BE673213A - - Google Patents

Info

Publication number
BE673213A
BE673213A BE673213A BE673213A BE673213A BE 673213 A BE673213 A BE 673213A BE 673213 A BE673213 A BE 673213A BE 673213 A BE673213 A BE 673213A BE 673213 A BE673213 A BE 673213A
Authority
BE
Belgium
Application number
BE673213A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of BE673213A publication Critical patent/BE673213A/xx

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/175—Acoustic mirrors
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
    • H03H9/0542—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a lateral arrangement

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
BE673213A 1964-12-04 1965-12-02 BE673213A (xx)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US415913A US3414832A (en) 1964-12-04 1964-12-04 Acoustically resonant device

Publications (1)

Publication Number Publication Date
BE673213A true BE673213A (xx) 1966-04-01

Family

ID=23647742

Family Applications (1)

Application Number Title Priority Date Filing Date
BE673213A BE673213A (xx) 1964-12-04 1965-12-02

Country Status (5)

Country Link
US (1) US3414832A (xx)
BE (1) BE673213A (xx)
DE (1) DE1280357B (xx)
GB (1) GB1081178A (xx)
NL (1) NL6515634A (xx)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1591677A1 (de) * 1967-05-31 1971-01-14 Telefunken Patent Mechanische Resonatoren in integrierten Halbleiterschaltungen und Verfahren zu ihrerHerstellung
US3513356A (en) * 1967-06-27 1970-05-19 Westinghouse Electric Corp Electromechanical tuning apparatus particularly for microelectronic components
US3422371A (en) * 1967-07-24 1969-01-14 Sanders Associates Inc Thin film piezoelectric oscillator
US3505542A (en) * 1968-02-28 1970-04-07 Westinghouse Electric Corp Surface wave piezoelectric resonator
US3486046A (en) * 1968-10-17 1969-12-23 Westinghouse Electric Corp Thin film piezoelectric resonator
US3792321A (en) * 1971-08-26 1974-02-12 F Seifert Piezoelectric semiconductor devices in which sound energy increases the breakdown voltage and power of capabilities
US5373268A (en) * 1993-02-01 1994-12-13 Motorola, Inc. Thin film resonator having stacked acoustic reflecting impedance matching layers and method
US5630949A (en) * 1995-06-01 1997-05-20 Tfr Technologies, Inc. Method and apparatus for fabricating a piezoelectric resonator to a resonant frequency
US5596239A (en) * 1995-06-29 1997-01-21 Motorola, Inc. Enhanced quality factor resonator
US5617065A (en) * 1995-06-29 1997-04-01 Motorola, Inc. Filter using enhanced quality factor resonator and method
US5696423A (en) * 1995-06-29 1997-12-09 Motorola, Inc. Temperature compenated resonator and method
US6107721A (en) * 1999-07-27 2000-08-22 Tfr Technologies, Inc. Piezoelectric resonators on a differentially offset reflector
DE60123709T2 (de) * 2000-02-22 2007-09-20 Koninklijke Philips Electronics N.V. Herstellungsverfahren einer hybriden integrierten schaltung mit einem halbleiterbauelement und einem piezoelektrischen filter
US6720844B1 (en) 2001-11-16 2004-04-13 Tfr Technologies, Inc. Coupled resonator bulk acoustic wave filter
JP2005124018A (ja) * 2003-10-20 2005-05-12 Tdk Corp 電子部品およびその製造方法
WO2006100457A1 (en) * 2005-03-22 2006-09-28 Aviza Technology Limited A method of forming a bragg reflector stack
WO2007146665A2 (en) * 2006-06-06 2007-12-21 Teraspeed Consulting Group, Llc Power distribution system for integrated circuits
JP5202674B2 (ja) * 2011-03-23 2013-06-05 株式会社東芝 音響半導体装置
US8841818B2 (en) * 2011-08-12 2014-09-23 Massachusetts Institute Of Technology Piezoelectric electromechanical devices
CN111575661B (zh) * 2020-04-07 2022-08-05 上海大学 提高smr器件的回波损耗和q值的方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1197510B (de) * 1963-12-14 1965-07-29 Siemens Ag Elektroakustischer Wandler auf Halbleiterbasis

Also Published As

Publication number Publication date
NL6515634A (xx) 1966-06-06
US3414832A (en) 1968-12-03
GB1081178A (en) 1967-08-31
DE1280357B (de) 1968-10-17

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