AU2579197A - Method for measuring linear dimensions - Google Patents
Method for measuring linear dimensionsInfo
- Publication number
- AU2579197A AU2579197A AU25791/97A AU2579197A AU2579197A AU 2579197 A AU2579197 A AU 2579197A AU 25791/97 A AU25791/97 A AU 25791/97A AU 2579197 A AU2579197 A AU 2579197A AU 2579197 A AU2579197 A AU 2579197A
- Authority
- AU
- Australia
- Prior art keywords
- linear dimensions
- measuring linear
- measuring
- dimensions
- linear
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/28—Scanning microscopes
- H01J2237/2813—Scanning microscopes characterised by the application
- H01J2237/2814—Measurement of surface topography
- H01J2237/2816—Length
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Materials For Photolithography (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/RU1997/000060 WO1998040696A1 (en) | 1997-03-12 | 1997-03-12 | Method for measuring linear dimensions |
Publications (1)
Publication Number | Publication Date |
---|---|
AU2579197A true AU2579197A (en) | 1998-09-29 |
Family
ID=20130091
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU25791/97A Abandoned AU2579197A (en) | 1997-03-12 | 1997-03-12 | Method for measuring linear dimensions |
Country Status (2)
Country | Link |
---|---|
AU (1) | AU2579197A (en) |
WO (1) | WO1998040696A1 (en) |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SU112605A1 (en) * | 1957-02-21 | 1957-11-30 | Л.А. Беспалов | Device for counting and distributing aerosol particles to their sizes |
JPS5434673A (en) * | 1977-08-23 | 1979-03-14 | Hitachi Ltd | Micro-distance measuring device for scan-type electronic microscope |
DD206722A3 (en) * | 1981-11-02 | 1984-02-01 | Rainer Plontke | METHOD AND ARRANGEMENT FOR STRUCTURING EDGE DETERMINATION IN ELECTRON BEAM INSTRUMENTS |
JPS59112217A (en) * | 1982-11-29 | 1984-06-28 | Toshiba Corp | Size measuring device |
JPS59163506A (en) * | 1983-03-09 | 1984-09-14 | Hitachi Ltd | Electronic beam measuring device |
JPS61176810A (en) * | 1985-02-01 | 1986-08-08 | Hitachi Ltd | Size measuring instrument |
-
1997
- 1997-03-12 WO PCT/RU1997/000060 patent/WO1998040696A1/en active Application Filing
- 1997-03-12 AU AU25791/97A patent/AU2579197A/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
WO1998040696A1 (en) | 1998-09-17 |
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