AU3605601A - Crystal vibration device - Google Patents

Crystal vibration device

Info

Publication number
AU3605601A
AU3605601A AU36056/01A AU3605601A AU3605601A AU 3605601 A AU3605601 A AU 3605601A AU 36056/01 A AU36056/01 A AU 36056/01A AU 3605601 A AU3605601 A AU 3605601A AU 3605601 A AU3605601 A AU 3605601A
Authority
AU
Australia
Prior art keywords
film layer
electrode
oscillating plate
lead electrodes
quartz
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU36056/01A
Inventor
Susumu Hirao
Minoru Iizuka
Hiroyuki Ishihara
Akihiro Mori
Tatsuya Murakami
Yoshikiyo Ogasawara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daishinku Corp
Original Assignee
Daishinku Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daishinku Corp filed Critical Daishinku Corp
Publication of AU3605601A publication Critical patent/AU3605601A/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/0504—Holders; Supports for bulk acoustic wave devices
    • H03H9/0509—Holders; Supports for bulk acoustic wave devices consisting of adhesive elements
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/0504—Holders; Supports for bulk acoustic wave devices
    • H03H9/0514—Holders; Supports for bulk acoustic wave devices consisting of mounting pads or bumps
    • H03H9/0519—Holders; Supports for bulk acoustic wave devices consisting of mounting pads or bumps for cantilever
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
    • H03H9/131—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials consisting of a multilayered structure

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)

Abstract

A quartz oscillator device of the present invention comprises a quartz oscillating plate having two major surfaces, each of which is formed with an excitation electrode and lead electrodes drawn out of the excitation electrode, and electrode pads formed on a base, wherein the quartz oscillating plate and the electrode pads are electrically connected via a silicone-based conductive adhesive. Among the excitation electrode and the lead electrodes, at least each of the lead electrodes comprises a Cr film layer, a Au film layer, and a thin Cr film layer or a thin Ag film layer, which are laminated on the quartz oscillating plate in this order. In addition, each electrode pad comprises a metallized layer made of tungsten or molybdenum, a Ni film layer and a Au film layer, which are laminated on the base in this order; and Ni in the Ni film layer is diffused at least into a predetermined area of the Au film layer in each electrode pad where the silicone-based conductive adhesive is applied. <IMAGE>
AU36056/01A 2000-03-03 2001-03-02 Crystal vibration device Abandoned AU3605601A (en)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
JP2000-58978 2000-03-03
JP2000058978 2000-03-03
JP2000-182151 2000-06-16
JP2000182151 2000-06-16
JP2001-3068 2001-01-10
JP2001003068 2001-01-10
PCT/JP2001/001627 WO2001067600A1 (en) 2000-03-03 2001-03-02 Crystal vibration device

Publications (1)

Publication Number Publication Date
AU3605601A true AU3605601A (en) 2001-09-17

Family

ID=27342576

Family Applications (1)

Application Number Title Priority Date Filing Date
AU36056/01A Abandoned AU3605601A (en) 2000-03-03 2001-03-02 Crystal vibration device

Country Status (8)

Country Link
US (1) US6700312B2 (en)
EP (1) EP1187323B1 (en)
JP (1) JP3925199B2 (en)
CN (1) CN1168209C (en)
AT (1) ATE378732T1 (en)
AU (1) AU3605601A (en)
DE (1) DE60131343T2 (en)
WO (1) WO2001067600A1 (en)

Families Citing this family (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7518284B2 (en) * 2000-11-02 2009-04-14 Danfoss A/S Dielectric composite and a method of manufacturing a dielectric composite
US7400080B2 (en) 2002-09-20 2008-07-15 Danfoss A/S Elastomer actuator and a method of making an actuator
US7548015B2 (en) 2000-11-02 2009-06-16 Danfoss A/S Multilayer composite and a method of making such
US8181338B2 (en) * 2000-11-02 2012-05-22 Danfoss A/S Method of making a multilayer composite
US20020074897A1 (en) * 2000-12-15 2002-06-20 Qing Ma Micro-electromechanical structure resonator frequency adjustment using radient energy trimming and laser/focused ion beam assisted deposition
EP1466149B1 (en) 2001-12-21 2008-01-23 Danfoss A/S Dielectric actuator or sensor structure and method of making it
JP4060090B2 (en) * 2002-02-15 2008-03-12 沖電気工業株式会社 Surface acoustic wave device
JP2004037181A (en) * 2002-07-02 2004-02-05 Hitachi Maxell Ltd Vibration sensor
ATE398988T1 (en) * 2003-02-24 2008-07-15 Danfoss As ELECTROACTIVE ELASTIC COMPRESSION BANDAGE
JP4852850B2 (en) 2005-02-03 2012-01-11 セイコーエプソン株式会社 Piezoelectric vibration element, piezoelectric vibrator, piezoelectric oscillator, frequency stabilization method, and piezoelectric vibrator manufacturing method
JP2006284551A (en) * 2005-02-23 2006-10-19 Sony Corp Oscillating gyro sensor
CN101142742B (en) * 2005-04-18 2011-06-15 株式会社大真空 Piezoelectric vibration piece and piezoelectric vibration device
JP2007013381A (en) * 2005-06-29 2007-01-18 Seiko Epson Corp Crystal oscillating piece, crystal oscillator, and crystal oscillating device
JP5034947B2 (en) * 2005-09-30 2012-09-26 株式会社大真空 Piezoelectric vibration device
TWI325687B (en) * 2006-02-23 2010-06-01 Murata Manufacturing Co Boundary acoustic wave device and method for producing the same
JP2007274610A (en) * 2006-03-31 2007-10-18 Nippon Dempa Kogyo Co Ltd Quartz-crystal vibrator, and package thereof
US20070239253A1 (en) * 2006-04-06 2007-10-11 Jagger Karl A Oscillation assisted drug elution apparatus and method
US7732999B2 (en) * 2006-11-03 2010-06-08 Danfoss A/S Direct acting capacitive transducer
US7880371B2 (en) 2006-11-03 2011-02-01 Danfoss A/S Dielectric composite and a method of manufacturing a dielectric composite
JP2009100353A (en) * 2007-10-18 2009-05-07 Nippon Dempa Kogyo Co Ltd Quartz crystal device
JP2009135749A (en) * 2007-11-30 2009-06-18 Kyocera Kinseki Corp Piezoelectric vibrator and piezoelectric oscillator
JP5166015B2 (en) * 2007-12-28 2013-03-21 京セラクリスタルデバイス株式会社 Frequency adjustment device
JP2010074422A (en) * 2008-09-17 2010-04-02 Nippon Dempa Kogyo Co Ltd Method for manufacturing crystal oscillation element, crystal oscillation element, crystal oscillator, and crystal controlled oscillator
JP5026574B2 (en) * 2010-04-27 2012-09-12 日本電波工業株式会社 Piezoelectric device
JP2012054893A (en) * 2010-09-03 2012-03-15 Nippon Dempa Kogyo Co Ltd Tuning fork type crystal vibrating piece and crystal device
JP2013021667A (en) * 2011-03-23 2013-01-31 Nippon Dempa Kogyo Co Ltd Crystal device
KR101771717B1 (en) * 2011-03-31 2017-08-25 삼성전기주식회사 Crystal oscillator and electrode structure thereof
JP2013046167A (en) * 2011-08-23 2013-03-04 Seiko Epson Corp Vibration device and manufacturing method of vibration device
US8891222B2 (en) 2012-02-14 2014-11-18 Danfoss A/S Capacitive transducer and a method for manufacturing a transducer
US8692442B2 (en) 2012-02-14 2014-04-08 Danfoss Polypower A/S Polymer transducer and a connector for a transducer
JP6155551B2 (en) * 2012-04-10 2017-07-05 セイコーエプソン株式会社 Electronic device, electronic apparatus, and method for manufacturing electronic device
JP5986801B2 (en) * 2012-05-23 2016-09-06 日本発條株式会社 Wiring member for disk device suspension and disk device suspension
JP2014011657A (en) * 2012-06-29 2014-01-20 Kyocera Crystal Device Corp Crystal vibration element
JP5776854B2 (en) 2012-09-26 2015-09-09 株式会社村田製作所 Piezoelectric vibration parts
WO2014148107A1 (en) * 2013-03-21 2014-09-25 株式会社村田製作所 Crystal oscillation apparatus
CN107533082A (en) * 2015-03-12 2018-01-02 株式会社村田制作所 Acceleration detecting and its manufacture method
JP6687049B2 (en) * 2018-03-12 2020-04-22 セイコーエプソン株式会社 Electronic devices, circuit boards for electronic devices, electronic devices, moving bodies
TWI828371B (en) * 2022-10-17 2024-01-01 台灣晶技股份有限公司 Piezoelectric vibration element

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3293471A (en) * 1963-10-28 1966-12-20 Gen Electric Laminated core construction for electric inductive device
US4000000A (en) * 1972-09-05 1976-12-28 Mendenhall Robert Lamar Process for recycling asphalt-aggregate compositions
JPS4979797A (en) * 1972-12-09 1974-08-01
JPS5411173U (en) * 1977-06-24 1979-01-24
JPS59225606A (en) * 1983-06-07 1984-12-18 Fujitsu Ltd Piezoelectric vibrator
JPS60100814A (en) * 1984-10-12 1985-06-04 Nippon Dempa Kogyo Co Ltd Thin film structure
US5000000A (en) * 1988-08-31 1991-03-19 University Of Florida Ethanol production by Escherichia coli strains co-expressing Zymomonas PDC and ADH genes
JPH0749862Y2 (en) * 1988-09-12 1995-11-13 株式会社明電舎 Crystal oscillator
JPH07109969B2 (en) * 1989-08-31 1995-11-22 キンセキ株式会社 Electrode structure of piezoelectric vibrator
JP3039971B2 (en) * 1989-09-19 2000-05-08 株式会社日立製作所 Bonded piezoelectric device, manufacturing method, and bonded piezoelectric element
JPH03190410A (en) 1989-12-20 1991-08-20 Seiko Electronic Components Ltd Support structure for crystal resonator
US5176946A (en) * 1991-05-10 1993-01-05 Allen-Bradley Company, Inc. Laminated contactor core with blind hole
JPH0749862A (en) 1993-08-06 1995-02-21 Nec Corp Document management system
JP3377850B2 (en) * 1994-02-28 2003-02-17 京セラ株式会社 Surface mount type crystal oscillator and manufacturing method thereof
JPH07283683A (en) 1994-04-07 1995-10-27 Seiko Epson Corp Piezoelectric oscillation piece, piezoelectric vibrator and piezoelectric oscillator
US5495828A (en) * 1994-06-30 1996-03-05 Solomon; Irving Animal boots with detachable, vertically adjustable fastening strap
US5884323A (en) * 1995-10-13 1999-03-16 3Com Corporation Extendible method and apparatus for synchronizing files on two different computer systems
JP2000040935A (en) * 1998-07-22 2000-02-08 Toyo Commun Equip Co Ltd Piezoelectric device
JP3420090B2 (en) * 1998-11-06 2003-06-23 日本電波工業株式会社 Electrode structure of crystal oscillator and crystal oscillator for surface mounting
JP3405329B2 (en) * 2000-07-19 2003-05-12 株式会社村田製作所 Surface wave device

Also Published As

Publication number Publication date
DE60131343T2 (en) 2008-09-04
EP1187323A1 (en) 2002-03-13
DE60131343D1 (en) 2007-12-27
CN1168209C (en) 2004-09-22
ATE378732T1 (en) 2007-11-15
US6700312B2 (en) 2004-03-02
JP3925199B2 (en) 2007-06-06
EP1187323A4 (en) 2005-04-06
WO2001067600A1 (en) 2001-09-13
US20020158699A1 (en) 2002-10-31
EP1187323B1 (en) 2007-11-14
CN1364338A (en) 2002-08-14

Similar Documents

Publication Publication Date Title
AU3605601A (en) Crystal vibration device
TWI233257B (en) Piezoelectric vibrating plate, piezoelectric apparatus using piezoelectric vibrating plate, and portable phone and electronic device using piezoelectric apparatus
EP1187322A3 (en) Piezoelectric device and method of manufacturing it
US9184726B2 (en) Piezoelectric vibrating strip, piezoelectric vibrator, oscillator, electronic device, and radio timepiece
JP2003219499A (en) Piezoelectric speaker
EP1187321A3 (en) Piezoelectric device and method of manufacturing it
KR20010013602A (en) Packaging structure of piezoelectric transformer element and the method thereof
JP5276411B2 (en) Piezoelectric device
JP4442014B2 (en) Surface mount type piezoelectric device
JP2007096529A (en) Piezoelectric vibration element, supporting structure of piezoelectric vibration element, surface mounting type piezoelectric vibrator, and surface mounting type piezoelectric oscillator
JP5508046B2 (en) Piezoelectric vibration element
KR950035058A (en) Surface Wave (SAW) Device
JP2001077652A (en) Piezoelectric vibrator and piezoelectric oscillator
JP2004120249A (en) Piezoelectric vibration chip and piezoelectric device utilizing piezoelectric vibration chip, and mobile phone utilizing piezoelectric device, and electronic apparatus utilizing piezoelectric device
JP2004201211A (en) Joining structure of piezoelectric vibrating piece, piezoelectric device, its manufacturing method, and cellular phone unit and electronic equipment using the device
JPH1051265A (en) Surface-mount type crystal vibrator
JP2007074472A (en) Tuning-fork piezoelectric vibrator
JP2003198311A (en) Method of joining piezoelectric device and piezoelectric oscillating piece, portable telephone utilizing piezoelectric device, and electric apparatus utilizing piezoelectric device
JP4020010B2 (en) Piezoelectric vibrating piece, piezoelectric device using the piezoelectric vibrating piece, mobile phone device using the piezoelectric device, and electronic equipment using the piezoelectric device
JP3085233B2 (en) Piezoelectric transformer
JPH11113094A (en) Piezoelectric speaker
JP2001119263A (en) Crystal oscillator
JPH1175381A (en) Ultrasonic motor and electronic equipment having the same
JP2022089347A (en) Piezoelectric device and package
JP2000341081A (en) Semiconductor device

Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase