AU4135901A - Data path design for multiple electron beam lithography system - Google Patents

Data path design for multiple electron beam lithography system

Info

Publication number
AU4135901A
AU4135901A AU41359/01A AU4135901A AU4135901A AU 4135901 A AU4135901 A AU 4135901A AU 41359/01 A AU41359/01 A AU 41359/01A AU 4135901 A AU4135901 A AU 4135901A AU 4135901 A AU4135901 A AU 4135901A
Authority
AU
Australia
Prior art keywords
electron beam
data path
lithography system
beam lithography
path design
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU41359/01A
Inventor
Daniel L. Cavan
Michael C. Matter
S. Daniel Miller
N. William Parker
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ion Diagnostics Inc
Original Assignee
Ion Diagnostics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ion Diagnostics Inc filed Critical Ion Diagnostics Inc
Priority claimed from PCT/US2000/041988 external-priority patent/WO2001035165A1/en
Publication of AU4135901A publication Critical patent/AU4135901A/en
Abandoned legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E30/00—Energy generation of nuclear origin
    • Y02E30/30—Nuclear fission reactors
AU41359/01A 1999-11-07 2000-11-07 Data path design for multiple electron beam lithography system Abandoned AU4135901A (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
USNOTGIVEN 1991-06-14
US16409399P 1999-11-07 1999-11-07
US60164093 1999-11-07
PCT/US2000/041988 WO2001035165A1 (en) 1999-11-07 2000-11-07 Data path design for multiple electron beam lithography system

Publications (1)

Publication Number Publication Date
AU4135901A true AU4135901A (en) 2001-06-06

Family

ID=22592950

Family Applications (1)

Application Number Title Priority Date Filing Date
AU41359/01A Abandoned AU4135901A (en) 1999-11-07 2000-11-07 Data path design for multiple electron beam lithography system

Country Status (1)

Country Link
AU (1) AU4135901A (en)

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase