AU2002329646A1 - Electron beam processing - Google Patents

Electron beam processing

Info

Publication number
AU2002329646A1
AU2002329646A1 AU2002329646A AU2002329646A AU2002329646A1 AU 2002329646 A1 AU2002329646 A1 AU 2002329646A1 AU 2002329646 A AU2002329646 A AU 2002329646A AU 2002329646 A AU2002329646 A AU 2002329646A AU 2002329646 A1 AU2002329646 A1 AU 2002329646A1
Authority
AU
Australia
Prior art keywords
electron beam
beam processing
processing
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002329646A
Inventor
David J. Casey Jr.
Clive Chandler
Xiadong Da
Thomas J. Gannon
Christian R. Musil
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
FEI Co
Original Assignee
FEI Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by FEI Co filed Critical FEI Co
Publication of AU2002329646A1 publication Critical patent/AU2002329646A1/en
Abandoned legal-status Critical Current

Links

AU2002329646A 2001-07-27 2002-07-27 Electron beam processing Abandoned AU2002329646A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US60/308,490 2001-07-27

Publications (1)

Publication Number Publication Date
AU2002329646A1 true AU2002329646A1 (en) 2003-02-17

Family

ID=

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