BE636666A - - Google Patents

Info

Publication number
BE636666A
BE636666A BE636666A BE636666A BE636666A BE 636666 A BE636666 A BE 636666A BE 636666 A BE636666 A BE 636666A BE 636666 A BE636666 A BE 636666A BE 636666 A BE636666 A BE 636666A
Authority
BE
Belgium
Application number
BE636666A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of BE636666A publication Critical patent/BE636666A/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Sampling And Sample Adjustment (AREA)
BE636666A 1962-08-29 1963-08-27 BE636666A (enrdf_load_html_response)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL282644A NL282644A (enrdf_load_html_response) 1962-08-29 1962-08-29

Publications (1)

Publication Number Publication Date
BE636666A true BE636666A (enrdf_load_html_response) 1964-02-27

Family

ID=19754071

Family Applications (1)

Application Number Title Priority Date Filing Date
BE636666A BE636666A (enrdf_load_html_response) 1962-08-29 1963-08-27

Country Status (6)

Country Link
US (1) US3218457A (enrdf_load_html_response)
BE (1) BE636666A (enrdf_load_html_response)
CH (1) CH401286A (enrdf_load_html_response)
DK (1) DK106237C (enrdf_load_html_response)
GB (1) GB981447A (enrdf_load_html_response)
NL (1) NL282644A (enrdf_load_html_response)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1238889A (enrdf_load_html_response) * 1968-11-26 1971-07-14
JPS55165628A (en) * 1979-06-12 1980-12-24 Fujitsu Ltd Apparatus for electron-beam irradiation
JPS58161235A (ja) * 1982-03-19 1983-09-24 Internatl Precision Inc 走査型電子線装置
JPS58169762A (ja) * 1982-03-30 1983-10-06 Internatl Precision Inc 電子線装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL92826C (enrdf_load_html_response) * 1957-04-09
US2953970A (en) * 1957-09-26 1960-09-27 Indiana General Corp Mount for optical system component

Also Published As

Publication number Publication date
DK106237C (da) 1967-01-09
GB981447A (en) 1965-01-27
US3218457A (en) 1965-11-16
NL282644A (enrdf_load_html_response) 1964-12-28
CH401286A (de) 1965-10-31

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