H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/32—Gas-filled discharge tubes
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Physics & Mathematics
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Engineering & Computer Science
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Plasma & Fusion
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Chemical & Material Sciences
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Analytical Chemistry
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Food Preservation Except Freezing, Refrigeration, And Drying
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