997-06-05 2001-09-04 住友ゴム工業株式会社 繊維強化プラスチック成形品
JP4339083B2 (ja) * 2003-11-18 2009-10-07 敏夫 谷本 制振性産業用梁構造部材
JP2005340480A (ja) * 2004-05-26 2005-12-08 Nippon Oil Corp 基板カセット用サポートバー
JP4029104B2 (ja) 2006-01-30 2008-01-09 新日本石油株式会社 楕円状支持部材
JP5189843B2 (ja) * 2008-01-04 2013-04-24 Ｊｘ日鉱日石エネルギー株式会社 Ｃｆｒｐ製搬送用部材及びそれを用いたロボットハンド

Also Published As

Publication number Publication date
TW201125792A (en) 2011-08-01
CN102668055B (zh) 2015-07-29
CN102668055A (zh) 2012-09-12
TWI498260B (zh) 2015-09-01
JP2011109027A (ja) 2011-06-02
KR101696180B1 (ko) 2017-01-13
WO2011062219A1 (ja) 2011-05-26
KR20120107954A (ko) 2012-10-04
JP5495731B2 (ja) 2014-05-21

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Legal Events

Date Code Title Description
B08F Application fees: dismissal - article 86 of industrial property law
B08K Lapse as no evidence of payment of the annual fee has been furnished to inpi (acc. art. 87)

Free format text: EM VIRTUDE DO ARQUIVAMENTO PUBLICADO NA RPI 2543 DE 01-10-2019 E CONSIDERANDO AUSENCIA DE MANIFESTACAO DENTRO DOS PRAZOS LEGAIS, INFORMO QUE CABE SER MANTIDO O ARQUIVAMENTO DO PEDIDO DE PATENTE, CONFORME O DISPOSTO NO ARTIGO 12, DA RESOLUCAO 113/2013.