BE834557A - Creuset vaporisateur pour installations de metallisation sous vide - Google Patents

Creuset vaporisateur pour installations de metallisation sous vide

Info

Publication number
BE834557A
BE834557A BE2054625A BE2054625A BE834557A BE 834557 A BE834557 A BE 834557A BE 2054625 A BE2054625 A BE 2054625A BE 2054625 A BE2054625 A BE 2054625A BE 834557 A BE834557 A BE 834557A
Authority
BE
Belgium
Prior art keywords
crucer
vaporizing
vacuum metallization
plants
metallization plants
Prior art date
Application number
BE2054625A
Other languages
English (en)
French (fr)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of BE834557A publication Critical patent/BE834557A/xx

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
BE2054625A 1974-10-16 1975-10-16 Creuset vaporisateur pour installations de metallisation sous vide BE834557A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2449225A DE2449225C3 (de) 1974-10-16 1974-10-16 Verdampfungstiegel für Vakuumbedampfungs anlagen

Publications (1)

Publication Number Publication Date
BE834557A true BE834557A (fr) 1976-04-16

Family

ID=5928427

Family Applications (1)

Application Number Title Priority Date Filing Date
BE2054625A BE834557A (fr) 1974-10-16 1975-10-16 Creuset vaporisateur pour installations de metallisation sous vide

Country Status (5)

Country Link
US (1) US3984088A (enExample)
BE (1) BE834557A (enExample)
DE (1) DE2449225C3 (enExample)
FR (1) FR2333872A1 (enExample)
GB (1) GB1499364A (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4023523A (en) * 1975-04-23 1977-05-17 Xerox Corporation Coater hardware and method for obtaining uniform photoconductive layers on a xerographic photoreceptor
JPS5274580A (en) * 1975-12-19 1977-06-22 Hitachi Ltd Boat for vacuum evaporation
DE3420246A1 (de) * 1984-05-30 1985-12-05 Leybold-Heraeus GmbH, 5000 Köln Verdampfertiegel fuer vakuum-aufdampfanlagen
US4620081A (en) * 1984-08-03 1986-10-28 The United States Of America As Represented By The United States Department Of Energy Self-contained hot-hollow cathode gun source assembly
US5395180A (en) * 1993-12-14 1995-03-07 Advanced Ceramics Corporation Boron nitride vaporization vessel
US20030026601A1 (en) * 2001-07-31 2003-02-06 The Arizona Board Of Regents On Behalf Of The University Of Arizona Vapor deposition and in-situ purification of organic molecules
DE102010055285A1 (de) * 2010-12-21 2012-06-21 Solarion Ag Photovoltaik Verdampferquelle, Verdampferkammer und Beschichtungsverfahren
US20230115177A1 (en) * 2021-10-08 2023-04-13 Entegris, Inc. Compressible tray for solid chemical vaporizing chamber

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3227431A (en) * 1961-11-22 1966-01-04 Nat Res Corp Crucible externally lined with filamentary carbon
DE1276421B (de) * 1966-08-24 1968-08-29 Leybold Heraeus Gmbh & Co Kg Verdampfungstiegel fuer Vakuum-Bandbedampfungsanlagen
US3514575A (en) * 1967-08-10 1970-05-26 Sylvania Electric Prod Metal-evaporating source
DE1945508B2 (de) * 1968-09-13 1971-06-09 Vorrichtung zum freisetzen von metalldaempfen
US3863907A (en) * 1972-10-24 1975-02-04 M & T Mfg Co Radiant heating system

Also Published As

Publication number Publication date
US3984088A (en) 1976-10-05
GB1499364A (en) 1978-02-01
DE2449225B2 (de) 1979-09-27
DE2449225A1 (de) 1976-04-29
FR2333872A1 (fr) 1977-07-01
FR2333872B1 (enExample) 1980-02-08
DE2449225C3 (de) 1980-06-04

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