AU5883001A - Harm-removing agent and method for rendering halogen-containing gas harmless anduses thereof - Google Patents

Harm-removing agent and method for rendering halogen-containing gas harmless anduses thereof

Info

Publication number
AU5883001A
AU5883001A AU58830/01A AU5883001A AU5883001A AU 5883001 A AU5883001 A AU 5883001A AU 58830/01 A AU58830/01 A AU 58830/01A AU 5883001 A AU5883001 A AU 5883001A AU 5883001 A AU5883001 A AU 5883001A
Authority
AU
Australia
Prior art keywords
anduses
harm
containing gas
removing agent
gas harmless
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU58830/01A
Other languages
English (en)
Inventor
Hitoshi Atobe
Yoshio Furuse
Yuji Hayasaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Resonac Holdings Corp
Original Assignee
Showa Denko KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2000156236A external-priority patent/JP3840877B2/ja
Application filed by Showa Denko KK filed Critical Showa Denko KK
Publication of AU5883001A publication Critical patent/AU5883001A/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B01D53/685—Halogens or halogen compounds by treating the gases with solids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/86—Catalytic processes
    • B01D53/8659—Removing halogens or halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J21/00—Catalysts comprising the elements, oxides, or hydroxides of magnesium, boron, aluminium, carbon, silicon, titanium, zirconium, or hafnium
    • B01J21/18—Carbon
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J23/00—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
    • B01J23/70—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper
    • B01J23/76—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper combined with metals, oxides or hydroxides provided for in groups B01J23/02 - B01J23/36
    • B01J23/78—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper combined with metals, oxides or hydroxides provided for in groups B01J23/02 - B01J23/36 with alkali- or alkaline earth metals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
    • B01D2253/102—Carbon
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
    • B01D2253/106—Silica or silicates
    • B01D2253/108—Zeolites
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
    • B01D2253/112—Metals or metal compounds not provided for in B01D2253/104 or B01D2253/106
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/30—Physical properties of adsorbents
    • B01D2253/302—Dimensions
    • B01D2253/304—Linear dimensions, e.g. particle shape, diameter
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/30—Physical properties of adsorbents
    • B01D2253/302—Dimensions
    • B01D2253/306—Surface area, e.g. BET-specific surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2255/00—Catalysts
    • B01D2255/20—Metals or compounds thereof
    • B01D2255/207—Transition metals
    • B01D2255/20738—Iron
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Analytical Chemistry (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Treating Waste Gases (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
AU58830/01A 2000-05-26 2001-05-24 Harm-removing agent and method for rendering halogen-containing gas harmless anduses thereof Abandoned AU5883001A (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2000156236A JP3840877B2 (ja) 2000-05-26 2000-05-26 ハロゲン系ガスの除害剤、除害方法及びその用途
JP2000-156236 2000-05-26
US21651600P 2000-07-06 2000-07-06
US60216516 2000-07-06
PCT/JP2001/004364 WO2001089666A1 (en) 2000-05-26 2001-05-24 Composition and method for rendering halogen-containing gas harmless

Publications (1)

Publication Number Publication Date
AU5883001A true AU5883001A (en) 2001-12-03

Family

ID=26592690

Family Applications (1)

Application Number Title Priority Date Filing Date
AU58830/01A Abandoned AU5883001A (en) 2000-05-26 2001-05-24 Harm-removing agent and method for rendering halogen-containing gas harmless anduses thereof

Country Status (4)

Country Link
KR (1) KR100481584B1 (zh)
CN (1) CN1241672C (zh)
AU (1) AU5883001A (zh)
WO (1) WO2001089666A1 (zh)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1440724B1 (en) 2001-10-12 2009-05-13 Asahi Glass Company Ltd. Method for removing halogen containing gas
DE10210786A1 (de) * 2002-03-12 2003-10-02 Bayer Ag Mischungen aus Adsorbermaterialien
JP3871127B2 (ja) 2002-11-29 2007-01-24 関東電化工業株式会社 ベントガスの除害方法及びその処理剤
BRPI0518980A2 (pt) * 2004-12-15 2008-12-16 Sintokogio Ltd sistema e mÉtodo de tratamento de gÁs de escapamento
JP4212106B2 (ja) * 2005-04-19 2009-01-21 オルガノ株式会社 ガス分離装置及びガス分離方法
GB0520468D0 (en) 2005-10-07 2005-11-16 Boc Group Plc Fluorine abatement
KR100772022B1 (ko) * 2006-02-28 2007-10-31 고등기술연구원연구조합 아산화질소 제거용 천연제올라이트 담지체 촉매 및 그제조방법과 그 촉매를 이용한 아산화질소 제거방법
CN101269293B (zh) * 2007-03-20 2012-02-01 财团法人工业技术研究院 用于处理腐蚀性气体的净化剂及其净化方法
KR101097394B1 (ko) * 2009-07-29 2011-12-23 코아텍주식회사 산성 유해가스 제거용 정화제 및 그 제조 방법
KR101305452B1 (ko) 2011-01-07 2013-09-06 주식회사 코캣 배기가스 흡착제 및 이를 이용한 배기가스 처리방법
KR101533623B1 (ko) * 2013-06-13 2015-07-24 에코위자드 (주) 반도체 제조 설비에서 배출되는 유독가스 처리 시스템 및 유독 가스 처리방법
CN106098525B (zh) * 2016-07-06 2018-01-30 武汉华星光电技术有限公司 干蚀刻设备
JP6975537B2 (ja) * 2017-02-07 2021-12-01 クラリアント触媒株式会社 ハロゲンガスの除去剤、その製造方法、それを用いたハロゲンガス除去方法、及びハロゲンガスを除去するシステム

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06104183B2 (ja) * 1989-06-09 1994-12-21 三井・デュポンフロロケミカル株式会社 塩弗化アルカンの接触分解方法
JPH04110035A (ja) * 1990-08-30 1992-04-10 Yajima Takehiko 汚染物質の吸着及び分解処理剤並びにその製造方法
JPH04156919A (ja) * 1990-10-19 1992-05-29 Ebara Res Co Ltd ハロゲン系化合物を含有する排ガスの処理方法
JPH07308538A (ja) * 1994-03-24 1995-11-28 Japan Pionics Co Ltd 有害ガスの浄化剤
EP0702078B1 (en) * 1994-09-14 2001-12-05 Toda Kogyo Corporation Method of incinerating combustible wastes and chlorine scavenger
US5755977A (en) * 1996-07-03 1998-05-26 Drexel University Continuous catalytic oxidation process
EP1066873A1 (en) * 1999-07-09 2001-01-10 Toda Kogyo Corporation Process and composition for treating dioxin-containing exhaust gas

Also Published As

Publication number Publication date
WO2001089666A8 (en) 2002-03-14
KR20020026548A (ko) 2002-04-10
WO2001089666A1 (en) 2001-11-29
CN1372488A (zh) 2002-10-02
KR100481584B1 (ko) 2005-04-08
CN1241672C (zh) 2006-02-15

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase