BE646087A - - Google Patents
Info
- Publication number
- BE646087A BE646087A BE646087DA BE646087A BE 646087 A BE646087 A BE 646087A BE 646087D A BE646087D A BE 646087DA BE 646087 A BE646087 A BE 646087A
- Authority
- BE
- Belgium
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
- H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/10—Lenses
- H01J37/14—Lenses magnetic
- H01J37/141—Electromagnetic lenses
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
- H01J37/15—External mechanical adjustment of electron or ion optical components
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US274878A US3191028A (en) | 1963-04-22 | 1963-04-22 | Scanning electron microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| BE646087A true BE646087A (xx) | 1964-07-31 |
Family
ID=23049974
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| BE646087D BE646087A (xx) | 1963-04-22 | 1964-04-03 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3191028A (xx) |
| BE (1) | BE646087A (xx) |
| CH (1) | CH420670A (xx) |
| DE (1) | DE1439828B2 (xx) |
| GB (1) | GB1065847A (xx) |
Families Citing this family (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1074625A (en) * | 1963-04-24 | 1967-07-05 | Ass Elect Ind | Improvements relating to magnetic spectrometers |
| GB1052542A (xx) * | 1964-01-21 | |||
| US3327114A (en) * | 1964-06-23 | 1967-06-20 | Alfred F Diorio | Low-angle x-ray diffraction camera comprising releasably connected sections and adjustable beam apertures and stops |
| US3435207A (en) * | 1966-01-06 | 1969-03-25 | Gen Electric | Apparatus for measuring velocity of low energy electrons |
| DE1564674B1 (de) * | 1966-07-27 | 1971-07-29 | Siemens AG, 1000 Berlin u 8000 Munchf | An der Pumpe arbeitendes Korpuskular strahlgerat, insbesondere Elektronenmikros kop, mit einem Ablenksystem fur den Korpus kularstrahl und einer Objektschleusenvor richtung |
| FR1553218A (xx) * | 1967-02-03 | 1969-01-10 | ||
| DE1614126B1 (de) * | 1967-02-27 | 1970-11-19 | Max Planck Gesellschaft | Korpuskularstrahlmikroskop,insbesondere Elektronenmikroskop,mit einer durch das Vorfeld einer Objektivlinse gebildeten Kondensorlinse und einer Bereichsblende |
| DE1614618B1 (de) * | 1967-09-29 | 1971-01-28 | Siemens Ag | Korpuskularstrahlgeraet,insbesondere Elektronenmikroskop,mit Mitteln zur farbigen Wiedergabe von ein zu untersuchendes Praeparat charakterisierenden Eigenschaften einer von dem Praeparat kommenden Korpuskularstrahlung |
| US3628014A (en) * | 1969-12-22 | 1971-12-14 | Boeing Co | Scanning electron microscope with color display means |
| US3626184A (en) * | 1970-03-05 | 1971-12-07 | Atomic Energy Commission | Detector system for a scanning electron microscope |
| US3678333A (en) * | 1970-06-15 | 1972-07-18 | American Optical Corp | Field emission electron gun utilizing means for protecting the field emission tip from high voltage discharges |
| CA924422A (en) * | 1970-09-17 | 1973-04-10 | V. Crewe Albert | Electron microscope |
| JPS5217392B1 (xx) * | 1970-09-18 | 1977-05-14 | ||
| DE2151167C3 (de) * | 1971-10-14 | 1974-05-09 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Elektronenstrahl-Mikroanalysator mit Auger-Elektronen-Nachweis |
| US3783281A (en) * | 1972-02-03 | 1974-01-01 | Perkin Elmer Corp | Electron microscope |
| US3931517A (en) * | 1972-02-14 | 1976-01-06 | American Optical Corporation | Field emission electron gun |
| US3931519A (en) * | 1972-02-14 | 1976-01-06 | American Optical Corporation | Field emission electron gun |
| US3925664A (en) * | 1972-02-14 | 1975-12-09 | American Optical Corp | Field emission electron gun |
| US4020387A (en) * | 1972-02-14 | 1977-04-26 | American Optical Corporation | Field emission electron gun |
| US3881125A (en) * | 1972-08-17 | 1975-04-29 | Tektronix Inc | Separable-chamber electron-beam tube including means for puncturing a pressure seal therein |
| JPS532755B2 (xx) * | 1973-08-22 | 1978-01-31 | ||
| US3932749A (en) * | 1974-03-22 | 1976-01-13 | Varian Associates | Electron gun |
| US4399360A (en) * | 1980-08-08 | 1983-08-16 | University Patents, Inc. | Transmission electron microscope employing sequential pixel acquistion for display |
| GB9302886D0 (en) * | 1993-02-12 | 1993-03-31 | Fisons Plc | Multiple-detector system for detecting charged particles |
| US8314386B2 (en) | 2010-03-26 | 2012-11-20 | Uchicago Argonne, Llc | High collection efficiency X-ray spectrometer system with integrated electron beam stop, electron detector and X-ray detector for use on electron-optical beam lines and microscopes |
| JP6124679B2 (ja) | 2013-05-15 | 2017-05-10 | 日本電子株式会社 | 走査荷電粒子顕微鏡および画像取得方法 |
| CN112228494A (zh) * | 2020-09-24 | 2021-01-15 | 中国科学院微电子研究所 | 主动减震系统及具有其的扫描电子显微镜 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3103584A (en) * | 1963-09-10 | Electron microanalyzer system | ||
| NL53538C (xx) * | 1937-02-18 | |||
| US2372422A (en) * | 1944-02-17 | 1945-03-27 | Rca Corp | Electron microanalyzer |
| US2418317A (en) * | 1944-04-27 | 1947-04-01 | Rca Corp | Electronic gun adjustment |
| US2447260A (en) * | 1945-06-21 | 1948-08-17 | Research Corp | Electron microspectroscope |
| US2444700A (en) * | 1945-10-26 | 1948-07-06 | Rca Corp | Method of operating electron guns |
| DE1064168B (de) * | 1958-06-20 | 1959-08-27 | Zeiss Carl Fa | Einrichtung zur Erzeugung und Formung eines Ladungstraegerstrahles |
-
1963
- 1963-04-22 US US274878A patent/US3191028A/en not_active Expired - Lifetime
- 1963-12-24 GB GB50928/63A patent/GB1065847A/en not_active Expired
-
1964
- 1964-02-05 DE DE19641439828 patent/DE1439828B2/de not_active Withdrawn
- 1964-02-14 CH CH175464A patent/CH420670A/de unknown
- 1964-04-03 BE BE646087D patent/BE646087A/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| CH420670A (de) | 1966-09-15 |
| US3191028A (en) | 1965-06-22 |
| DE1439828A1 (de) | 1969-01-30 |
| GB1065847A (en) | 1967-04-19 |
| DE1439828B2 (de) | 1973-04-19 |