AU2012343353A1 - Apparatus and method for providing improved grinding lines on an aluminium substrate disc - Google Patents

Apparatus and method for providing improved grinding lines on an aluminium substrate disc Download PDF

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Publication number
AU2012343353A1
AU2012343353A1 AU2012343353A AU2012343353A AU2012343353A1 AU 2012343353 A1 AU2012343353 A1 AU 2012343353A1 AU 2012343353 A AU2012343353 A AU 2012343353A AU 2012343353 A AU2012343353 A AU 2012343353A AU 2012343353 A1 AU2012343353 A1 AU 2012343353A1
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Australia
Prior art keywords
grinding
plates
plate
carrier
central
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Granted
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AU2012343353A
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AU2012343353B2 (en
Inventor
Elma Masrini Binti Halim
Eng Seong Hong
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Kobelco Precision Technology Sdn Bhd
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Kobe Steel Ltd
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Assigned to Kobelco Precision Technology Sdn. Bhd. reassignment Kobelco Precision Technology Sdn. Bhd. Request to Amend Deed and Register Assignors: KOBE PRECISION TECHNOLOGY SDN. BHD.
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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/04Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/08Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00Component parts such as frames, beds, carriages, headstocks
    • B24B41/06Work supports, e.g. adjustable steadies
    • B24B41/067Work supports, e.g. adjustable steadies radially supporting workpieces

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)

Abstract

Ptt2/i205 APPARATUS ADMTO O RVDN MRVD IDN LINE$ ON AN ALUMINIUM $UBSTRATE DISC A igr inding apparatus for establshing grindig lios n anaumnu peripheral rig; a pair of circular grin-din p~tes wherei'n each plae icue cnrlbore' hole positonabk about tecnrlrotatable s haft wterekn eacn olf, the circular- grdnd"niq pltsNrOfe to rot independently ofA the other: , and./or tecentral rtabeshaft apluraliy of care htsaatd t e it) andwche in etwen te pai of ci" Cr griNin plates Wherein each cre pl te incl - -udes a series of pockets to whichalinu sbtredscae nesabe therein suc that the upper an'd lower urfce of the alin - urn d cs are in cnatbecmuiainwt aho h iclrgidn lts whrnthe central rotatable sAft peihea ing and the plurality of carrier S5 lats inclde a seis ftet and/or gears along t ,heir anuarege o a s to establish an epicyclc ge-aring so as to increase e awnd. create a degree of rotation uponm eacdh of the cnrlrotatable shf eihrlrng nd ahoyh ate plates uclh that the sability to impart rotatio"n 'upon th.--e carrier Plates to0hic the alumnium~ discs rest theretn result in an ellipical criss.cross grind,,ing tine

Description

DESCRMPTlON "TIM: APPARATUS AN13 IEtTOE) FOR~ PROVIDING IMPROVEL)GUDND LINES ON AN ALUMIMUM SUBSTRATIE D$ IFELD OF THE INVENTMO [00] iths inenk eates- toontuhs or an srag Mvvich Ws ado pled Wo esta~sh guided W~es upon an aluntmususraedic [0023 More paricuArt- y thsivninrae oaver uearngm BACK$ROUNO) ART tflCQ$SSON 'OO31 This irmvent ion focses more nds rnigpuessos ~ wt hetwen wo otatbleabm ie ia, ~ More sp, cinIaytese converdiSonafye fnahnr i~utdwt plat ~~n andan upe.r paepa. 005) CKnmmn terrnintg y apidtocovnialpceesaomae retrece o heRPMA wato which is roere oas the rottinAio of agrne 71) a at agast t'he sungar 'tX~Thce RPM"N ratk s iSasci:te~d wihthe disc rvcuion A hge rne prate rMatlW crve dfisc re-vol.utkonanweenahihrungartan wil also inraedSs ott n [0071 For the most part curent grinding roseshave ben nbi o cositeto rovd a s.>ur face ro nsuo the almnu usrt hat i's [008] Thr for ti an oec of thi's inenio o prvdVnpaausado mhod whic is alea to prn.ide th mans of estaisining ',ng lines, up on an aumiium ubsrate disc that Wil have berrugns niomt by wa,,y of t ctes shing a finding ptenwith acos hatch cniuain [00j Rther object.,-.,,,s oale advantages of th neninwibeoeaprt fro ' copltereading of this specifcaio. SUMMARY OF THEW INVENTION {0I0~~ in one form- of th e invenhnton tlhere-, is provided a gidn paau o I$ esto blishin riding lines, on an auminium sbtaedssi paau f1l 1] a pair of ciclrgrindi ngpltsweineahlteictsacnra 2. 0 bo.,re hole? positioriable about tecentral rtabeshaft weU 'c f~h cirulr iding p,,ikaes aefetorttidpndtlofheother- and/ or h cental roatable shaft;' a plray of cater pates adapted to be sandwiched in between the pair of crcular gqnng plates wherein each carrier plate *ncudes a series of pockets to which aluminium substrate discs are nestable therein such that the upper and lower surae of the al umrinium discs are in conta\tble commnunicat ion with each of the circular grinding plates; [013]w central rtaable [shaft per a r a e pray o carer plates include a series of teeth and/or gears along their angular edges so as to establish an epicyclic gemaring so as to increase and create a degree of rotation upon ech of the central rotatable shaft, peripheral ring and each of the t0 carrier plates such that the abili to impart rotation upon the carer plates to which the aluminium discs rest therein results in an eliptical crsscross gnndin oine pattern [014] Advantageously, the applicant for this invention has realized that by establishing a planetary or epicyclic gearing type arrangement between the main 5 central rotatable shaft and the peripheral ring through the geared teeth arrangement of the cater plates holding the aluminium substrate discs means that as these carrier plates for the aluminium discs are sandwiched there in between the pair of circular greinng plates, not ony are they moving in the gena section of the main central rotating shafts and the lower plates to which 20 it rests thereon, it is also undergoing, its own internal rotation upon its own axis. [015] The situation is very similar to the way the earth rotates about the sun, not only is there a general rotation of the carrier plate containing the aluminium substrate disc moving in orbit about the central rotating shaft, where it is then beiirng grinded both on itS upe-,r ari d u rseby beipendwce gh h gat ltlt'Tppate wth e:.ach of the upper a.rnd twrgtcn itsrtto an anO direction, due, to"ee~a~ on theern agmn between the Central ?\abng hf an'd tlhes ring re that wh-at, is at ise $i is the nqephnmnn ftecarr: ae dn the r, nusbtrt dissrvvngteiee as they moving ha generi.at t about th'-e m [016] Advantageously throfugh the estabiSh ment of a gearingy mechanism ITi nowposibo t cange the FU- r-atio in ore oprovidetfertrohns 1(1 nifrmiy aS rqie depending on the applicaton and uise of the relevant [1 As thlare ltsae, ablew to elott an~d spin and are nom longer ,,r held generally stationary, the- gnig pattrn hich is oe oiuin hssl type rottin rates a coshthonguainof grind Mies upo'.n tedisc, 5 [018] The abibty to estQAbsh thscoshat.ch grndn patr"ed o a direct coreltin btwenrou-,gness unifonrit, [ m]I reeec the central rMttal shaft iS thIre cnrland/or, Sun r, (020J In prFe n thle peiheaing is an ouer rin; wvith in,"wardfaigteh (021] In prfrnethe ce, ntral and/or sun gear includes outw ad faci. ng teeth. 20 (0221 In preeence eac catrlte wh in the ,Auminiu, sbstnt discs rest therei have anlrpointing outward facQn teth adapted tomes with tUhe P17 T!i P1 (0231 in pnefevrne the apparatus is adtbesuch tht he pair of grinding plates cn be separate d where n anupe.rmn plate is rsaeretieto the" gowe ginding paesuch that crirpaewh Rte aiuw,-nium substr,,ate diss estd herein can be plcdteeupon telergrinding plate during t tImes of inoperation of thie grinding appaats j024] npeeec the pkwWRay of carder pltsare cofgrdab out the lowe circular^ platea such thtthere is a ma ,-xirm.isiJng of cnatareabtweth alurrarvum substrate diss nested in thne cadrPlate and eac h of the respe-ctive cir cular grinding pltsto wich the carder plAteS are s-andwiched,-, therein 0 be(en [0251 in reference the abrasive st-riesses fr om the upperenlwe gindhig plate-s im"partied upon the aluminium substrate discs netnihnthe plural"ity of carder plates during operation ar e equal on both si-des., [026] !n pref-eren-ce theapatu further, includes sfiencongto mnms I§ the hea generated during the disc grind ing pr o,ess. [027] Kn preference the grinding aprtsincludes a main exter',nai osn bod'y suhthat the pair Of cicla)ridngpates are en"ctsed within the apparaitus so that11 the gridn process is no iewAatle fro te outside o f, mnachin,,e there-by miiiigany exposure t dust an arore dealings [028] in one form of the inention there is provided grinding arageen weenthe grirfningi a-.pparatus rfre opeeigyicue eiso tp wh ehidda uhaprtsare osoedt tashftyarugh rior an zte a mo e nr id [029]Avat ~u~ by using an' arrangemen,,* -',,, . t whe-,reby Ntwo, or' moe rindinq appratsesr'eerre -d lo above arerensbe forvroustesinhegndn 7 processf-rom- rough through to vine rnx'a-'s that tose gidn paau an herei fer goaned apaases can focus on, surface c~t hri h us o to r or mit~eapparatuses thMe r iih bet rdc im.pro-ved grinding lies ove-.raA,. rmval of ,42 mrosadweeoafnrapparatus' colaousorh gidn o)n surfa ce quamiylpOiHNIng fOr smothness; and so forth weinstock moa would be ~pected o be 5mcrn [031] in order now to, de,-scribe, the invention n-ow ingraedtaapefrd Li embodim-ent will be presented through th~e use of t he follo",win lusrton n BRtEF DECRPT OF o THE INVENTICN [032] Figure 1 is ao schemn-,atic viwof the m-ain components sonusing a conventiona giing process werin the upp r rni lt to whc the 20~~~~~~~~~~~~~~~~ care pltwhl esndihdteenbtwe uigoeain isno snvown tor carit reaons PT 0212 PH [033} Figures 2a iiustrates the path taken by the carer plate and its relevant movement to the lower plate when the conventional arrangement of Figure 1 is put into operation wherein the sun gear and the ring impart no rotation ito the caner plate which is not undergoing any selfrotaton and figure 2b illustrates the disc grinding lines, [034] Figures 3a and 3b provide representations of the path of the carrier plate relative to the lower plate and the gnindling ie pattern established upon the grinder disc after the grinding process wherein the sun ge ar and the ring gear rotates the career plate has a partial degree of self rotation due to the relative to movement of the carrier to the sun gear and the ring gear station, [035] Figure 4 shows a schematic representation of the main components associated with the apparatus that provides for a cross hatch grinded lne pattern during the grinding process in a preferred embodiment of this invention. [0361 Figures 5a and 5b show respectively the path of carrier movement 5 relative to the lower plate and the cross hatch grinded line patten upon the aluminium substrate discs after the grinding process. DETAILED DESCRIPTON OF THE ILLUSTRATIONS [037] Refering to the drawings now in greater detail wherein as shown in Figure 1 purely for illustrative purposes in order to provide a distinction between 20 the features associated with the preferred embodiment of this invention as illustrated in Figure 4, there is provided a more conventional arrangement shown generally as (10) that includes a main rotatable shaft (12) a lower grinding plate PT-02P2P>8 (14) which includes a series of stations (15) which imparts an abrasive means to gind a pattern line upon aluminium substrate discs (24) which nest in carrier pockets (25) of the cater plate (22). [038] The aower plate (14) has an internal bore hole ( a a peripheral edge () wtich is independent of the main driveabie or central shat (12) and the e xternal rim (20),. [039] Although not shown in the illustrations there is an upper grinding plate which when the machine is in operation would see that both the upper and lower grinding plates which sandwich therein between the camer plates (22) to which 10 the aluminium substrate discs (24) rest therein carrier pockets (25). [040J Flgure 2a shows the path (26) that the carrier plate moves relative to the lower plate, This is when the main central shaft (12) and the extemal or annulus ring (20) do not impart any rotation onto the camer plate (22) and therefore them is no self rotation of the carer plate (22) as it moves in its defined direction, 15 [041] As the camer plate (22) does not rotate in its general movement, the Aluminium substrate discs (24) thtare oceted withinside (25) upon the carrier plate (22) will not rotate as well as one would expect and the resulting grinding lie patten as illustrated in Figure 2b will be parallel (28). [042] In Figure 3a the path (30) of the carrier movement relative to the lower 20 plate is different to that shown in Figure 2a because in this embodiment the main central shaft (12) and the annulus ring (20) rotates and there is a slight degree of self station of the carrier plate (22) due to the fact that there would he ereLative degree of intema spinning of the Camer p iate as t is tree to rotate relative to the mawn central rotating shaft (12) and the a.nnuus ring (20) albeit from a mechanical or input connection such as the gearing arrangement shown in Fgure 4 which is the preferred embodiment of this invention there is no such > inte raction. [043] Accordingly as a result of this scenario the Aluminu discs (24) ar imparted with a finding line patehrn (31) to have a generally or substantiAl annular or curved parallel configuration, [044] Figure 4 illustrates the rindng process of this preferred embodiment of 10 the invention shown generally as (32). t0451 The main rotatabie central shaft of conventional arrangements has become the sun gear (34) wath its outwardly pointing teeth or gears (36). [046] The annutus or outer ring (50) with its inwardly pointing teeth or gears (52), 15 [047) 'he carrier plate (46) rests upon the lower grinding plate (3$) With outer peripheral edge (40) and inner peripheral edge (42) [048) The carrier plate (46) with its annular teeth (48) is able to establish a meshed gearing relationship between the annulus ring (50) and the sun gear (34) whereby not only will there be general movement of the carrier plate (46) 20 but ther wilt also be intemal self rotation to which the degree of that rotation will be dependent upon the gearing relationship between the sun gear, carer plate and the annuus or outer ring, 10 [049] Advtaeusly as introduced above as there is now mechanical interaction through the planetary gear defined by the meshed teeth arrangement between the sun gear, carer plate and the annulus or ou-er ring means that by being ale to stabsh self rotation of the carrier plate with the higher degree of rotation of the carrier plate now established results in an eliptical type cross configuration as shown by the path taken now by the carrier plate (46) which then establishes upon the aluminium substrate disc a cross hatch type grinding lie pattern. [Q501 As the person skilled in the ar1 will appreciate the aluminium substrate 10 disc (45) nesting inside the career plate (46) will have a higher rotation that does conventional arrangements and result in a grinding line pattern to be criss crossed (56) achieved by the grinding path (54) as best seen upon the disc (45) in Figure 5b. [0511 As the applicant has found by increasing the carter plate self rotation 15 through the unique gear mechanism they are able to obtain a more uniform surface rather than as compared to existing grinding processes, [0521 During testing the applicant was ableto determine that roughness uniformity correlates by referring to the standard deviation value of the disc The lower the standard deviation the better uniformity, 20 [053) Using the scenarios introduced above and shown in the illustrations, the grinding process provided in Figure 4 had a lower standard deviation range compared to those scenarios that were illustrated in Figures 2a, 2b, 3a and 3b I I WPf~ty This iflw@fltlflfl ~'A&~d for &umin~uw ~ubstt~ I~scs to have bo~ter rouqhne~s voIorrflIty.

Claims (3)

  1. 2. The grndtng apparatus of Claim i wherein the central rtatable shat is the central and/or sun gear, 3, The gnnding appartu of im 2 wherein the periheral ring is an outer nng with inward facing teeth. 4, The grnding apparatus of claim 3 wherein the central andfor sun gear inces outward facing teeth, 5, The grinding apparatus of claim- 4 wherein each rrer plate wherein the aluminium substrate dscs rest therein have annular pwwOintn u rd facing teeth adapted to mesh with the annulus and/or central/sun gear, In . The gnnding apparatus of claim 5 wherein the apparatus is a such that the pair of grinding plates can be separated wherein an upper grinding plate is raisable relative to the lower grinding plate such that carrier plates wherein the aluminium substrate discs nested therein can be placed there upon the powerr grinding plate during times of operation !5 of the grinding apparatus. 7 The rr't ,t .r
  2. 7. Thegnnding apparatus of claim 6 wherein the plurality of carrie plates are configured about the tower circular plate such that there is a maximizing of contact area between the aluminium substrate discs nested in the carrier plate and each of the respective circular grinding 20 plates to which the carrier plates are sandwiched therein between,
  3. 8. The grinding apparatus of claMs 6 or 7 wherein the abrasive stresses from the upper and lower grinding plates imparted upon the aluminium substaedss nesting MIN the p yof arrpltsuxJ opea:tkum5'5:5U on bot h sides sufi~etcoo ,ng to m hsethe heat geee uring the diclrnding-. $process i f h, Agrndin pat are n-,v', o withlhe in the eppmlusa rfen so inkdany one of the peceding ciahs inciues ao seres ofA steps weenidvo such ppar atus are psitio,,,ned toesabis firsty a enough ".r"Ind and "hena more finer grind,
AU2012343353A 2011-12-27 2012-04-03 Apparatus and method for providing improved grinding lines on an aluminium substrate disc Active AU2012343353B2 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
MYPI2011006290A MY179417A (en) 2011-12-27 2011-12-27 Apparatus and method for providing improved grinding lines on an aluminium substrate disc
MYPI2011006290 2011-12-27
PCT/MY2012/000074 WO2013100749A1 (en) 2011-12-27 2012-04-03 Apparatus and method for providing improved grinding lines on an aluminium substrate disc

Publications (2)

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AU2012343353A1 true AU2012343353A1 (en) 2013-07-11
AU2012343353B2 AU2012343353B2 (en) 2015-07-09

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AU (1) AU2012343353B2 (en)
MY (1) MY179417A (en)
WO (1) WO2013100749A1 (en)

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KR102219874B1 (en) * 2019-05-10 2021-02-24 한국산업기술대학교 산학협력단 Method for producing phosphor plate
CN111136573B (en) * 2019-11-27 2021-12-03 常州市瑞得通讯科技有限公司 High-stability and low-loss ceramic filter preparation assembly line
CN112828779A (en) * 2021-01-21 2021-05-25 上海橄榄精密工具有限公司 Preparation method of aluminum-based grinding wheel and grinding wheel

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US4133145A (en) * 1975-12-16 1979-01-09 Ted Bildplatten Aktiengesellschaft Aeg-Telefunken-Teldec Method for producing a grinding agent carrier
JPH0713964Y2 (en) * 1987-06-09 1995-04-05 スピ−ドファム株式会社 Carrier for flat polishing machine
JPH07156061A (en) * 1993-11-29 1995-06-20 Nippon Light Metal Co Ltd Both side polishing attachment of base plate
US5697832A (en) * 1995-10-18 1997-12-16 Cerion Technologies, Inc. Variable speed bi-directional planetary grinding or polishing apparatus
US6709981B2 (en) * 2000-08-16 2004-03-23 Memc Electronic Materials, Inc. Method and apparatus for processing a semiconductor wafer using novel final polishing method
JP2009289925A (en) * 2008-05-28 2009-12-10 Sumco Corp Method of grinding semiconductor wafers, grinding surface plate, and grinding device

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Publication number Publication date
WO2013100749A1 (en) 2013-07-04
MY179417A (en) 2020-11-05
JP2015503457A (en) 2015-02-02
AU2012343353B2 (en) 2015-07-09

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Owner name: KOBELCO PRECISION TECHNOLOGY SDN. BHD.

Free format text: FORMER NAME(S): KOBE PRECISION TECHNOLOGY SDN. BHD.