BE763782A - Systeme de mesure comprenant un interferometre a laser unique - Google Patents

Systeme de mesure comprenant un interferometre a laser unique

Info

Publication number
BE763782A
BE763782A BE763782A BE763782A BE763782A BE 763782 A BE763782 A BE 763782A BE 763782 A BE763782 A BE 763782A BE 763782 A BE763782 A BE 763782A BE 763782 A BE763782 A BE 763782A
Authority
BE
Belgium
Prior art keywords
system including
measuring system
laser interferometer
single laser
interferometer
Prior art date
Application number
BE763782A
Other languages
English (en)
French (fr)
Inventor
W E Brainard
C B Sipex
Original Assignee
Kearney & Trecker Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kearney & Trecker Corp filed Critical Kearney & Trecker Corp
Publication of BE763782A publication Critical patent/BE763782A/xx

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
    • G01B9/02021—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations contacting different faces of object, e.g. opposite faces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/24—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves
    • B23Q17/248—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves using special electromagnetic means or methods
    • B23Q17/2495—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves using special electromagnetic means or methods using interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02078—Caused by ambiguity
    • G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
    • G01B9/02081—Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/19—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path
    • G05B19/21—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using an incremental digital measuring device

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Engineering (AREA)
  • Human Computer Interaction (AREA)
  • Manufacturing & Machinery (AREA)
  • Automation & Control Theory (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Machine Tool Sensing Apparatuses (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
BE763782A 1970-03-05 1971-03-04 Systeme de mesure comprenant un interferometre a laser unique BE763782A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US1684870A 1970-03-05 1970-03-05

Publications (1)

Publication Number Publication Date
BE763782A true BE763782A (fr) 1971-09-06

Family

ID=21779307

Family Applications (1)

Application Number Title Priority Date Filing Date
BE763782A BE763782A (fr) 1970-03-05 1971-03-04 Systeme de mesure comprenant un interferometre a laser unique

Country Status (11)

Country Link
US (1) US3661463A (nl)
JP (1) JPS5115267B1 (nl)
BE (1) BE763782A (nl)
CA (1) CA920798A (nl)
CH (1) CH537777A (nl)
FR (1) FR2084275A5 (nl)
GB (1) GB1343636A (nl)
IL (1) IL36344A (nl)
IT (1) IT939292B (nl)
NL (1) NL145673B (nl)
SE (1) SE366830B (nl)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3884580A (en) * 1973-09-07 1975-05-20 Gerber Scientific Instr Co Apparatus for measuring and positioning by interferometry
US4152072A (en) * 1977-02-02 1979-05-01 Litton Systems, Inc. Photosensitive diodes for simplified optical heterodyning and cavity length control
US4261107A (en) * 1980-03-06 1981-04-14 Caterpillar Tractor Co. Coordinate locating device
EP0058673A4 (en) * 1980-08-11 1985-04-03 Colt Ind Operating Corp LASER MEASURING SYSTEM AND METHOD FOR A LATHE.
ATE9183T1 (de) * 1980-12-02 1984-09-15 Dr. Johannes Heidenhain Gmbh Verfahren zum schrittweisen messen von geometrischen groessen und vorrichtungen zur durchfuehrung des verfahrens.
US4585379A (en) * 1980-12-27 1986-04-29 Hitachi, Ltd. Precision positioning device
DE3279056D1 (en) * 1982-01-15 1988-10-27 Zeiss Carl Fa Threedimensional interferometric length-measuring device
US4589746A (en) * 1982-05-07 1986-05-20 The Gerber Scientific Instrument Company Dual-axis, single mirror interferometer measuring system
DE3233059C2 (de) * 1982-09-06 1985-03-21 Oerlikon-Boehringer GmbH, 7320 Göppingen Tiefbohrmaschine
JPS5956072A (ja) * 1982-09-21 1984-03-31 株式会社省熱学研究所 乾燥装置
US4643577A (en) * 1983-07-15 1987-02-17 Wero Ohg Roth & Co. Length measuring apparatus based on the dual laser beam interferometer principle
JPS60125497U (ja) * 1984-02-02 1985-08-23 株式会社　シノミヤ 通風乾燥機における乾燥室内の通風装置
US4724525A (en) * 1984-12-12 1988-02-09 Moore Special Tool Co., Inc. Real-time data collection apparatus for use in multi-axis measuring machine
GB8616431D0 (en) * 1986-07-05 1986-08-13 Renishaw Plc Locating co-ordinates of object
EP0306509B1 (en) * 1987-03-06 1990-11-22 Renishaw plc Position determination apparatus
JPS63229250A (ja) * 1987-03-13 1988-09-26 Kitamura Mach Co Ltd マニシングセンタ
US4792228A (en) * 1987-08-20 1988-12-20 Cincinnati Milacron Inc. Position error sensing and feedback apparatus and method
US4884697A (en) * 1988-06-21 1989-12-05 Takacs Peter Z Surface profiling interferometer
WO1993009394A1 (en) * 1991-11-08 1993-05-13 British Technology Group Ltd. Measuring instruments
US5940180A (en) * 1994-10-11 1999-08-17 Giddings & Lewis Laser interferometer measurement system for use with machine tools
US5552888A (en) * 1994-12-02 1996-09-03 Nikon Precision, Inc. Apparatus for measuring position of an X-Y stage
JP5036063B2 (ja) * 2008-06-10 2012-09-26 日本発條株式会社 架空線用テンションバランサ装置および架空線用テンションバランサ防水カバー
CN106441152B (zh) * 2016-10-18 2019-02-01 淮阴师范学院 非对称式光学干涉测量方法及装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3377111A (en) * 1966-02-15 1968-04-09 Optomechanisms Inc Precision coordinate axes table means
US3515481A (en) * 1966-09-09 1970-06-02 Optomechanisms Inc Lead screw measuring means

Also Published As

Publication number Publication date
DE2109954B2 (de) 1973-07-19
FR2084275A5 (nl) 1971-12-17
US3661463A (en) 1972-05-09
NL145673B (nl) 1975-04-15
CA920798A (en) 1973-02-13
NL7102737A (nl) 1971-09-07
IL36344A0 (en) 1971-05-26
CH537777A (de) 1973-06-15
IT939292B (it) 1973-02-10
JPS5115267B1 (nl) 1976-05-15
DE2109954A1 (de) 1971-09-16
IL36344A (en) 1974-01-14
GB1343636A (en) 1974-01-16
SE366830B (nl) 1974-05-06

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