AU776095B2 - Electron beam shielding apparatus and methods for shielding electron beams - Google Patents

Electron beam shielding apparatus and methods for shielding electron beams Download PDF

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Publication number
AU776095B2
AU776095B2 AU63500/00A AU6350000A AU776095B2 AU 776095 B2 AU776095 B2 AU 776095B2 AU 63500/00 A AU63500/00 A AU 63500/00A AU 6350000 A AU6350000 A AU 6350000A AU 776095 B2 AU776095 B2 AU 776095B2
Authority
AU
Australia
Prior art keywords
electron beam
barrier
electron
guns
vacuum chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
AU63500/00A
Other languages
English (en)
Other versions
AU6350000A (en
Inventor
Ingo A. Grosse
Leonard C. II Hainz
Mark Hall
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ATI Properties LLC
Original Assignee
ATI Properties LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ATI Properties LLC filed Critical ATI Properties LLC
Publication of AU6350000A publication Critical patent/AU6350000A/en
Application granted granted Critical
Publication of AU776095B2 publication Critical patent/AU776095B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H01J37/3053Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/09Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Furnace Details (AREA)
AU63500/00A 1999-07-15 2000-07-14 Electron beam shielding apparatus and methods for shielding electron beams Ceased AU776095B2 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/354,286 US6175585B1 (en) 1999-07-15 1999-07-15 Electron beam shielding apparatus and methods for shielding electron beams
US09/354286 1999-07-16
PCT/US2000/019410 WO2001006537A1 (en) 1999-07-15 2000-07-14 Electron beam shielding apparatus and methods for shielding electron beams

Publications (2)

Publication Number Publication Date
AU6350000A AU6350000A (en) 2001-02-05
AU776095B2 true AU776095B2 (en) 2004-08-26

Family

ID=23392634

Family Applications (1)

Application Number Title Priority Date Filing Date
AU63500/00A Ceased AU776095B2 (en) 1999-07-15 2000-07-14 Electron beam shielding apparatus and methods for shielding electron beams

Country Status (6)

Country Link
US (1) US6175585B1 (enExample)
EP (1) EP1204984A4 (enExample)
JP (1) JP2003532856A (enExample)
AU (1) AU776095B2 (enExample)
CA (1) CA2379913A1 (enExample)
WO (1) WO2001006537A1 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6496529B1 (en) * 2000-11-15 2002-12-17 Ati Properties, Inc. Refining and casting apparatus and method
US8891583B2 (en) 2000-11-15 2014-11-18 Ati Properties, Inc. Refining and casting apparatus and method
US7205329B2 (en) 2003-05-30 2007-04-17 Microbia, Inc. Modulators of CRTH2 activity
ES2608863T3 (es) 2007-03-30 2017-04-17 Ati Properties Llc Horno de fusión que incluye un emisor de electrones de plasma iónico por descarga de hilo
US8748773B2 (en) * 2007-03-30 2014-06-10 Ati Properties, Inc. Ion plasma electron emitters for a melting furnace
JP7697950B2 (ja) * 2019-12-17 2025-06-24 チタニウム メタルズ コーポレーション 溶融炉用モジュラーガンアセンブリ

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3303320A (en) * 1962-09-25 1967-02-07 Heraeus Gmbh W C Vapor-coating apparatus
US3343828A (en) * 1962-03-30 1967-09-26 Air Reduction High vacuum furnace
US5034590A (en) * 1989-08-02 1991-07-23 Anelva Corporation Electron gun arrangement for use in the electron beam evaporation process

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB915657A (en) * 1960-08-22 1963-01-16 Ass Elect Ind Improvements relating to electron beam furnaces
US4027722A (en) 1963-02-01 1977-06-07 Airco, Inc. Electron beam furnace
US3857014A (en) 1971-08-25 1974-12-24 A Khotina Electron beam generator
JPS5611551B2 (enExample) * 1973-04-05 1981-03-14
US5263689A (en) 1983-06-23 1993-11-23 General Electric Company Apparatus for making alloy power
USRE32932E (en) 1987-03-06 1989-05-30 A Johnson Metals Corporation Cold hearth refining
US4932635A (en) 1988-07-11 1990-06-12 Axel Johnson Metals, Inc. Cold hearth refining apparatus
JPH03191290A (ja) * 1989-12-20 1991-08-21 Jeol Ltd 真空溶解装置
US5100463A (en) * 1990-07-19 1992-03-31 Axel Johnson Metals, Inc. Method of operating an electron beam furnace
US5291940A (en) 1991-09-13 1994-03-08 Axel Johnson Metals, Inc. Static vacuum casting of ingots
US5171357A (en) * 1991-12-16 1992-12-15 Axel Johnson Metals, Inc. Vacuum processing of particulate reactive metal
US5216690A (en) 1992-03-11 1993-06-01 Hanks Charles W Electron beam gun with grounded shield to prevent arc down

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3343828A (en) * 1962-03-30 1967-09-26 Air Reduction High vacuum furnace
US3303320A (en) * 1962-09-25 1967-02-07 Heraeus Gmbh W C Vapor-coating apparatus
US5034590A (en) * 1989-08-02 1991-07-23 Anelva Corporation Electron gun arrangement for use in the electron beam evaporation process

Also Published As

Publication number Publication date
AU6350000A (en) 2001-02-05
CA2379913A1 (en) 2001-01-25
US6175585B1 (en) 2001-01-16
EP1204984A1 (en) 2002-05-15
JP2003532856A (ja) 2003-11-05
WO2001006537A1 (en) 2001-01-25
EP1204984A4 (en) 2002-10-23

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