BE439010A - - Google Patents
Info
- Publication number
- BE439010A BE439010A BE439010DA BE439010A BE 439010 A BE439010 A BE 439010A BE 439010D A BE439010D A BE 439010DA BE 439010 A BE439010 A BE 439010A
- Authority
- BE
- Belgium
- Prior art keywords
- bands
- light
- layer
- field
- measured
- Prior art date
Links
- 238000000034 method Methods 0.000 claims description 23
- 238000001228 spectrum Methods 0.000 claims description 19
- 238000005259 measurement Methods 0.000 claims description 15
- 230000003595 spectral effect Effects 0.000 claims description 7
- 238000005286 illumination Methods 0.000 claims description 6
- 230000003287 optical effect Effects 0.000 claims description 5
- 239000003086 colorant Substances 0.000 claims description 2
- 239000000203 mixture Substances 0.000 claims description 2
- 238000000354 decomposition reaction Methods 0.000 claims 1
- 230000007547 defect Effects 0.000 description 4
- 230000008033 biological extinction Effects 0.000 description 3
- 101100098973 Mus musculus Cct5 gene Proteins 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000010183 spectrum analysis Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0675—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating using interferometry
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Publications (1)
Publication Number | Publication Date |
---|---|
BE439010A true BE439010A (en, 2012) |
Family
ID=97097
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
BE439010D BE439010A (en, 2012) |
Country Status (1)
Country | Link |
---|---|
BE (1) | BE439010A (en, 2012) |
-
0
- BE BE439010D patent/BE439010A/fr unknown
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP4042098B1 (fr) | Dispositif et procede de mesures d'imagerie et d'interferometrie | |
JP4880791B2 (ja) | 試料の偏光計スペクトルおよび他の特性を測定するシステム | |
JP2788158B2 (ja) | 薄膜の厚さを測定する装置 | |
JP4237175B2 (ja) | 白色光干渉計を用いた透明薄膜の厚さ及び形状の測定装置及び方法 | |
US20120140235A1 (en) | Method for measuring the film element using optical multi-wavelength interferometry | |
JPH0771925A (ja) | 厚いウェハ測定用の装置および方法 | |
FR2537428A1 (fr) | Procede et dispositif pour produire une image du fond de l'oeil | |
JPH0666524A (ja) | 変形した形状及び部分的に変化した傾斜を有する薄膜層上の薄膜層の厚みを計測学的に処理するための装置及びその方法 | |
JPH01308930A (ja) | 顕微分光装置 | |
FR2760085A1 (fr) | Dispositif et procede de mesures tridimensionnelles et d'observation in situ d'une couche superficielle deposee sur un empilement de couches minces | |
WO2022058236A1 (fr) | Dispositif et procédé de mesure d'interfaces d'un élément optique | |
FR2605100A1 (fr) | Dispositif optique d'eclairement d'un echantillon pour un ellipsometre spectroscopique a haute resolution laterale | |
FR2595471A1 (fr) | Dispositif d'ellipsometrie spectroscopique a fibres optiques | |
JP3694298B2 (ja) | 表面測定装置及びその測定方法 | |
BE439010A (en, 2012) | ||
EP0502752A1 (fr) | Appareil de spectrométrie | |
US20240280357A1 (en) | Method and apparatus for micromachining a sample using a focused ion beam | |
CN217520426U (zh) | 一种红外宽波段可调谐泰曼-格林干涉仪 | |
JP3219462B2 (ja) | 薄膜測定器 | |
EP2391875B1 (fr) | Procede de mesure et procede de visualisation d'une surface d'onde par spectrophotometrie | |
EP0083268B1 (fr) | Procédé de réglage automatique de la netteté d'images projetées sur un écran et dispositifs pour la mise en oeuvre dudit procédé | |
JPH1123216A (ja) | 透明薄板測定用干渉計 | |
JPH08313206A (ja) | 斜入射干渉計装置 | |
Thomas | Low-scatter, low-loss mirrors for laser gyros | |
CN119935504A (zh) | 一种基于弱相干光源干涉的镜片分析方法及装置 |