BE739815A - - Google Patents
Info
- Publication number
- BE739815A BE739815A BE739815DA BE739815A BE 739815 A BE739815 A BE 739815A BE 739815D A BE739815D A BE 739815DA BE 739815 A BE739815 A BE 739815A
- Authority
- BE
- Belgium
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
- C30B31/14—Substrate holders or susceptors
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S118/00—Coating apparatus
- Y10S118/90—Semiconductor vapor doping
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19681801187 DE1801187B1 (de) | 1968-10-04 | 1968-10-04 | Vorrichtung zur Waermebehandlung von Siliziumscheiben |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| BE739815A true BE739815A (en:Method) | 1970-04-03 |
Family
ID=5709643
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| BE739815D BE739815A (en:Method) | 1968-10-04 | 1969-10-03 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US3604694A (en:Method) |
| BE (1) | BE739815A (en:Method) |
| DE (1) | DE1801187B1 (en:Method) |
| FR (1) | FR2019940A1 (en:Method) |
| GB (1) | GB1244069A (en:Method) |
| NL (1) | NL6913337A (en:Method) |
| SE (1) | SE341035B (en:Method) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3669431A (en) * | 1971-01-25 | 1972-06-13 | Signetics Corp | Boat pulling apparatus for diffusion furnace and method |
| US3705714A (en) * | 1971-05-20 | 1972-12-12 | Norton Co | Silicon nitride kiln furniture |
| US3735965A (en) * | 1972-02-29 | 1973-05-29 | Schoger & Associates Inc Santa | Furnace carrier and handling system |
| JPS6011457B2 (ja) * | 1973-04-02 | 1985-03-26 | 株式会社日立製作所 | デイポジシヨン法 |
| GB1502754A (en) * | 1975-12-22 | 1978-03-01 | Siemens Ag | Heat-treatment of semi-conductor wafers |
| US4278422A (en) * | 1979-12-31 | 1981-07-14 | David M. Volz | Diffusion tube support collar |
| JPS5849290B2 (ja) * | 1980-08-18 | 1983-11-02 | 富士通株式会社 | 石英反応管 |
| DE3267491D1 (en) * | 1981-03-02 | 1986-01-02 | Bbc Brown Boveri & Cie | Process for doping semiconductor bodies for the production of semiconductor devices |
| US4518349A (en) * | 1983-12-01 | 1985-05-21 | Better Semiconductor Processes (Bsp) | Cantilevered boat-free semiconductor wafer handling system |
| US4624638A (en) * | 1984-11-29 | 1986-11-25 | Btu Engineering Corporation | CVD boat loading mechanism having a separable, low profile cantilevered paddle assembly |
| USD327078S (en) | 1988-07-25 | 1992-06-16 | Tel Sagami Limited | Instrument for transferring boats for thermal treatment of semiconductor wafers |
| USD326273S (en) | 1988-07-25 | 1992-05-19 | Tel Sagami Limited | Heat insulating cylinder for thermal treatment of semiconductor wafers |
| USD326272S (en) | 1988-07-25 | 1992-05-19 | Tel Sagami Limited | Heat insulating cylinder for thermal treatment of semiconductor wafers |
| US5709227A (en) * | 1995-12-05 | 1998-01-20 | R. J. Reynolds Tobacco Company | Degradable smoking article |
| DE102004053435A1 (de) * | 2004-11-05 | 2006-05-11 | Forschungszentrum Jülich GmbH | Thermische Isolierung zur Reduzierung von Wärmeverlusten und Energieverbrauch bei Hochtemperaturanlagen |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3183130A (en) * | 1962-01-22 | 1965-05-11 | Motorola Inc | Diffusion process and apparatus |
| GB1085299A (en) * | 1964-11-23 | 1967-09-27 | Btu Eng Corp | Improvements in or relating to diffusion furnaces |
| DE1521481B1 (de) * | 1965-10-22 | 1969-12-04 | Siemens Ag | Anordnung zur Waermebehandlung von scheibenfoermigen Halbleiterkoerpern |
-
1968
- 1968-10-04 DE DE19681801187 patent/DE1801187B1/de active Pending
-
1969
- 1969-09-01 NL NL6913337A patent/NL6913337A/xx unknown
- 1969-09-30 US US862242A patent/US3604694A/en not_active Expired - Lifetime
- 1969-10-03 FR FR6933889A patent/FR2019940A1/fr not_active Withdrawn
- 1969-10-03 SE SE13674/69A patent/SE341035B/xx unknown
- 1969-10-03 BE BE739815D patent/BE739815A/xx unknown
- 1969-10-03 GB GB48704/69A patent/GB1244069A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| FR2019940A1 (en:Method) | 1970-07-10 |
| SE341035B (en:Method) | 1971-12-13 |
| DE1801187B1 (de) | 1970-04-16 |
| GB1244069A (en) | 1971-08-25 |
| US3604694A (en) | 1971-09-14 |
| NL6913337A (en:Method) | 1970-04-07 |