BE343493A - - Google Patents
Info
- Publication number
- BE343493A BE343493A BE343493DA BE343493A BE 343493 A BE343493 A BE 343493A BE 343493D A BE343493D A BE 343493DA BE 343493 A BE343493 A BE 343493A
- Authority
- BE
- Belgium
- Prior art keywords
- irradiation chamber
- light bulb
- bulb
- lamp
- desc
- Prior art date
Links
- 239000007788 liquid Substances 0.000 claims 2
- 238000010926 purge Methods 0.000 claims 1
- 239000000126 substance Substances 0.000 description 8
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 5
- 239000002826 coolant Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910001651 emery Inorganic materials 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Publications (1)
| Publication Number | Publication Date |
|---|---|
| BE343493A true BE343493A (enrdf_load_stackoverflow) |
Family
ID=19791
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| BE343493D BE343493A (enrdf_load_stackoverflow) |
Country Status (1)
| Country | Link |
|---|---|
| BE (1) | BE343493A (enrdf_load_stackoverflow) |
-
0
- BE BE343493D patent/BE343493A/fr unknown
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