BE890284A - Procede et appareil pour la fabrication de rubans cristallins - Google Patents

Procede et appareil pour la fabrication de rubans cristallins

Info

Publication number
BE890284A
BE890284A BE0/205913A BE205913A BE890284A BE 890284 A BE890284 A BE 890284A BE 0/205913 A BE0/205913 A BE 0/205913A BE 205913 A BE205913 A BE 205913A BE 890284 A BE890284 A BE 890284A
Authority
BE
Belgium
Prior art keywords
manufacturing crystalline
crystalline ribbons
ribbons
manufacturing
crystalline
Prior art date
Application number
BE0/205913A
Other languages
English (en)
Inventor
D N Jewett
Original Assignee
Energy Materials Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Energy Materials Corp filed Critical Energy Materials Corp
Publication of BE890284A publication Critical patent/BE890284A/fr

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/06—Non-vertical pulling
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling
    • Y10T117/1036—Seed pulling including solid member shaping means other than seed or product [e.g., EDFG die]
    • Y10T117/1044—Seed pulling including solid member shaping means other than seed or product [e.g., EDFG die] including means forming a flat shape [e.g., ribbon]
    • Y10T117/1048—Pulling includes a horizontal component

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
BE0/205913A 1979-06-25 1981-09-09 Procede et appareil pour la fabrication de rubans cristallins BE890284A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/051,998 US4289571A (en) 1979-06-25 1979-06-25 Method and apparatus for producing crystalline ribbons

Publications (1)

Publication Number Publication Date
BE890284A true BE890284A (fr) 1982-01-04

Family

ID=21974741

Family Applications (1)

Application Number Title Priority Date Filing Date
BE0/205913A BE890284A (fr) 1979-06-25 1981-09-09 Procede et appareil pour la fabrication de rubans cristallins

Country Status (2)

Country Link
US (1) US4289571A (fr)
BE (1) BE890284A (fr)

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4659421A (en) * 1981-10-02 1987-04-21 Energy Materials Corporation System for growth of single crystal materials with extreme uniformity in their structural and electrical properties
US4688623A (en) * 1981-12-21 1987-08-25 Atlantic Richfield Company Textured silicon ribbon growth wheel
DE3231326A1 (de) * 1982-08-23 1984-02-23 Siemens AG, 1000 Berlin und 8000 München Vorrichtung zum herstellen von grossflaechigen, bandfoermigen siliziumkoerpern fuer solarzellen
US4698120A (en) * 1984-10-29 1987-10-06 Westinghouse Electric Corp. Barrier for quartz crucible for drawing silicon dendritic web and method of use
US4599132A (en) * 1985-01-18 1986-07-08 Energy Materials Corporation Guidance system for low angle silicon ribbon growth
US4721688A (en) * 1986-09-18 1988-01-26 Mobil Solar Energy Corporation Method of growing crystals
US4751059A (en) * 1986-12-05 1988-06-14 Westinghouse Electric Corp. Apparatus for growing dendritic web crystals of constant width
DE3736339A1 (de) * 1987-10-27 1989-05-11 Siemens Ag Anordnung zum kontinuierlichen aufschmelzen von siliziumgranulat fuer das bandziehverfahren
US4919901A (en) * 1987-12-31 1990-04-24 Westinghouse Electric Corp. Barrier design for crucibles for silicon dendritic web growth
DE3806001A1 (de) * 1988-02-25 1989-09-07 Siemens Ag Anordnung zum vollstaendigen entleeren von mit siliziumschmelze gefuellten quarzwannen oder -tiegeln nach dem siliziumbandziehen
DE4217677A1 (de) * 1992-05-27 1993-12-02 Schmidt Peter Dr Rer Nat Verfahren zum Herstellen von dünnen, bandförmigen Kristallen mit ebener Oberfläche und nach diesem Verfahren gewonnenes Kristallmaterial
US7635414B2 (en) * 2003-11-03 2009-12-22 Solaicx, Inc. System for continuous growing of monocrystalline silicon
JP2010504905A (ja) 2006-09-28 2010-02-18 ビーピー・コーポレーション・ノース・アメリカ・インコーポレーテッド 結晶シリコン基板を製造するための方法及び装置
US7855087B2 (en) * 2008-03-14 2010-12-21 Varian Semiconductor Equipment Associates, Inc. Floating sheet production apparatus and method
US8064071B2 (en) * 2008-03-14 2011-11-22 Varian Semiconductor Equipment Associates, Inc. Floating sheet measurement apparatus and method
US7816153B2 (en) * 2008-06-05 2010-10-19 Varian Semiconductor Equipment Associates, Inc. Method and apparatus for producing a dislocation-free crystalline sheet
US9567691B2 (en) * 2008-06-20 2017-02-14 Varian Semiconductor Equipment Associates, Inc. Melt purification and delivery system
US8545624B2 (en) * 2008-06-20 2013-10-01 Varian Semiconductor Equipment Associates, Inc. Method for continuous formation of a purified sheet from a melt
US8475591B2 (en) * 2008-08-15 2013-07-02 Varian Semiconductor Equipment Associates, Inc. Method of controlling a thickness of a sheet formed from a melt
US7998224B2 (en) 2008-10-21 2011-08-16 Varian Semiconductor Equipment Associates, Inc. Removal of a sheet from a production apparatus
US9267219B2 (en) * 2010-05-06 2016-02-23 Varian Semiconductor Equipment Associates, Inc. Gas-lift pumps for flowing and purifying molten silicon
US8685162B2 (en) 2010-05-06 2014-04-01 Varian Semiconductor Equipment Associates, Inc. Removing a sheet from the surface of a melt using gas jets
US8764901B2 (en) 2010-05-06 2014-07-01 Varian Semiconductor Equipment Associates, Inc. Removing a sheet from the surface of a melt using elasticity and buoyancy
US9970125B2 (en) 2012-02-17 2018-05-15 Varian Semiconductor Equipment Associates, Inc. Method for achieving sustained anisotropic crystal growth on the surface of a silicon melt
KR20160074455A (ko) * 2013-08-08 2016-06-28 에너지 머티리얼즈 리서치 엘엘씨 실리콘 웨이퍼 형성을 위한 시스템 및 방법
US9957636B2 (en) 2014-03-27 2018-05-01 Varian Semiconductor Equipment Associates, Inc. System and method for crystalline sheet growth using a cold block and gas jet
US10415151B1 (en) 2014-03-27 2019-09-17 Varian Semiconductor Equipment Associates, Inc Apparatus for controlling heat flow within a silicon melt
US9587324B2 (en) 2014-05-12 2017-03-07 Varian Semiconductor Equipment Associates, Inc. Apparatus for processing a melt
US10030317B2 (en) * 2014-10-17 2018-07-24 Varian Semiconductor Equipment Associates, Inc. Apparatus and method for controlling thickness of a crystalline sheet grown on a melt
US10526720B2 (en) * 2015-08-19 2020-01-07 Varian Semiconductor Equipment Associates, Inc. Apparatus for forming crystalline sheet from a melt
US10179958B2 (en) 2016-09-16 2019-01-15 Varian Semiconductor Equipment Associates, Inc Apparatus and method for crystalline sheet growth
CN107217296B (zh) * 2017-04-28 2019-05-07 常州大学 一种硅片水平生长设备和方法

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1364895A (en) * 1918-03-28 1921-01-11 Pittsburgh Plate Glass Co Glass-drawing process
US2698467A (en) * 1950-06-05 1955-01-04 Edward W Osann Jr Method and apparatus for the continuous casting of metal
GB984700A (en) * 1961-05-12 1965-03-03 Texas Instruments Inc Method of producing dendrite crystals
US3370927A (en) * 1966-02-28 1968-02-27 Westinghouse Electric Corp Method of angularly pulling continuous dendritic crystals
US3464812A (en) * 1966-03-29 1969-09-02 Massachusetts Inst Technology Process for making solids and products thereof
US3413098A (en) * 1966-08-10 1968-11-26 Westinghouse Electric Corp Process for varying the width of sheets of web material
US3494745A (en) * 1967-04-06 1970-02-10 Corning Glass Works Method of growing single crystal in a horizontally disposed rod
US3759671A (en) * 1971-10-15 1973-09-18 Gen Motors Corp Horizontal growth of crystal ribbons
US4000030A (en) * 1975-06-09 1976-12-28 International Business Machines Corporation Method for drawing a monocrystal from a melt formed about a wettable projection
DE2633961C2 (de) * 1975-07-28 1986-01-02 Mitsubishi Kinzoku K.K. Verfahren zum Ziehen eines dünnen Halbleiter-Einkristallbandes
JPS5252611A (en) * 1975-10-24 1977-04-27 Keiji Suzuki Magnetic recording and playback apparatus
US4083748A (en) * 1975-10-30 1978-04-11 Western Electric Company, Inc. Method of forming and growing a single crystal of a semiconductor compound
US4116641A (en) * 1976-04-16 1978-09-26 International Business Machines Corporation Apparatus for pulling crystal ribbons from a truncated wedge shaped die
DE2623413C2 (de) * 1976-05-25 1985-01-10 Siemens AG, 1000 Berlin und 8000 München Verfahren zum Herstellen von für Halbleiterbauelemente verwendbarem Silicium
US4116642A (en) * 1976-12-15 1978-09-26 Western Electric Company, Inc. Method and apparatus for avoiding undesirable deposits in crystal growing operations
US4099924A (en) * 1977-03-16 1978-07-11 Rca Corporation Apparatus improvements for growing single crystalline silicon sheets

Also Published As

Publication number Publication date
US4289571A (en) 1981-09-15

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Legal Events

Date Code Title Description
RE Patent lapsed

Owner name: ENERGY MATERIALS CORP.

Effective date: 19860930