BE620524A - - Google Patents

Info

Publication number
BE620524A
BE620524A BE620524DA BE620524A BE 620524 A BE620524 A BE 620524A BE 620524D A BE620524D A BE 620524DA BE 620524 A BE620524 A BE 620524A
Authority
BE
Belgium
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Publication of BE620524A publication Critical patent/BE620524A/xx

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956Inspecting patterns on the surface of objects
    • G01N21/95607Inspecting patterns on the surface of objects using a comparative method
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/0004Microscopes specially adapted for specific applications
    • G02B21/0016Technical microscopes, e.g. for inspection or measuring in industrial production processes

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Optics & Photonics (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Eye Examination Apparatus (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
BE620524D 1961-08-09 BE620524A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DES0075240 1961-08-09

Publications (1)

Publication Number Publication Date
BE620524A true BE620524A (fr)

Family

ID=7505228

Family Applications (1)

Application Number Title Priority Date Filing Date
BE620524D BE620524A (fr) 1961-08-09

Country Status (4)

Country Link
BE (1) BE620524A (fr)
CH (1) CH406655A (fr)
FR (1) FR1329272A (fr)
GB (1) GB971276A (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1583692A (fr) * 1968-02-16 1969-11-28
US3744917A (en) * 1971-05-14 1973-07-10 Symbionics Inc Optical comparison device using an optical diffuser

Also Published As

Publication number Publication date
DE1423598A1 (de) 1969-01-30
GB971276A (en) 1964-09-30
FR1329272A (fr) 1963-06-07
DE1423598B2 (de) 1971-08-12
CH406655A (de) 1966-01-31

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