AU574431B2 - Proton milling as a form of plating mask - Google Patents

Proton milling as a form of plating mask

Info

Publication number
AU574431B2
AU574431B2 AU38899/85A AU3889985A AU574431B2 AU 574431 B2 AU574431 B2 AU 574431B2 AU 38899/85 A AU38899/85 A AU 38899/85A AU 3889985 A AU3889985 A AU 3889985A AU 574431 B2 AU574431 B2 AU 574431B2
Authority
AU
Australia
Prior art keywords
layer
coating
substrate
aluminum
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
AU38899/85A
Other languages
English (en)
Other versions
AU3889985A (en
Inventor
Ronald C. Gonsiorawski
Douglas A. Yates
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Schott Solar CSP Inc
Original Assignee
Mobil Solar Energy Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US06/681,001 external-priority patent/US4612698A/en
Application filed by Mobil Solar Energy Corp filed Critical Mobil Solar Energy Corp
Publication of AU3889985A publication Critical patent/AU3889985A/en
Application granted granted Critical
Publication of AU574431B2 publication Critical patent/AU574431B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00—Manufacture or treatment of devices covered by this subclass
    • H10F71/121—The active layers comprising only Group IV materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F10/00—Individual photovoltaic cells, e.g. solar cells
    • H10F10/10—Individual photovoltaic cells, e.g. solar cells having potential barriers
    • H10F10/14—Photovoltaic cells having only PN homojunction potential barriers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/20—Electrodes
    • H10F77/206—Electrodes for devices having potential barriers
    • H10F77/211—Electrodes for devices having potential barriers for photovoltaic cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/547—Monocrystalline silicon PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Photovoltaic Devices (AREA)
  • Chemically Coating (AREA)
  • Electroplating And Plating Baths Therefor (AREA)
  • Electroplating Methods And Accessories (AREA)
AU38899/85A 1983-12-19 1984-12-14 Proton milling as a form of plating mask Ceased AU574431B2 (en)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US56329283A 1983-12-19 1983-12-19
US563292 1983-12-19
US66697284A 1984-10-31 1984-10-31
US666972 1984-10-31
US681001 1984-12-13
US06/681,001 US4612698A (en) 1984-10-31 1984-12-13 Method of fabricating solar cells

Publications (2)

Publication Number Publication Date
AU3889985A AU3889985A (en) 1985-07-12
AU574431B2 true AU574431B2 (en) 1988-07-07

Family

ID=27415916

Family Applications (1)

Application Number Title Priority Date Filing Date
AU38899/85A Ceased AU574431B2 (en) 1983-12-19 1984-12-14 Proton milling as a form of plating mask

Country Status (8)

Country Link
EP (1) EP0168431A4 (enExample)
AU (1) AU574431B2 (enExample)
CH (1) CH670335A5 (enExample)
DE (1) DE3490600T1 (enExample)
GB (1) GB2160360B (enExample)
NL (1) NL8420336A (enExample)
SE (1) SE456625B (enExample)
WO (1) WO1985002942A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU589621B2 (en) * 1985-05-13 1989-10-19 Mobil Solar Energy Corporation Method of fabricating solar cells

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3490612T1 (de) * 1983-12-19 1985-11-28 Mobil Solar Energy Corp., Waltham, Mass. Verfahren zur Herstellung von Solarzellen
GB2183090B (en) * 1985-10-07 1989-09-13 Canon Kk Method for selective formation of deposited film
EP1895545B1 (en) 2006-08-31 2014-04-23 Semiconductor Energy Laboratory Co., Ltd. Liquid crystal display device

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3805376A (en) * 1971-12-02 1974-04-23 Bell Telephone Labor Inc Beam-lead electroluminescent diodes and method of manufacture
AU519116B2 (en) * 1978-01-18 1981-11-05 N.V. Philips Gloeilampenfabrieken Method of masking a semiconductor against proton bombardment
AU546534B2 (en) * 1981-10-27 1985-09-05 Mobil Solar Energy Corp. Coating silicon with nickel by electroless-plating

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4086102A (en) * 1976-12-13 1978-04-25 King William J Inexpensive solar cell and method therefor
US4152824A (en) * 1977-12-30 1979-05-08 Mobil Tyco Solar Energy Corporation Manufacture of solar cells
US4224084A (en) * 1979-04-16 1980-09-23 Rca Corporation Method and structure for passivating a semiconductor device
US4322253A (en) * 1980-04-30 1982-03-30 Rca Corporation Method of making selective crystalline silicon regions containing entrapped hydrogen by laser treatment
DE3202484A1 (de) * 1982-01-27 1983-08-04 Bayer Ag, 5090 Leverkusen Metallisierte halbleiter und verfahren zu ihrer herstellung
DE3490612T1 (de) * 1983-12-19 1985-11-28 Mobil Solar Energy Corp., Waltham, Mass. Verfahren zur Herstellung von Solarzellen

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3805376A (en) * 1971-12-02 1974-04-23 Bell Telephone Labor Inc Beam-lead electroluminescent diodes and method of manufacture
AU519116B2 (en) * 1978-01-18 1981-11-05 N.V. Philips Gloeilampenfabrieken Method of masking a semiconductor against proton bombardment
AU546534B2 (en) * 1981-10-27 1985-09-05 Mobil Solar Energy Corp. Coating silicon with nickel by electroless-plating

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU589621B2 (en) * 1985-05-13 1989-10-19 Mobil Solar Energy Corporation Method of fabricating solar cells

Also Published As

Publication number Publication date
GB8515900D0 (en) 1985-07-24
AU3889985A (en) 1985-07-12
EP0168431A4 (en) 1989-01-19
WO1985002942A1 (en) 1985-07-04
GB2160360B (en) 1987-09-16
SE456625B (sv) 1988-10-17
CH670335A5 (enExample) 1989-05-31
EP0168431A1 (en) 1986-01-22
SE8503834D0 (sv) 1985-08-16
GB2160360A (en) 1985-12-18
DE3490600T1 (de) 1985-11-28
NL8420336A (nl) 1985-11-01
SE8503834L (sv) 1985-08-16

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