BE634472A - - Google Patents

Info

Publication number
BE634472A
BE634472A BE634472DA BE634472A BE 634472 A BE634472 A BE 634472A BE 634472D A BE634472D A BE 634472DA BE 634472 A BE634472 A BE 634472A
Authority
BE
Belgium
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Publication date
Publication of BE634472A publication Critical patent/BE634472A/xx

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
BE634472D 1962-07-05 BE634472A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US207680A US3150256A (en) 1962-07-05 1962-07-05 Column for electron microscopes

Publications (1)

Publication Number Publication Date
BE634472A true BE634472A (zh) 1964-01-03

Family

ID=22771559

Family Applications (1)

Application Number Title Priority Date Filing Date
BE634472D BE634472A (zh) 1962-07-05

Country Status (7)

Country Link
US (1) US3150256A (zh)
BE (1) BE634472A (zh)
CH (1) CH413146A (zh)
DE (1) DE1464352B2 (zh)
GB (1) GB1049327A (zh)
NL (1) NL294725A (zh)
SE (1) SE320444B (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3299308A (en) * 1963-07-19 1967-01-17 Temescal Metallurgical Corp Electron beam traverse of narrow aperture in barrier separating regions of differentpressure
US3345529A (en) * 1966-08-29 1967-10-03 Ibm Electron beam column with demountable flux-generating assembly and beam-forming elements
DE3328172A1 (de) * 1983-08-04 1985-02-14 Leybold-Heraeus GmbH, 5000 Köln Elektronenstrahlkanone

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE904096C (de) * 1940-10-09 1954-02-15 Siemens Ag Korpuskularstrahlmikroskop
DE926266C (de) * 1948-10-02 1955-04-14 Manfred Von Ardenne Elektronenmikroskop mit quer zur Strahlrichtung auswechselbarem Polschuheinsatzkoerper
DE903017C (de) * 1951-01-31 1954-02-01 Sueddeutsche Lab G M B H Herstellung kleiner Kugeln aus hochschmelzbaren Materialien
CH332306A (de) * 1955-05-10 1958-08-31 Ardenne Manfred Von Polarisationsladungsfreie Blende für Elektronen- und Ionengeräte

Also Published As

Publication number Publication date
SE320444B (zh) 1970-02-09
GB1049327A (en) 1966-11-23
DE1464352A1 (de) 1969-03-13
US3150256A (en) 1964-09-22
DE1464352B2 (de) 1972-04-06
CH413146A (de) 1966-05-15
NL294725A (zh)

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