AU2002350488A1 - Multiple electron beam device - Google Patents

Multiple electron beam device

Info

Publication number
AU2002350488A1
AU2002350488A1 AU2002350488A AU2002350488A AU2002350488A1 AU 2002350488 A1 AU2002350488 A1 AU 2002350488A1 AU 2002350488 A AU2002350488 A AU 2002350488A AU 2002350488 A AU2002350488 A AU 2002350488A AU 2002350488 A1 AU2002350488 A1 AU 2002350488A1
Authority
AU
Australia
Prior art keywords
electron beam
beam device
multiple electron
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002350488A
Inventor
Pavel Adamec
Helmut Banzhof
Achim Gohl
Dieter Winkler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ICT Integrated Circuit Testing Gesellschaft fuer Halbleiterprueftechnik mbH
Original Assignee
ICT Integrated Circuit Testing Gesellschaft fuer Halbleiterprueftechnik mbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ICT Integrated Circuit Testing Gesellschaft fuer Halbleiterprueftechnik mbH filed Critical ICT Integrated Circuit Testing Gesellschaft fuer Halbleiterprueftechnik mbH
Publication of AU2002350488A1 publication Critical patent/AU2002350488A1/en
Abandoned legal-status Critical Current

Links

AU2002350488A 2001-10-05 2002-10-04 Multiple electron beam device Abandoned AU2002350488A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP01123855.7 2001-10-05

Publications (1)

Publication Number Publication Date
AU2002350488A1 true AU2002350488A1 (en) 2003-04-22

Family

ID=

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