BE636666A - - Google Patents
Info
- Publication number
- BE636666A BE636666A BE636666A BE636666A BE636666A BE 636666 A BE636666 A BE 636666A BE 636666 A BE636666 A BE 636666A BE 636666 A BE636666 A BE 636666A BE 636666 A BE636666 A BE 636666A
- Authority
- BE
- Belgium
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
- Sampling And Sample Adjustment (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL282644A NL282644A (en:Method) | 1962-08-29 | 1962-08-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| BE636666A true BE636666A (en:Method) | 1964-02-27 |
Family
ID=19754071
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| BE636666A BE636666A (en:Method) | 1962-08-29 | 1963-08-27 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US3218457A (en:Method) |
| BE (1) | BE636666A (en:Method) |
| CH (1) | CH401286A (en:Method) |
| DK (1) | DK106237C (en:Method) |
| GB (1) | GB981447A (en:Method) |
| NL (1) | NL282644A (en:Method) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1238889A (en:Method) * | 1968-11-26 | 1971-07-14 | ||
| JPS55165628A (en) * | 1979-06-12 | 1980-12-24 | Fujitsu Ltd | Apparatus for electron-beam irradiation |
| JPS58161235A (ja) * | 1982-03-19 | 1983-09-24 | Internatl Precision Inc | 走査型電子線装置 |
| JPS58169762A (ja) * | 1982-03-30 | 1983-10-06 | Internatl Precision Inc | 電子線装置 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BE566571A (en:Method) * | 1957-04-09 | |||
| US2953970A (en) * | 1957-09-26 | 1960-09-27 | Indiana General Corp | Mount for optical system component |
-
1962
- 1962-08-29 NL NL282644A patent/NL282644A/xx unknown
-
1963
- 1963-07-30 US US298764A patent/US3218457A/en not_active Expired - Lifetime
- 1963-08-26 CH CH1052363A patent/CH401286A/de unknown
- 1963-08-26 DK DK405763AA patent/DK106237C/da active
- 1963-08-26 GB GB33693/63A patent/GB981447A/en not_active Expired
- 1963-08-27 BE BE636666A patent/BE636666A/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| GB981447A (en) | 1965-01-27 |
| DK106237C (da) | 1967-01-09 |
| US3218457A (en) | 1965-11-16 |
| CH401286A (de) | 1965-10-31 |
| NL282644A (en:Method) | 1964-12-28 |