CH406655A - Vergleichsvorrichtung - Google Patents

Vergleichsvorrichtung

Info

Publication number
CH406655A
CH406655A CH824562A CH824562A CH406655A CH 406655 A CH406655 A CH 406655A CH 824562 A CH824562 A CH 824562A CH 824562 A CH824562 A CH 824562A CH 406655 A CH406655 A CH 406655A
Authority
CH
Switzerland
Prior art keywords
comparison device
comparison
Prior art date
Application number
CH824562A
Other languages
English (en)
Inventor
Sick Erwin
Original Assignee
Sick Erwin
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sick Erwin filed Critical Sick Erwin
Publication of CH406655A publication Critical patent/CH406655A/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95607—Inspecting patterns on the surface of objects using a comparative method
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/0016—Technical microscopes, e.g. for inspection or measuring in industrial production processes
CH824562A 1961-08-09 1962-07-11 Vergleichsvorrichtung CH406655A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DES0075240 1961-08-09

Publications (1)

Publication Number Publication Date
CH406655A true CH406655A (de) 1966-01-31

Family

ID=7505228

Family Applications (1)

Application Number Title Priority Date Filing Date
CH824562A CH406655A (de) 1961-08-09 1962-07-11 Vergleichsvorrichtung

Country Status (4)

Country Link
BE (1) BE620524A (de)
CH (1) CH406655A (de)
FR (1) FR1329272A (de)
GB (1) GB971276A (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1583692A (de) * 1968-02-16 1969-11-28
US3744917A (en) * 1971-05-14 1973-07-10 Symbionics Inc Optical comparison device using an optical diffuser

Also Published As

Publication number Publication date
GB971276A (en) 1964-09-30
DE1423598B2 (de) 1971-08-12
FR1329272A (fr) 1963-06-07
BE620524A (de)
DE1423598A1 (de) 1969-01-30

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