BG49126A1 - Device for optical control of the speed of thin evaporated layers deposition upon continously moving base - Google Patents

Device for optical control of the speed of thin evaporated layers deposition upon continously moving base

Info

Publication number
BG49126A1
BG49126A1 BG8381288A BG8381288A BG49126A1 BG 49126 A1 BG49126 A1 BG 49126A1 BG 8381288 A BG8381288 A BG 8381288A BG 8381288 A BG8381288 A BG 8381288A BG 49126 A1 BG49126 A1 BG 49126A1
Authority
BG
Bulgaria
Prior art keywords
evaporator
speed
moving base
optical control
layers deposition
Prior art date
Application number
BG8381288A
Inventor
Atanas Ts Burov
Georgi S Petkov
Original Assignee
Ts Lab Fotoprotsesi
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ts Lab Fotoprotsesi filed Critical Ts Lab Fotoprotsesi
Priority to BG8381288A priority Critical patent/BG49126A1/en
Publication of BG49126A1 publication Critical patent/BG49126A1/en

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  • Physical Vapour Deposition (AREA)

Abstract

The gadget is applied for the preparation of thin films on the vacuum equipment, microelectronics, microphotolithography, etc. It is simple, has an enhanced sensitivity and can operate at a high degree of light in the vacuum chamber at evaporation of hard-melting substances by eliminating the impact of steam emitted by the evaporator on the measuring process. The gadget consists of a vacuum evaporator, photoreceivers, a moving transparent padding located between the photo receivers and the evaporator, a mobile monitor and an indicator. The photo receivers are at least two and are arranged consecutively along the direction of the padding's movement and are connected differentially in a bridge-like scheme. The evaporator serves also as a source of light.
BG8381288A 1988-04-19 1988-04-19 Device for optical control of the speed of thin evaporated layers deposition upon continously moving base BG49126A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
BG8381288A BG49126A1 (en) 1988-04-19 1988-04-19 Device for optical control of the speed of thin evaporated layers deposition upon continously moving base

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
BG8381288A BG49126A1 (en) 1988-04-19 1988-04-19 Device for optical control of the speed of thin evaporated layers deposition upon continously moving base

Publications (1)

Publication Number Publication Date
BG49126A1 true BG49126A1 (en) 1991-08-15

Family

ID=3920450

Family Applications (1)

Application Number Title Priority Date Filing Date
BG8381288A BG49126A1 (en) 1988-04-19 1988-04-19 Device for optical control of the speed of thin evaporated layers deposition upon continously moving base

Country Status (1)

Country Link
BG (1) BG49126A1 (en)

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