AU468335B2 - Method for obtaining an accurately determined high resistance ina resistor produced ina single crystalline substrate - Google Patents

Method for obtaining an accurately determined high resistance ina resistor produced ina single crystalline substrate

Info

Publication number
AU468335B2
AU468335B2 AU51792/73A AU5179273A AU468335B2 AU 468335 B2 AU468335 B2 AU 468335B2 AU 51792/73 A AU51792/73 A AU 51792/73A AU 5179273 A AU5179273 A AU 5179273A AU 468335 B2 AU468335 B2 AU 468335B2
Authority
AU
Australia
Prior art keywords
ina
obtaining
high resistance
accurately determined
single crystalline
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU51792/73A
Other languages
English (en)
Other versions
AU5179273A (en
Inventor
KATZNER and OLAF STEENBECK EVA
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Telefonaktiebolaget LM Ericsson AB
Original Assignee
Telefonaktiebolaget LM Ericsson AB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Telefonaktiebolaget LM Ericsson AB filed Critical Telefonaktiebolaget LM Ericsson AB
Publication of AU5179273A publication Critical patent/AU5179273A/en
Application granted granted Critical
Publication of AU468335B2 publication Critical patent/AU468335B2/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D1/00—Resistors, capacitors or inductors
    • H10D1/40—Resistors
    • H10D1/43—Resistors having PN junctions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/051—Etching
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/085—Isolated-integrated
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/136—Resistors

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
AU51792/73A 1972-02-15 1973-02-05 Method for obtaining an accurately determined high resistance ina resistor produced ina single crystalline substrate Expired AU468335B2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SESE1790/72 1972-02-15
SE01790/72A SE354143B (enExample) 1972-02-15 1972-02-15

Publications (2)

Publication Number Publication Date
AU5179273A AU5179273A (en) 1974-08-08
AU468335B2 true AU468335B2 (en) 1976-01-08

Family

ID=20258852

Family Applications (1)

Application Number Title Priority Date Filing Date
AU51792/73A Expired AU468335B2 (en) 1972-02-15 1973-02-05 Method for obtaining an accurately determined high resistance ina resistor produced ina single crystalline substrate

Country Status (6)

Country Link
US (1) US3860465A (enExample)
AU (1) AU468335B2 (enExample)
DE (1) DE2305902A1 (enExample)
FR (1) FR2172210B1 (enExample)
GB (1) GB1415785A (enExample)
SE (1) SE354143B (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3912563A (en) * 1973-06-05 1975-10-14 Matsushita Electric Industrial Co Ltd Method of making semiconductor piezoresistive strain transducer
US4092662A (en) * 1976-09-29 1978-05-30 Honeywell Inc. Sensistor apparatus
US4332070A (en) * 1977-01-19 1982-06-01 Fairchild Camera & Instrument Corp. Method for forming a headless resistor utilizing selective diffusion and special contact formation
US4191964A (en) * 1977-01-19 1980-03-04 Fairchild Camera & Instrument Corp. Headless resistor
US4297670A (en) * 1977-06-03 1981-10-27 Angstrohm Precision, Inc. Metal foil resistor
DE2908361C2 (de) * 1979-03-03 1985-05-15 Dynamit Nobel Ag, 5210 Troisdorf Verfahren zum Erhöhen des Widerstandes elektrischen Zündelementen
US4830976A (en) * 1984-10-01 1989-05-16 American Telephone And Telegraph Company, At&T Bell Laboratories Integrated circuit resistor
US4999731A (en) * 1986-08-22 1991-03-12 Northern Telecom Limited Surge protector for telecommunications systems
US5057964A (en) * 1986-12-17 1991-10-15 Northern Telecom Limited Surge protector for telecommunications terminals
US5316978A (en) * 1993-03-25 1994-05-31 Northern Telecom Limited Forming resistors for intergrated circuits
JPH10242394A (ja) * 1997-02-27 1998-09-11 Matsushita Electron Corp 半導体装置の製造方法
DE10302800A1 (de) * 2003-01-24 2004-08-12 Epcos Ag Verfahren zur Herstellung eines Bauelements

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3432920A (en) * 1966-12-01 1969-03-18 Rca Corp Semiconductor devices and methods of making them
US3764409A (en) * 1969-09-29 1973-10-09 Hitachi Ltd Method for fabricating a semiconductor component for a semiconductor circuit

Also Published As

Publication number Publication date
FR2172210A1 (enExample) 1973-09-28
US3860465A (en) 1975-01-14
AU5179273A (en) 1974-08-08
DE2305902A1 (de) 1973-08-23
SE354143B (enExample) 1973-02-26
GB1415785A (en) 1975-11-26
FR2172210B1 (enExample) 1976-11-05

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