AU2002343537A8 - Stiffened surface micromachined structures and process for fabricating the same - Google Patents

Stiffened surface micromachined structures and process for fabricating the same

Info

Publication number
AU2002343537A8
AU2002343537A8 AU2002343537A AU2002343537A AU2002343537A8 AU 2002343537 A8 AU2002343537 A8 AU 2002343537A8 AU 2002343537 A AU2002343537 A AU 2002343537A AU 2002343537 A AU2002343537 A AU 2002343537A AU 2002343537 A8 AU2002343537 A8 AU 2002343537A8
Authority
AU
Australia
Prior art keywords
fabricating
same
surface micromachined
micromachined structures
stiffened surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002343537A
Other versions
AU2002343537A1 (en
Inventor
David L Dickensheets
Philip A Himmer
Robert A Friholm
Jeffrey Lutzenberger
Todd J Kaiser
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Montana State University
Original Assignee
Montana State University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Montana State University filed Critical Montana State University
Publication of AU2002343537A1 publication Critical patent/AU2002343537A1/en
Publication of AU2002343537A8 publication Critical patent/AU2002343537A8/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0067—Mechanical properties
    • B81B3/007—For controlling stiffness, e.g. ribs
AU2002343537A 2001-10-22 2002-10-21 Stiffened surface micromachined structures and process for fabricating the same Abandoned AU2002343537A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US33043501P 2001-10-22 2001-10-22
US33043301P 2001-10-22 2001-10-22
US60/330,433 2001-10-22
US60/330,435 2001-10-22
PCT/US2002/033351 WO2003036737A2 (en) 2001-10-22 2002-10-21 Stiffened surface micromachined structures and process for fabricating the same

Publications (2)

Publication Number Publication Date
AU2002343537A1 AU2002343537A1 (en) 2003-05-06
AU2002343537A8 true AU2002343537A8 (en) 2009-01-29

Family

ID=23289754

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002343537A Abandoned AU2002343537A1 (en) 2001-10-22 2002-10-21 Stiffened surface micromachined structures and process for fabricating the same

Country Status (4)

Country Link
EP (1) EP1438256A2 (en)
JP (1) JP2005506909A (en)
AU (1) AU2002343537A1 (en)
WO (1) WO2003036737A2 (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6912082B1 (en) * 2004-03-11 2005-06-28 Palo Alto Research Center Incorporated Integrated driver electronics for MEMS device using high voltage thin film transistors
DE112007003051B4 (en) * 2007-01-23 2012-12-20 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Increased rigidity micromechanical device and method of making same
EP2310205B1 (en) 2008-07-09 2013-12-11 Hewlett-Packard Development Company, L.P. Print head slot ribs
DE102009026629B4 (en) * 2009-06-02 2017-09-21 Robert Bosch Gmbh Micromechanical system with a buried thin structured polysilicon layer and method for its production
WO2011080883A1 (en) * 2009-12-28 2011-07-07 株式会社ニコン Electro-mechanical converter, spatial optical modulator, exposure device, and methods for manufacturing them
JP5630015B2 (en) * 2009-12-28 2014-11-26 株式会社ニコン Spatial light modulator, exposure apparatus and manufacturing method thereof
JP6188692B2 (en) * 2011-07-29 2017-08-30 ノヴァンタ コーポレーション System and method for providing a high rigidity and low inertia mirror by performing chemical etching
US9409763B2 (en) 2012-04-04 2016-08-09 Infineon Technologies Ag MEMS device and method of making a MEMS device
JP2013255975A (en) * 2012-06-14 2013-12-26 Fujitsu Ltd Electronic device
US9212045B1 (en) * 2014-07-31 2015-12-15 Infineon Technologies Ag Micro mechanical structure and method for fabricating the same
DE102019111634A1 (en) * 2019-05-06 2020-11-12 Lpkf Laser & Electronics Ag Process for the production of microstructures in a glass substrate
CN115140703A (en) * 2022-07-08 2022-10-04 山东大学 Pre-strain-assisted wrinkle-form micro-nano structure manufacturing device and method

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5660680A (en) * 1994-03-07 1997-08-26 The Regents Of The University Of California Method for fabrication of high vertical aspect ratio thin film structures
US5628917A (en) * 1995-02-03 1997-05-13 Cornell Research Foundation, Inc. Masking process for fabricating ultra-high aspect ratio, wafer-free micro-opto-electromechanical structures
US6411754B1 (en) * 2000-08-25 2002-06-25 Corning Incorporated Micromechanical optical switch and method of manufacture

Also Published As

Publication number Publication date
AU2002343537A1 (en) 2003-05-06
WO2003036737A3 (en) 2003-11-20
WO2003036737A2 (en) 2003-05-01
WO2003036737A8 (en) 2008-12-31
EP1438256A2 (en) 2004-07-21
JP2005506909A (en) 2005-03-10

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase