AU7934998A - Accommodation case and aligner - Google Patents

Accommodation case and aligner

Info

Publication number
AU7934998A
AU7934998A AU79349/98A AU7934998A AU7934998A AU 7934998 A AU7934998 A AU 7934998A AU 79349/98 A AU79349/98 A AU 79349/98A AU 7934998 A AU7934998 A AU 7934998A AU 7934998 A AU7934998 A AU 7934998A
Authority
AU
Australia
Prior art keywords
aligner
accommodation case
accommodation
case
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU79349/98A
Inventor
Kanefumi Nakahara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Publication of AU7934998A publication Critical patent/AU7934998A/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67353—Closed carriers specially adapted for a single substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67359—Closed carriers specially adapted for containing masks, reticles or pellicles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67373—Closed carriers characterised by locking systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67386—Closed carriers characterised by the construction of the closed carrier

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
AU79349/98A 1997-07-07 1998-06-29 Accommodation case and aligner Abandoned AU7934998A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP9-180843 1997-07-07
JP18084397 1997-07-07
PCT/JP1998/002896 WO1999003139A1 (en) 1997-07-07 1998-06-29 Accommodation case and aligner

Publications (1)

Publication Number Publication Date
AU7934998A true AU7934998A (en) 1999-02-08

Family

ID=16090336

Family Applications (1)

Application Number Title Priority Date Filing Date
AU79349/98A Abandoned AU7934998A (en) 1997-07-07 1998-06-29 Accommodation case and aligner

Country Status (3)

Country Link
AU (1) AU7934998A (en)
TW (1) TW408386B (en)
WO (1) WO1999003139A1 (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6619903B2 (en) * 2001-08-10 2003-09-16 Glenn M. Friedman System and method for reticle protection and transport
JP2003092338A (en) * 2001-09-18 2003-03-28 Nec Corp Detector for semiconductor wafer housing state
JP5387926B2 (en) * 2011-09-27 2014-01-15 村田機械株式会社 Plate-like body detection device, case port and storage device
JPWO2015001907A1 (en) * 2013-07-03 2017-02-23 村田機械株式会社 Transport system
KR101742172B1 (en) * 2013-07-03 2017-05-31 무라다기카이가부시끼가이샤 Storage container
KR20170086637A (en) 2014-11-26 2017-07-26 폰 아르데네 게엠베하 Substrate holding device, substrate transport device, processing arrangement and method for processing a substrate
JP2017041490A (en) * 2015-08-18 2017-02-23 株式会社テックインテック Conveyance device and control method
JP6955988B2 (en) * 2017-12-11 2021-10-27 株式会社日立製作所 Power converter unit and power converter
CN113264286A (en) * 2021-06-01 2021-08-17 长鑫存储技术有限公司 Photomask protection box and photomask conveying equipment

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03257845A (en) * 1990-03-07 1991-11-18 Matsushita Electric Ind Co Ltd Substrate storing device
JPH03270049A (en) * 1990-03-19 1991-12-02 Fujitsu Ltd Substrate container
JPH0475063A (en) * 1990-07-18 1992-03-10 Canon Inc Aligner
JPH0513052U (en) * 1991-07-29 1993-02-19 山形日本電気株式会社 Semiconductor wafer storage case

Also Published As

Publication number Publication date
TW408386B (en) 2000-10-11
WO1999003139A1 (en) 1999-01-21

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase