AU2002365012A1 - Thermoreflectance microscope for measuring an integrated circuit temperature - Google Patents

Thermoreflectance microscope for measuring an integrated circuit temperature

Info

Publication number
AU2002365012A1
AU2002365012A1 AU2002365012A AU2002365012A AU2002365012A1 AU 2002365012 A1 AU2002365012 A1 AU 2002365012A1 AU 2002365012 A AU2002365012 A AU 2002365012A AU 2002365012 A AU2002365012 A AU 2002365012A AU 2002365012 A1 AU2002365012 A1 AU 2002365012A1
Authority
AU
Australia
Prior art keywords
thermoreflectance
microscope
measuring
integrated circuit
circuit temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002365012A
Inventor
Daniele Fournier
Stephane Hole
Gilles Tessier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Original Assignee
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS filed Critical Centre National de la Recherche Scientifique CNRS
Publication of AU2002365012A1 publication Critical patent/AU2002365012A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
    • G01K11/12—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in colour, translucency or reflectance
    • G01K11/125—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in colour, translucency or reflectance using changes in reflectance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
AU2002365012A 2001-12-19 2002-12-19 Thermoreflectance microscope for measuring an integrated circuit temperature Abandoned AU2002365012A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR0116490A FR2833710B1 (en) 2001-12-19 2001-12-19 THERMOREFLECTANCE MICROSCOPE FOR MEASURING THE TEMPERATURE OF AN INTEGRATED CIRCUIT
FR0116490 2001-12-19
PCT/FR2002/004465 WO2003052366A1 (en) 2001-12-19 2002-12-19 Thermoreflectance microscope for measuring an integrated circuit temperature

Publications (1)

Publication Number Publication Date
AU2002365012A1 true AU2002365012A1 (en) 2003-06-30

Family

ID=8870708

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002365012A Abandoned AU2002365012A1 (en) 2001-12-19 2002-12-19 Thermoreflectance microscope for measuring an integrated circuit temperature

Country Status (3)

Country Link
AU (1) AU2002365012A1 (en)
FR (1) FR2833710B1 (en)
WO (1) WO2003052366A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8362431B2 (en) 2005-03-15 2013-01-29 Mount Holyoke College Methods of thermoreflectance thermography
US7429735B2 (en) 2005-03-15 2008-09-30 Mass Institute Of Technology (Mit) High performance CCD-based thermoreflectance imaging using stochastic resonance
US8408786B2 (en) 2007-05-04 2013-04-02 Massachusetts Institute Of Technology (Mit) Optical characterization of photonic integrated circuits
CN107976263B (en) * 2017-11-16 2020-10-09 中国电子科技集团公司第十三研究所 Photothermal reflection temperature measurement method and system

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2664048B1 (en) * 1990-06-29 1993-08-20 Centre Nat Rech Scient MULTICHANNEL ANALOGUE DETECTION METHOD AND DEVICE.
FR2772124B1 (en) * 1997-12-09 2000-02-18 Thomson Csf METHOD FOR MEASURING THE TEMPERATURE ON OPERATING COMPONENTS AND MEASURING DEVICE

Also Published As

Publication number Publication date
FR2833710A1 (en) 2003-06-20
WO2003052366A1 (en) 2003-06-26
FR2833710B1 (en) 2004-03-12

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase