BE707343A - - Google Patents

Info

Publication number
BE707343A
BE707343A BE707343DA BE707343A BE 707343 A BE707343 A BE 707343A BE 707343D A BE707343D A BE 707343DA BE 707343 A BE707343 A BE 707343A
Authority
BE
Belgium
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of BE707343A publication Critical patent/BE707343A/xx

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • H01J37/32009Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32055Arc discharge
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B13/00Oxygen; Ozone; Oxides or hydroxides in general
    • C01B13/14Methods for preparing oxides or hydroxides in general
    • C01B13/20Methods for preparing oxides or hydroxides in general by oxidation of elements in the gaseous state; by oxidation or hydrolysis of compounds in the gaseous state
    • C01B13/22Methods for preparing oxides or hydroxides in general by oxidation of elements in the gaseous state; by oxidation or hydrolysis of compounds in the gaseous state of halides or oxyhalides
    • C01B13/28Methods for preparing oxides or hydroxides in general by oxidation of elements in the gaseous state; by oxidation or hydrolysis of compounds in the gaseous state of halides or oxyhalides using a plasma or an electric discharge
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C5/00Alloys based on noble metals

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Discharge Heating (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
BE707343D 1966-12-01 1967-11-30 BE707343A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEF0050816 1966-12-01

Publications (1)

Publication Number Publication Date
BE707343A true BE707343A (de) 1968-05-30

Family

ID=7104096

Family Applications (1)

Application Number Title Priority Date Filing Date
BE707343D BE707343A (de) 1966-12-01 1967-11-30

Country Status (10)

Country Link
US (1) US3553527A (de)
JP (1) JPS5220689B1 (de)
AT (1) AT283533B (de)
BE (1) BE707343A (de)
CH (1) CH507629A (de)
DE (1) DE1533253C3 (de)
FR (1) FR1552284A (de)
GB (1) GB1212848A (de)
NL (1) NL6715376A (de)
NO (1) NO121150B (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4107096A1 (de) * 1990-06-29 1992-01-02 Pfeiffer Vakuumtechnik Einrichtung zum schutz elektrisch beheizter vakuumoefen
WO1999058744A1 (fr) * 1998-05-13 1999-11-18 Mitsubishi Denki Kabushiki Kaisha Electrode pour traitement de surface par decharge, procede de fabrication de ladite electrode et procede et dispositif de traitement de surface par decharge
CH710862B1 (de) * 1999-11-26 2016-09-15 Imerys Graphite & Carbon Switzerland Sa Verfahren zur Herstellung von Graphitpulvern mit erhöhter Schüttdichte.
NO334933B1 (no) * 2011-05-04 2014-07-14 N2 Applied As Energieffektiv prosess for å produsere nitrogenoksid
KR20130024635A (ko) * 2011-08-31 2013-03-08 엘지이노텍 주식회사 반응 용기 및 이를 포함하는 진공 열처리 장치

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1312257A (en) * 1919-08-05 Jesse c
US2468173A (en) * 1949-04-26 cotton
US3360682A (en) * 1965-10-15 1967-12-26 Giannini Scient Corp Apparatus and method for generating high-enthalpy plasma under high-pressure conditions

Also Published As

Publication number Publication date
NL6715376A (de) 1968-06-04
AT283533B (de) 1970-08-10
JPS5220689B1 (de) 1977-06-06
NO121150B (de) 1971-01-25
FR1552284A (de) 1969-01-03
DE1533253B2 (de) 1974-06-12
CH507629A (de) 1971-05-15
DE1533253A1 (de) 1969-12-11
DE1533253C3 (de) 1975-02-13
US3553527A (en) 1971-01-05
GB1212848A (en) 1970-11-18

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