AU2002348906A1 - Trench-gate semiconductor devices and the manufacture thereof - Google Patents

Trench-gate semiconductor devices and the manufacture thereof

Info

Publication number
AU2002348906A1
AU2002348906A1 AU2002348906A AU2002348906A AU2002348906A1 AU 2002348906 A1 AU2002348906 A1 AU 2002348906A1 AU 2002348906 A AU2002348906 A AU 2002348906A AU 2002348906 A AU2002348906 A AU 2002348906A AU 2002348906 A1 AU2002348906 A1 AU 2002348906A1
Authority
AU
Australia
Prior art keywords
trench
manufacture
semiconductor devices
gate semiconductor
gate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002348906A
Inventor
Miron Drobnis
Martin J. Hill
Eddie Huang
Raymond J. E. Hueting
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Koninklijke Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninklijke Philips Electronics NV filed Critical Koninklijke Philips Electronics NV
Publication of AU2002348906A1 publication Critical patent/AU2002348906A1/en
Abandoned legal-status Critical Current

Links

AU2002348906A 2001-11-16 2002-11-14 Trench-gate semiconductor devices and the manufacture thereof Abandoned AU2002348906A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB0127479.4 2001-11-16
GB0130019.3 2001-12-17
GB0221838.6 2002-09-20

Publications (1)

Publication Number Publication Date
AU2002348906A1 true AU2002348906A1 (en) 2003-05-26

Family

ID=

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