AU2002319925A1 - Phase-shifting diffraction grating interferometer and its measuring method - Google Patents

Phase-shifting diffraction grating interferometer and its measuring method

Info

Publication number
AU2002319925A1
AU2002319925A1 AU2002319925A AU2002319925A AU2002319925A1 AU 2002319925 A1 AU2002319925 A1 AU 2002319925A1 AU 2002319925 A AU2002319925 A AU 2002319925A AU 2002319925 A AU2002319925 A AU 2002319925A AU 2002319925 A1 AU2002319925 A1 AU 2002319925A1
Authority
AU
Australia
Prior art keywords
phase
diffraction grating
measuring method
grating interferometer
shifting diffraction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002319925A
Inventor
Tae-Joon Hwang
Seung-Woo Kim
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Korea Advanced Institute of Science and Technology KAIST
Original Assignee
Korea Advanced Institute of Science and Technology KAIST
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Korea Advanced Institute of Science and Technology KAIST filed Critical Korea Advanced Institute of Science and Technology KAIST
Publication of AU2002319925A1 publication Critical patent/AU2002319925A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/0201—Interferometers characterised by controlling or generating intrinsic radiation properties using temporal phase variation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/30—Grating as beam-splitter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/35—Mechanical variable delay line
AU2002319925A 2002-06-27 2002-07-15 Phase-shifting diffraction grating interferometer and its measuring method Abandoned AU2002319925A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
KR2002/36183 2002-06-27
KR10-2002-0036183A KR100457656B1 (en) 2002-06-27 2002-06-27 Phase shifted diffraction grating interferometer and measuring method
PCT/KR2002/001331 WO2004003467A1 (en) 2002-06-27 2002-07-15 Phase-shifting diffraction grating interferometer and its measuring method

Publications (1)

Publication Number Publication Date
AU2002319925A1 true AU2002319925A1 (en) 2004-01-19

Family

ID=29997388

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002319925A Abandoned AU2002319925A1 (en) 2002-06-27 2002-07-15 Phase-shifting diffraction grating interferometer and its measuring method

Country Status (3)

Country Link
KR (1) KR100457656B1 (en)
AU (1) AU2002319925A1 (en)
WO (1) WO2004003467A1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101159495B1 (en) * 2004-03-11 2012-06-22 이코스비젼 시스팀스 엔.브이. Methods and apparatus for wavefront manipulations and improved 3-d measurements
DE102005056914A1 (en) 2005-11-29 2007-05-31 Carl Zeiss Smt Ag Projection illumination system for use with production of e.g. integrated circuit, has interferometer arrangement examining optical components by measuring radiation that strikes on optical surface at specific angle of incidence
KR100925719B1 (en) * 2007-08-29 2009-11-10 연세대학교 산학협력단 System For Measuring Optics Using Member With Pin-Hole and Method Of Measuring the The Same
KR101395424B1 (en) * 2012-09-24 2014-05-14 제주대학교 산학협력단 Apparatus for measuring three-dimension and Controlling method of the same
KR101275749B1 (en) * 2012-12-05 2013-06-19 최상복 Method for acquiring three dimensional depth information and apparatus thereof
KR102218015B1 (en) * 2019-08-06 2021-02-19 한국표준과학연구원 System for measuring Grating phase using calibration Grating in FPM
DE102021205202A1 (en) 2021-05-21 2022-11-24 Carl Zeiss Smt Gmbh Measuring arrangement and method for measuring the surface shape of an optical element

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58127109A (en) * 1982-01-25 1983-07-28 Minolta Camera Co Ltd Interferometer for measuring surface shape of mirror face
JPS62284204A (en) * 1986-06-02 1987-12-10 Nec Corp Moire topography camera
JPH02196908A (en) * 1989-01-26 1990-08-03 Matsushita Electric Works Ltd Method for measuring shape of outermost surface of substance having transparent film
US5689314A (en) * 1995-06-14 1997-11-18 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Common path point diffraction interferometer using liquid crystal phase shifting
US5835217A (en) * 1997-02-28 1998-11-10 The Regents Of The University Of California Phase-shifting point diffraction interferometer
JPH10267629A (en) * 1997-03-24 1998-10-09 Nikon Corp In-process measuring apparatus for shape of concave mirror
US6307635B1 (en) * 1998-10-21 2001-10-23 The Regents Of The University Of California Phase-shifting point diffraction interferometer mask designs
US6195169B1 (en) * 1998-10-21 2001-02-27 The Regents Of The University Of California Phase-shifting point diffraction interferometer grating designs

Also Published As

Publication number Publication date
KR100457656B1 (en) 2004-11-18
WO2004003467A1 (en) 2004-01-08
KR20040001098A (en) 2004-01-07

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase