BE763782A - Systeme de mesure comprenant un interferometre a laser unique - Google Patents
Systeme de mesure comprenant un interferometre a laser uniqueInfo
- Publication number
- BE763782A BE763782A BE763782A BE763782A BE763782A BE 763782 A BE763782 A BE 763782A BE 763782 A BE763782 A BE 763782A BE 763782 A BE763782 A BE 763782A BE 763782 A BE763782 A BE 763782A
- Authority
- BE
- Belgium
- Prior art keywords
- system including
- measuring system
- laser interferometer
- single laser
- interferometer
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
- G01B9/02021—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations contacting different faces of object, e.g. opposite faces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
- B23Q17/24—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves
- B23Q17/248—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves using special electromagnetic means or methods
- B23Q17/2495—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves using special electromagnetic means or methods using interferometers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
- G01B9/02078—Caused by ambiguity
- G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
- G01B9/02081—Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/19—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path
- G05B19/21—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using an incremental digital measuring device
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Mechanical Engineering (AREA)
- Human Computer Interaction (AREA)
- Manufacturing & Machinery (AREA)
- Automation & Control Theory (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Machine Tool Sensing Apparatuses (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US1684870A | 1970-03-05 | 1970-03-05 |
Publications (1)
Publication Number | Publication Date |
---|---|
BE763782A true BE763782A (fr) | 1971-09-06 |
Family
ID=21779307
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
BE763782A BE763782A (fr) | 1970-03-05 | 1971-03-04 | Systeme de mesure comprenant un interferometre a laser unique |
Country Status (11)
Country | Link |
---|---|
US (1) | US3661463A (ja) |
JP (1) | JPS5115267B1 (ja) |
BE (1) | BE763782A (ja) |
CA (1) | CA920798A (ja) |
CH (1) | CH537777A (ja) |
FR (1) | FR2084275A5 (ja) |
GB (1) | GB1343636A (ja) |
IL (1) | IL36344A (ja) |
IT (1) | IT939292B (ja) |
NL (1) | NL145673B (ja) |
SE (1) | SE366830B (ja) |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3884580A (en) * | 1973-09-07 | 1975-05-20 | Gerber Scientific Instr Co | Apparatus for measuring and positioning by interferometry |
US4152072A (en) * | 1977-02-02 | 1979-05-01 | Litton Systems, Inc. | Photosensitive diodes for simplified optical heterodyning and cavity length control |
US4261107A (en) * | 1980-03-06 | 1981-04-14 | Caterpillar Tractor Co. | Coordinate locating device |
WO1982000514A1 (en) * | 1980-08-11 | 1982-02-18 | Kindl G | Laser measuring system and method for turning machine |
ATE9183T1 (de) * | 1980-12-02 | 1984-09-15 | Dr. Johannes Heidenhain Gmbh | Verfahren zum schrittweisen messen von geometrischen groessen und vorrichtungen zur durchfuehrung des verfahrens. |
US4585379A (en) * | 1980-12-27 | 1986-04-29 | Hitachi, Ltd. | Precision positioning device |
DE3279056D1 (en) * | 1982-01-15 | 1988-10-27 | Zeiss Carl Fa | Threedimensional interferometric length-measuring device |
US4589746A (en) * | 1982-05-07 | 1986-05-20 | The Gerber Scientific Instrument Company | Dual-axis, single mirror interferometer measuring system |
DE3233059C2 (de) * | 1982-09-06 | 1985-03-21 | Oerlikon-Boehringer GmbH, 7320 Göppingen | Tiefbohrmaschine |
JPS5956072A (ja) * | 1982-09-21 | 1984-03-31 | 株式会社省熱学研究所 | 乾燥装置 |
US4643577A (en) * | 1983-07-15 | 1987-02-17 | Wero Ohg Roth & Co. | Length measuring apparatus based on the dual laser beam interferometer principle |
JPS60125497U (ja) * | 1984-02-02 | 1985-08-23 | 株式会社 シノミヤ | 通風乾燥機における乾燥室内の通風装置 |
US4724525A (en) * | 1984-12-12 | 1988-02-09 | Moore Special Tool Co., Inc. | Real-time data collection apparatus for use in multi-axis measuring machine |
GB8616431D0 (en) * | 1986-07-05 | 1986-08-13 | Renishaw Plc | Locating co-ordinates of object |
WO1988006713A1 (en) * | 1987-03-06 | 1988-09-07 | Renishaw Plc | Position determination apparatus |
JPS63229250A (ja) * | 1987-03-13 | 1988-09-26 | Kitamura Mach Co Ltd | マニシングセンタ |
US4792228A (en) * | 1987-08-20 | 1988-12-20 | Cincinnati Milacron Inc. | Position error sensing and feedback apparatus and method |
US4884697A (en) * | 1988-06-21 | 1989-12-05 | Takacs Peter Z | Surface profiling interferometer |
WO1993009394A1 (en) * | 1991-11-08 | 1993-05-13 | British Technology Group Ltd. | Measuring instruments |
US5940180A (en) * | 1994-10-11 | 1999-08-17 | Giddings & Lewis | Laser interferometer measurement system for use with machine tools |
US5552888A (en) * | 1994-12-02 | 1996-09-03 | Nikon Precision, Inc. | Apparatus for measuring position of an X-Y stage |
JP5036063B2 (ja) * | 2008-06-10 | 2012-09-26 | 日本発條株式会社 | 架空線用テンションバランサ装置および架空線用テンションバランサ防水カバー |
CN106441152B (zh) * | 2016-10-18 | 2019-02-01 | 淮阴师范学院 | 非对称式光学干涉测量方法及装置 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3377111A (en) * | 1966-02-15 | 1968-04-09 | Optomechanisms Inc | Precision coordinate axes table means |
US3515481A (en) * | 1966-09-09 | 1970-06-02 | Optomechanisms Inc | Lead screw measuring means |
-
1970
- 1970-03-05 US US16848A patent/US3661463A/en not_active Expired - Lifetime
-
1971
- 1971-02-19 CA CA105996A patent/CA920798A/en not_active Expired
- 1971-03-02 NL NL717102737A patent/NL145673B/xx unknown
- 1971-03-04 IT IT48798/71A patent/IT939292B/it active
- 1971-03-04 BE BE763782A patent/BE763782A/xx unknown
- 1971-03-04 SE SE02797/71A patent/SE366830B/xx unknown
- 1971-03-04 JP JP46011780A patent/JPS5115267B1/ja active Pending
- 1971-03-04 IL IL36344A patent/IL36344A/xx unknown
- 1971-03-05 CH CH329571A patent/CH537777A/de not_active IP Right Cessation
- 1971-03-05 FR FR7107782A patent/FR2084275A5/fr not_active Expired
- 1971-04-19 GB GB2307171*#A patent/GB1343636A/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
IL36344A (en) | 1974-01-14 |
DE2109954A1 (de) | 1971-09-16 |
SE366830B (ja) | 1974-05-06 |
IL36344A0 (en) | 1971-05-26 |
CH537777A (de) | 1973-06-15 |
IT939292B (it) | 1973-02-10 |
JPS5115267B1 (ja) | 1976-05-15 |
CA920798A (en) | 1973-02-13 |
DE2109954B2 (de) | 1973-07-19 |
NL7102737A (ja) | 1971-09-07 |
US3661463A (en) | 1972-05-09 |
GB1343636A (en) | 1974-01-16 |
FR2084275A5 (ja) | 1971-12-17 |
NL145673B (nl) | 1975-04-15 |
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