AU4566672A - Method of epitaxially depositing ternary iii-v compounds from the liquid phase - Google Patents
Method of epitaxially depositing ternary iii-v compounds from the liquid phaseInfo
- Publication number
- AU4566672A AU4566672A AU45666/72A AU4566672A AU4566672A AU 4566672 A AU4566672 A AU 4566672A AU 45666/72 A AU45666/72 A AU 45666/72A AU 4566672 A AU4566672 A AU 4566672A AU 4566672 A AU4566672 A AU 4566672A
- Authority
- AU
- Australia
- Prior art keywords
- compounds
- liquid phase
- epitaxially depositing
- ternary iii
- depositing ternary
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 150000001875 compounds Chemical class 0.000 title 1
- 238000000151 deposition Methods 0.000 title 1
- 239000007791 liquid phase Substances 0.000 title 1
- 238000000034 method Methods 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B19/00—Liquid-phase epitaxial-layer growth
- C30B19/10—Controlling or regulating
- C30B19/106—Controlling or regulating adding crystallising material or reactants forming it in situ to the liquid
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02387—Group 13/15 materials
- H01L21/02395—Arsenides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02538—Group 13/15 materials
- H01L21/02546—Arsenides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/02623—Liquid deposition
- H01L21/02625—Liquid deposition using melted materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/02623—Liquid deposition
- H01L21/02628—Liquid deposition using solutions
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FRFR7130542 | 1971-08-23 | ||
FR7130542A FR2151171A5 (en) | 1971-08-23 | 1971-08-23 | Epitaxial gallium aluminium arsenide layer - from liquid phase soln of aluminium arsenide in gallium |
Publications (1)
Publication Number | Publication Date |
---|---|
AU4566672A true AU4566672A (en) | 1974-02-21 |
Family
ID=9082124
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU45666/72A Expired AU4566672A (en) | 1971-08-23 | 1972-08-17 | Method of epitaxially depositing ternary iii-v compounds from the liquid phase |
Country Status (6)
Country | Link |
---|---|
JP (1) | JPS4830691A (enrdf_load_stackoverflow) |
AU (1) | AU4566672A (enrdf_load_stackoverflow) |
DE (1) | DE2238664A1 (enrdf_load_stackoverflow) |
FR (1) | FR2151171A5 (enrdf_load_stackoverflow) |
IT (1) | IT964961B (enrdf_load_stackoverflow) |
NL (1) | NL7211381A (enrdf_load_stackoverflow) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2251369B1 (enrdf_load_stackoverflow) * | 1973-11-15 | 1978-02-10 | Radiotechnique Compelec | |
JPS5716487B2 (enrdf_load_stackoverflow) * | 1974-07-01 | 1982-04-05 | ||
JPS524782A (en) * | 1975-06-30 | 1977-01-14 | Matsushita Electric Ind Co Ltd | Liquid phase epitaxial growth method |
JPS52135653A (en) * | 1976-05-10 | 1977-11-12 | Hitachi Ltd | Differential amplifier |
JPS55175239U (enrdf_load_stackoverflow) * | 1979-06-04 | 1980-12-16 | ||
FR2519032A1 (fr) * | 1981-12-28 | 1983-07-01 | Benchimol Jean Louis | Procede de depot par epitaxie en phase liquide d'un compose ternaire |
JP3199110B2 (ja) | 1997-12-05 | 2001-08-13 | 松下電器産業株式会社 | 蛍光ランプ |
-
1971
- 1971-08-23 FR FR7130542A patent/FR2151171A5/fr not_active Expired
-
1972
- 1972-08-05 DE DE2238664A patent/DE2238664A1/de active Pending
- 1972-08-17 AU AU45666/72A patent/AU4566672A/en not_active Expired
- 1972-08-18 NL NL7211381A patent/NL7211381A/xx unknown
- 1972-08-19 IT IT69678/72A patent/IT964961B/it active
- 1972-08-21 JP JP47082879A patent/JPS4830691A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
JPS4830691A (enrdf_load_stackoverflow) | 1973-04-23 |
NL7211381A (enrdf_load_stackoverflow) | 1973-02-27 |
DE2238664A1 (de) | 1973-03-15 |
IT964961B (it) | 1974-01-31 |
FR2151171A5 (en) | 1973-04-13 |
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