AU2002349843A1 - Measurement device for electron microscope - Google Patents

Measurement device for electron microscope

Info

Publication number
AU2002349843A1
AU2002349843A1 AU2002349843A AU2002349843A AU2002349843A1 AU 2002349843 A1 AU2002349843 A1 AU 2002349843A1 AU 2002349843 A AU2002349843 A AU 2002349843A AU 2002349843 A AU2002349843 A AU 2002349843A AU 2002349843 A1 AU2002349843 A1 AU 2002349843A1
Authority
AU
Australia
Prior art keywords
electron microscope
measurement device
microscope
measurement
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002349843A
Inventor
Fredrik Althoff
Andrey Danilov
Hakan Olin
Krister Svensson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nanofactory Instruments AB
Original Assignee
Nanofactory Instruments AB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nanofactory Instruments AB filed Critical Nanofactory Instruments AB
Publication of AU2002349843A1 publication Critical patent/AU2002349843A1/en
Abandoned legal-status Critical Current

Links

AU2002349843A 2001-11-12 2002-11-12 Measurement device for electron microscope Abandoned AU2002349843A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE0103781-1 2001-11-12

Publications (1)

Publication Number Publication Date
AU2002349843A1 true AU2002349843A1 (en) 2003-05-26

Family

ID=

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