BE893251A - METHOD OF REACTIVE ION ATTACK OF LAYERS CONTAINING TANTALUM AND SILICON - Google Patents
METHOD OF REACTIVE ION ATTACK OF LAYERS CONTAINING TANTALUM AND SILICONInfo
- Publication number
- BE893251A BE893251A BE0/208144A BE208144A BE893251A BE 893251 A BE893251 A BE 893251A BE 0/208144 A BE0/208144 A BE 0/208144A BE 208144 A BE208144 A BE 208144A BE 893251 A BE893251 A BE 893251A
- Authority
- BE
- Belgium
- Prior art keywords
- silicon
- reactive ion
- layers containing
- containing tantalum
- ion attack
- Prior art date
Links
- 229910052710 silicon Inorganic materials 0.000 title 1
- 239000010703 silicon Substances 0.000 title 1
- 229910052715 tantalum Inorganic materials 0.000 title 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/3213—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer
- H01L21/32133—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only
- H01L21/32135—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by vapour etching only
- H01L21/32136—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by vapour etching only using plasmas
- H01L21/32137—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by vapour etching only using plasmas of silicon-containing layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/28008—Making conductor-insulator-semiconductor electrodes
- H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
- H01L21/28026—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor
- H01L21/28035—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor the final conductor layer next to the insulator being silicon, e.g. polysilicon, with or without impurities
- H01L21/28044—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor the final conductor layer next to the insulator being silicon, e.g. polysilicon, with or without impurities the conductor comprising at least another non-silicon conductive layer
- H01L21/28061—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor the final conductor layer next to the insulator being silicon, e.g. polysilicon, with or without impurities the conductor comprising at least another non-silicon conductive layer the conductor comprising a metal or metal silicide formed by deposition, e.g. sputter deposition, i.e. without a silicidation reaction
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Plasma & Fusion (AREA)
- Drying Of Semiconductors (AREA)
- Electrodes Of Semiconductors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US26643381A | 1981-05-22 | 1981-05-22 |
Publications (1)
Publication Number | Publication Date |
---|---|
BE893251A true BE893251A (en) | 1982-09-16 |
Family
ID=23014579
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
BE0/208144A BE893251A (en) | 1981-05-22 | 1982-05-19 | METHOD OF REACTIVE ION ATTACK OF LAYERS CONTAINING TANTALUM AND SILICON |
Country Status (8)
Country | Link |
---|---|
JP (1) | JPS57198633A (en) |
BE (1) | BE893251A (en) |
CA (1) | CA1202597A (en) |
DE (1) | DE3219284A1 (en) |
FR (1) | FR2506519B1 (en) |
GB (1) | GB2098931B (en) |
IT (1) | IT1151209B (en) |
NL (1) | NL8202103A (en) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3216823A1 (en) * | 1982-05-05 | 1983-11-10 | Siemens AG, 1000 Berlin und 8000 München | METHOD FOR PRODUCING STRUCTURES OF DOUBLE LAYERS CONSISTING OF METAL SILICIDE AND POLYSILIZIUM ON SUBSTRATES CONTAINING INTEGRATED SEMICONDUCTOR CIRCUITS BY REACTIVE ION NETWORK |
US4414057A (en) * | 1982-12-03 | 1983-11-08 | Inmos Corporation | Anisotropic silicide etching process |
DE3315719A1 (en) * | 1983-04-29 | 1984-10-31 | Siemens AG, 1000 Berlin und 8000 München | METHOD FOR PRODUCING STRUCTURES FROM METAL SILICIDES OR SILICIDE-POLYSILIZIUM EXISTING DOUBLE LAYERS FOR INTEGRATED SEMICONDUCTOR CIRCUITS THROUGH REACTIVE ION NETWORK |
US4528066A (en) * | 1984-07-06 | 1985-07-09 | Ibm Corporation | Selective anisotropic reactive ion etching process for polysilicide composite structures |
NL8500771A (en) * | 1985-03-18 | 1986-10-16 | Philips Nv | METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE INCLUDING A DOUBLE LAYER PRESENT ON A LOW SILICON OXIDE CONTAINING POLY-SI AND A SILICIDE |
KR930006526B1 (en) * | 1985-06-28 | 1993-07-16 | 아메리칸 텔리폰 앤드 텔레그라프 캄파니 | Dry ethcing procedure and devices formed by this procedure |
DE4114741C2 (en) * | 1990-07-04 | 1998-11-12 | Mitsubishi Electric Corp | Method for forming a printed conductor on a semiconductor substrate |
US6177337B1 (en) * | 1998-01-06 | 2001-01-23 | International Business Machines Corporation | Method of reducing metal voids in semiconductor device interconnection |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5519873A (en) * | 1978-07-28 | 1980-02-12 | Mitsubishi Electric Corp | Forming method of metallic layer pattern for semiconductor |
-
1982
- 1982-04-15 CA CA000401014A patent/CA1202597A/en not_active Expired
- 1982-05-18 GB GB8214402A patent/GB2098931B/en not_active Expired
- 1982-05-18 FR FR828208669A patent/FR2506519B1/en not_active Expired
- 1982-05-19 BE BE0/208144A patent/BE893251A/en not_active IP Right Cessation
- 1982-05-20 JP JP57084147A patent/JPS57198633A/en active Pending
- 1982-05-21 NL NL8202103A patent/NL8202103A/en not_active Application Discontinuation
- 1982-05-21 IT IT21430/82A patent/IT1151209B/en active
- 1982-05-22 DE DE19823219284 patent/DE3219284A1/en active Granted
Also Published As
Publication number | Publication date |
---|---|
FR2506519B1 (en) | 1985-07-26 |
GB2098931A (en) | 1982-12-01 |
DE3219284A1 (en) | 1982-12-16 |
NL8202103A (en) | 1982-12-16 |
FR2506519A1 (en) | 1982-11-26 |
IT8221430A0 (en) | 1982-05-21 |
IT1151209B (en) | 1986-12-17 |
CA1202597A (en) | 1986-04-01 |
DE3219284C2 (en) | 1989-08-10 |
JPS57198633A (en) | 1982-12-06 |
GB2098931B (en) | 1985-02-06 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RE | Patent lapsed |
Owner name: WESTERN ELECTRIC CY INC. Effective date: 20000531 |