AU2579197A - Method for measuring linear dimensions - Google Patents

Method for measuring linear dimensions

Info

Publication number
AU2579197A
AU2579197A AU25791/97A AU2579197A AU2579197A AU 2579197 A AU2579197 A AU 2579197A AU 25791/97 A AU25791/97 A AU 25791/97A AU 2579197 A AU2579197 A AU 2579197A AU 2579197 A AU2579197 A AU 2579197A
Authority
AU
Australia
Prior art keywords
linear dimensions
measuring linear
measuring
dimensions
linear
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU25791/97A
Inventor
Mikhail Julievich Iliin
Alexei Ivanovich Kozlitin
Sergei Kirillovich Maximov
Arkady Viktorovich Nikitin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ilyin Mikhail Julievich
Original Assignee
MIKHAIL JULIEVICH ILYIN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MIKHAIL JULIEVICH ILYIN filed Critical MIKHAIL JULIEVICH ILYIN
Publication of AU2579197A publication Critical patent/AU2579197A/en
Abandoned legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B15/00Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26Electron or ion microscopes
    • H01J2237/28Scanning microscopes
    • H01J2237/2813Scanning microscopes characterised by the application
    • H01J2237/2814Measurement of surface topography
    • H01J2237/2816Length

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Materials For Photolithography (AREA)
AU25791/97A 1997-03-12 1997-03-12 Method for measuring linear dimensions Abandoned AU2579197A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/RU1997/000060 WO1998040696A1 (en) 1997-03-12 1997-03-12 Method for measuring linear dimensions

Publications (1)

Publication Number Publication Date
AU2579197A true AU2579197A (en) 1998-09-29

Family

ID=20130091

Family Applications (1)

Application Number Title Priority Date Filing Date
AU25791/97A Abandoned AU2579197A (en) 1997-03-12 1997-03-12 Method for measuring linear dimensions

Country Status (2)

Country Link
AU (1) AU2579197A (en)
WO (1) WO1998040696A1 (en)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU112605A1 (en) * 1957-02-21 1957-11-30 Л.А. Беспалов Device for counting and distributing aerosol particles to their sizes
JPS5434673A (en) * 1977-08-23 1979-03-14 Hitachi Ltd Micro-distance measuring device for scan-type electronic microscope
DD206722A3 (en) * 1981-11-02 1984-02-01 Rainer Plontke METHOD AND ARRANGEMENT FOR STRUCTURING EDGE DETERMINATION IN ELECTRON BEAM INSTRUMENTS
JPS59112217A (en) * 1982-11-29 1984-06-28 Toshiba Corp Size measuring device
JPS59163506A (en) * 1983-03-09 1984-09-14 Hitachi Ltd Electronic beam measuring device
JPS61176810A (en) * 1985-02-01 1986-08-08 Hitachi Ltd Size measuring instrument

Also Published As

Publication number Publication date
WO1998040696A1 (en) 1998-09-17

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